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Christophe Gorecki

MN2S
Group : MOEMS

Multiphysic Microsystems group leader

Christophe Gorecki est actuellement Directeur de Recherche au CNRS. Docteur de 3ème cycle en Optique et Traitement du Signal, il a rejoint le Laboratoire d'Optique P.M. Duffieux au CNRS en 1984. De 1984 à 1995, ses thèmes de recherche furent orientés vers la Métrologie Optique et la Reconnaissance Optique de Formes. Son Diplôme d’Habilitation à Diriger des Recherches, soutenu en 1993, a porté sur la métrologie optique et la reconnaissance optique de formes.
Il a réorienté ses recherches vers les Microsystèmes Optiques lors de d’un séjour de 3 ans (1995-1998) au LIMMS/CNRS à l’Université de Tokyo. A son retour du Japon, il a crée un groupe de recherche au sein du Département d’Optique, FEMTO-ST, dont la stratégie de recherche repose sur le développement d'une plate-forme MOEMS originale qui exploite les avantages de l’instrumentation optique avec tout le potentiel des microsystèmes. Depuis 1 janvier 2008 ce groupe a rejoint le Département MN2S, FEMTO-ST. Son programme de recherche s’articule autour des axes suivants :

  • développement de technologies de base pour les microsystèmes optiques et optique intégrée sur silicium,
  • intégration des microcapteurs opto−mécaniques résonnants sur silicium,
  • intégration de réseaux de microscopes optiques sur puce et nanocapteurs pour la microscopie optique à sonde locale,
  • intégration de micro-horloges atomiques s’appuyant sur la technologie MEMS, et
  • outils de métrologie basés sur l’utilisation de l’interférométrie optique pour la caractérisation statique et dynamique des MEMS.

Le micro-objet résultant d’une telle association intègre des fonctions photoniques sur un même substrat, bénéficiant de l’intégration aussi poussée que possible grâce aux techniques de micro-usinage collectif en technologie silicium et la nanofabrication.

C. Gorecki a mis en place de nombreuses collaborations universitaires et industrielles tant au plan local que régional, national et international (Groupe Photonique du LAAS, IMT de Neuchâtel, Thalès, LETI/CEA, Université Technologique de Varsovie, Université Technologique de Wroclaw). Il est impliqué dans un nombre important de montages européens : coordination du projet OCMMM (2001-2004, programme GROWTH), coordination de trois programmes Marie Curie (Postdoctoral Fellowships), participation au Réseaux Européen d’Excellence NEMO en Microoptique (2003-2008, programme IST). Deux autres projets européens du programme ICT commence en 2008 : coordination du projet MAC-TFC (2008-2011, intégration des micro-horloges atomiques MEMS) et SMARTIEHS (2008-2011, intégration de réseaux des interféromètres de Mirau). Enfin, C. Gorecki est le Président du Laboratoire Européen Associé franco-suisse LEA-µT. C. Gorecki participe également à deux projets concernant la micro-horloge atomique (projet ANR Télécom MHAST, contrat DGA).

C. Gorecki fut le Secrétaire de la Société Française d’Optique (1993-1995) et il est membre Fellow de la société américaine SPIE. Il a à son actif 160 publications. En 1997 il a obtenu un prix de la Fondation Canon pour le projet « interférométrie intégrée sur silicium ».

Websites project / contract in which I participate

You can find here my publication list. If you want to obtain a copy of one of them and you can not obtain it otherwise, please contact me

Publication list :

Category article
2017
  • Microfabricated vapor cells filled with a cesium dispensing paste for miniature atomic clocks
    Applied Physics Letters (Volume 110, Issue (16), apr 2017, Pages :164103 )
    Maurice, Vincent | Rutkowski, Jaroslaw | Kroemer, Eric | Bargiel, Sylwester | Passilly, Nicolas | Boudot, Rodolphe | Gorecki, Christophe | Mauri, Luca | Moraja, Marco
    doi | bibtex
  • Design and fabrication of a 2-axis electrothermal MEMS micro-scanner for optical coherence tomography
    Micromachines (Volume 8, Issue (5), may 2017, Pages :146)
    Tanguy, Quentin | Bargiel, Sylwester | Xie, Huikai | Passilly, Nicolas | Barthes, Magali | Gaiffe, Olivier | Rutkowski, Jaroslaw | Lutz, Philippe | Gorecki, Christophe
    doi | bibtex
2016
  • Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances
    Optics Letters (Volume 41, Issue (1), jan 2016, Pages :96-99)
    Albero Silvestre, Jorge | Perrin, Stéphane | Passilly, Nicolas | Krauter, Johann | Gauthier-Manuel, Ludovic | Froehly, Luc | Lullin, Justine | Bargiel, Sylwester | Osten, Wolfgang | Gorecki, Christophe
    doi | bibtex
  • Miniature Schwarzschild objective as a micro-optical component free of main aberrations: Concept, design and first realization with silicon-glass micro-machining
    Applied Optics (Volume 55, Issue (10), mar 2016, Pages :2771 - 2779)
    Baranski, Maciej | Passilly, Nicolas | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe
    doi | bibtex
  • Characterization of commercially available vertical-cavity surface-emitting lasers tuned on Cs D1 line at 894.6  nm for miniature atomic clocks
    Applied Optics (Volume 55, Issue (31), oct 2016, Pages :8839 - 8847)
    Kroemer, Eric | Rutkowski, Jaroslaw | Maurice, Vincent | Vicarini, Rémy | Abdel Hafiz, Moustafa | Gorecki, Christophe | Boudot, Rodolphe
    doi | bibtex
2015
  • Dense arrays of millimeter-sized glass lenses fabricated at wafer-level
    Optics Express (Volume 23, Issue (9), may 2015, Pages :11702 - 11712)
    Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gauthier-Manuel, Ludovic | Bernard, Florent | Froehly, Luc | Krauter, Johann | Osten, Wolfgang | Gorecki, Christophe
    pdf | doi | bibtex
  • Impact of mirror spider legs on imaging quality in Mirau micro-interferometry
    Optics Letters (Volume 40, Issue (10), may 2015, Pages :2209 - 2212)
    Lullin, Justine | Perrin, Stéphane | Baranski, Maciej | Bargiel, Sylwester | Froehly, Luc | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
    doi | bibtex
  • Characterization of Cs vapor cell coated with octadecyltrichlorosilane using coherent population trapping spectroscopy
    Journal of Applied Physics (Volume 117, Issue (18), may 2015, Pages :184901)
    Abdel Hafiz, Moustafa | Maurice, Vincent | Chutani, Ravinder Kumar | Passilly, Nicolas | Gorecki, Christophe | Guerandel, S. | De Clercq, Emeric | Boudot, Rodolphe
    doi | bibtex
  • Cs vapor microcells with Ne-He buffer gas mixture for high operation-temperature miniature atomic clocks
    Optics Express (Volume 23, Issue (14), jul 2015, Pages :18373 - 18380)
    Kroemer, Eric | Abdel Hafiz, Moustafa | Maurice, Vincent | Fouilland, B | Gorecki, Christophe | Boudot, Rodolphe
    doi | bibtex
  • Laser light routing in an elongated micromachined vapor cell with diffraction gratings for atomic clock applications
    Scientific Reports (Volume 5, sep 2015, Pages :14001 (12 pages))
    Chutani, Ravinder Kumar | Maurice, Vincent | Passilly, Nicolas | Gorecki, Christophe | Boudot, Rodolphe | Abdel Hafiz, Moustafa | Abbe, Philippe | Galliou, Serge | Rauch, Jean-Yves | De Clercq, Emeric
    doi | bibtex
  • An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
    Journal of Micromechanics and Microengineering (Volume 25, Issue (11), oct 2015, Pages :115013)
    Lullin, Justine | Bargiel, Sylwester | Le Moal, Patrice | Perrin, Stéphane | Albero Silvestre, Jorge | Passilly, Nicolas | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
    pdf | doi | bibtex
  • Swept source optical coherence tomography endomicroscope based on vertically integrated Mirau micro interferometer: concept and technology
    IEEE Sensors Journal (Volume 15, Issue (12), dec 2015, Pages :7061 - 7070 )
    STRUK, Przemyslaw Piotr | Bargiel, Sylwester | Froehly, Luc | Baranski, Maciej | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
    pdf | doi | bibtex
  • Simple method based on intensity measurements for characterization of aberrations from micro-optical components
    Applied Optics (Volume 54, Issue (31), nov 2015, Pages :9060-9064)
    Perrin, Stéphane | Baranski, Maciej | Froehly, Luc | Albero Silvestre, Jorge | Passilly, Nicolas | Gorecki, Christophe
    doi | bibtex
  • Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems
    Applied Optics (Volume 54, Issue (22), aug 2015, Pages :6924 - 6934)
    Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe | Chenping, Jia | Fromel, J. | Wiemer, Maik
    pdf | doi | bibtex
2014
  • Deep Wet-Etched Silicon Cavities for Micro-Optical Sensors: Influence of Masking on 111 Sidewalls Surface Quality
    Journal of Microelectromechanical Systems (Volume 23, Issue (3), jun 2014, Pages :585 - 591)
    Chutani, Ravinder Kumar | Passilly, Nicolas | Albero Silvestre, Jorge | Baranski, Maciej | Gorecki, Christophe
    doi | bibtex
  • Wafer-level fabrication of micro Cube-typed beam-splitters by saw-dicing of glass substrates
    IEEE Photonics Technology Letters (Volume 26, Issue (1), jan 2014, Pages :100 - 103)
    Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Chenping, Jia | Frömel, Jörg | Wiemer, Maik
    doi | bibtex
  • Single-step deep reactive ion etching of ultra-deep Silicon cavities with smooth sidewalls
    Sensors and Actuators A: Physical (Volume 208, feb 2014, Pages :66 -72)
    Chutani, Ravinder Kumar | Hasegawa, Madoka | Maurice, Vincent | Passilly, Nicolas | Gorecki, Christophe
    doi | bibtex
  • A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement
    Optics Express (Volume 22, Issue (11), may 2014, Pages :13202 - 132012)
    Baranski, Maciej | Perrin, Stéphane | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
    doi | bibtex
  • Towards a miniature atomic scalar magnetometer using a liquid crystal polarization rotator
    Sensors and Actuators A: Physical (Volume 216, sep 2014, Pages :386 – 393)
    Rutkowski, Jaroslaw | Fourcault, W. | Bertrand, F. | Rossini, U. | Guétin, S | Le Calvez, S. | Jager, T. | Herth, Etienne | Gorecki, Christophe | Le Prado, M. | Léger, J - M. | Morales, S.
    doi | bibtex
  • Plastic light coupler for absorbance detection in silicon microfluidic channels
    Microfluidics and Nanofluidics (Volume 18, Issue (4), apr 2014, Pages :559 - 568)
    Ottevaere, Heidi | Van Overmeire, Sara | Albero Silvestre, Jorge | Nieradko, Lukasz | Desmet, Gert | Gorecki, Christophe | Thienpont, Hugo
    doi | bibtex
2013
  • Effects of getters on hermetically sealed micromachined cesium-neon cells for atomic clocks
    Journal of Micromechanics and Microengineering (Volume 23, Issue (5), may 2013, Pages :055022 )
    Hasegawa, Madoka | Chutani, Ravinder Kumar | Boudot, Rodolphe | Mauri, Luca | Gorecki, Christophe | Liu, Xiaochi | Passilly, Nicolas
    doi | bibtex
  • Coherent-population-trapping resonances in buffer-gas-filled Cs-vapor cells with push-pull optical pumping
    Physical Review A (Volume 87, Issue (1), jan 2013, Pages :013416-1 013416-12 )
    Liu, Xiaochi | Merolla, Jean-Marc | Guerandel, S. | Gorecki, Christophe | De Clercq, Emeric | Boudot, Rodolphe
    doi | bibtex
  • Erratum: Coherent-population-trapping resonances in buffer-gas-filled Cs-vapor cells with push-pull optical pumping
    Physical Review A (Volume 87, Issue (2), feb 2013, Pages :029903 )
    Liu, Xiaochi | Merolla, Jean-Marc | Guerandel, S. | Gorecki, Christophe | De Clercq, Emeric | Boudot, Rodolphe
    doi | bibtex
2012
  • AC Stark-shift in CPT-based Cs miniature atomic clocks
    Applied Physics B: Lasers and Optics (Volume 109, Issue (1), oct 2012, Pages :89-97)
    Miletic, Danijela | Affolderbach, Chistoph | Hasegawa, Madoka | Boudot, Rodolphe | Gorecki, Christophe | Mileti, Gaetano
    doi | bibtex
  • Thermal management of fully LTCC-packaged Cs vapour cell for MEMS atomic clock
    Sensors and Actuators A: Physical (Volume 174, feb 2012, Pages :58 - 68)
    Chutani, Ravinder Kumar | Galliou, Serge | Passilly, Nicolas | Gorecki, Christophe | Sitomaniemi, A. | Heikkinen, M. | Kautio, K. | Keränen, A. | Jornod, A.
    doi | bibtex
  • A High-Performance Frequency Stability Compact CPT Clock Based on a Cs-Ne Microcell
    IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control (Volume 59, Issue (11), nov 2012, Pages :2584 - 2587)
    Boudot, Rodolphe | Liu, Xiaochi | Abbe, Philippe | Chutani, Ravinder Kumar | Passilly, Nicolas | Galliou, Serge | Gorecki, Christophe | Giordano, Vincent
    doi | bibtex
  • Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses
    Procedia Engineering (Volume 47, sep 2012, Pages :1133 – 1136)
    Bargiel, Sylwester | Jia, Minping | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
    doi | bibtex
  • Microcellules à Vapeur de Césium pour la Première Micro-Horloge Atomique Européenne : Technologie et Caractérisation Métrologique
    Annales françaises des microtechniques et de chronométrie (Volume 80 - 81, Issue (59), 2012, Pages :83 - 103)
    Boudot, Rodolphe | Hasegawa, Madoka | Chutani, Ravinder Kumar | Liu, Xiaochi | Passilly, Nicolas | Abbe, Philippe | Galliou, Serge | Gorecki, Christophe | Giordano, Vincent
    bibtex
  • Optical characterization of a polymer micro - optical light coupler for silicon channels
    Photonics Letters of Poland (Volume 4, Issue (2), 2012, Pages :69 - 71)
    Ottevaere, Heidi | Van Overmeire, Sara | Albero Silvestre, Jorge | Nieradko, Lukasz | Gorecki, Christophe | Thienpont, Hugo
    pdf | doi | bibtex
  • Microsystèmes et microcomposants pour l’instrumentation optique sur puce
    Photoniques (Volume 60, aug 2012, Pages :33 - 37)
    Passilly, Nicolas | Bargiel, Sylwester | Gorecki, Christophe
    doi | bibtex
2011
  • Micromachined array-type Mirau interferometer for parallel inspection of MEMS
    Journal of Micromechanics and Microengineering (Volume 21, Issue (6), jun 2011, Pages :065005 (10 pages))
    Albero Silvestre, Jorge | Bargiel, Sylwester | Passilly, Nicolas | Dannberg, P. | Stumpf, M. | Zeitner, U.D. | Rousselot, Christophe | Gastinger, Kay | Gorecki, Christophe
    doi | bibtex
  • First-order cancellation of the Cs clock frequency temperature-dependence in Ne-Ar buffer gas mixture
    Optics Express (Volume 19, Issue (4), feb 2011, Pages :3106 - 3114)
    Boudot, Rodolphe | Miletic, Danijela | Dziuban, Piotr | Affolderbach, Chistoph | Knapkiewicz, Pawel | Dziuban, Jan Andrzej | Mileti, Gaetano | Giordano, Vincent | Gorecki, Christophe
    doi | bibtex
  • Coherent population trapping resonances in Cs–Ne vapor microcells for miniature clocks applications
    Journal of Applied Physics (Volume 109, Issue (1), jan 2011, Pages :014912 )
    Boudot, Rodolphe | Dziuban, Piotr | Hasegawa, Madoka | Chutani, Ravinder Kumar | Galliou, Serge | Giordano, Vincent | Gorecki, Christophe
    doi | bibtex
  • Microfabrication of cesium vapor cells with buffer gas for MEMS atomic clocks
    Sensors and Actuators A: Physical (Volume 167, Issue (2), jun 2011, Pages :594 - 601)
    Hasegawa, Madoka | Chutani, Ravinder Kumar | Gorecki, Christophe | Boudot, Rodolphe | Dziuban, Piotr | Giordano, Vincent | Clatot, Stanislas | Mauri, Luca
    doi | bibtex
  • A Numerical Model of Wet Isotropic Etching of Silicon Molds for Microlenses Fabrication
    Journal of The Electrochemical Society (Volume 158, Issue (11), oct 2011, Pages :D681 - D688)
    Baranski, Maciej | Albero Silvestre, Jorge | Kasztelanic, Rafal | Gorecki, Christophe
    doi | bibtex
  • Interferometric study of reliability of microcantilevers driven by AlN sandwiched between two metal layers
    Sensors and Actuators A: Physical (Volume 171, Issue (2), nov 2011, Pages :306 - 316)
    Krupa, Katarzyna | Gorecki, Christophe | Józwicki, Romuald | Jozwik, Michal | Andrei, Alexandru
    doi | bibtex
2010
  • Towards micro-assembly of hybrid MOEMS components on reconfigurable silicon free-space micro-optical bench
    Journal of Micromechanics and Microengineering (Volume 20, Issue (4), apr 2010, Pages :045012 (12pages))
    Bargiel, Sylwester | Rabenorosoa, Kanty | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe
    pdf | doi | bibtex
  • Quadratic dependence on temperature of Cs 0-0 hyperfine resonance frequency in single Ne buffer gas microfabricated vapour cell
    Electronics Letters (Volume 46, Issue (15), jul 2010, Pages :1069 - 1070)
    Miletic, Danijela | Dziuban, Piotr | Boudot, Rodolphe | Hasegawa, Madoka | Chutani, Ravinder Kumar | Mileti, Gaetano | Giordano, Vincent | Gorecki, Christophe
    doi | bibtex
  • A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications
    Sensors and Actuators A: Physical (Volume 163, Issue (1), sep 2010, Pages :255 - 265)
    Laszczyk, Karolina Urszula | Bargiel, Sylwester | Gorecki, Christophe | Krezel, Jerzy | Dziuban, Piotr | Kujawińska, Malgorzata | Callet, Damien | Frank, Sven
    doi | bibtex
  • Low cost production of computer-generated holograms: from design to optical evaluation
    Journal of the European Optical Society - Rapid publications (Volume 5, 2010, Pages :10011 (9 pages))
    Moreno, Ignacio | Martínez-García, Antonio | Nieradko, Lukasz | Albero Silvestre, Jorge | Gorecki, Christophe
    doi | bibtex
  • Matrixes of unconventional micro-optical components molded with etched silicon
    Journal of the European Optical Society - Rapid publications (Volume 5, 2010, Pages :10001 (9 pages))
    Albero Silvestre, Jorge | Gorecki, Christophe | Nieradko, Lukasz | Päivänranta, Birgit | Gomez, Virginia | Thienpont, Hugo | Passilly, Nicolas
    doi | bibtex
  • Plastic light coupler for absorbance detection in silicon microfluidic devices
    Microfluidics and Nanofluidics (Volume 18, apr 2010, Pages :559–568)
    Van Overmeire, Sara | Ottevaere, Heidi | Albero Silvestre, Jorge | Nieradko, Lukasz | Desmet, Gert | Gorecki, Christophe | Thienpont, Hugo
    doi | bibtex
Category inproceedings
2017
  • Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispenser
    Proceedings of the 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFC), (2017, Pages pages 636 - 637)
    Maurice, Vincent | Rutkowski, Jaroslaw | Kroemer, Eric | Bargiel, Sylwester | Passilly, Nicolas | Boudot, Rodolphe | Chutani, Ravinder Kumar | Galliou, Serge | Gorecki, Christophe | Mauri, Luca | Moraja, Marco
    doi | bibtex
2016
  • Aberration retrieval for the characterization of micro-optical components
    Proc. of SPIE Vol. 9890 98901A-6 (Volume 9890, 2016, Pages pages 98901A-1)
    Perrin, Stéphane | Passilly, Nicolas | Froehly, Luc | Gorecki, Christophe
    doi | bibtex
  • Wafer-level fabrication of arrays of glass lens doublets
    SPIE Micro-Optics 2016 (Volume 9888, 2016, Pages pages 98880T (8 pages))
    Passilly, Nicolas | Perrin, Stéphane | Albero Silvestre, Jorge | Krauter, Johann | Gaiffe, Olivier | Gauthier-Manuel, Ludovic | Froehly, Luc | Lullin, Justine | Bargiel, Sylwester | Osten, Wolfgang | Gorecki, Christophe
    doi | bibtex
  • Vertical integration of array-type miniature interferometers at wafer level by using multi-stack anodic bonding
    Proc. SPIE. 9890, Optical Micro- and Nanometrology VI, 989011 (2016)
    Wang, Wei - Shan | Wiemer, Maik | Froemel, Joerg | Enderlein,Tom | Gessner, Thomas | Lullin, Justine | Bargiel, Sylwester | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
    doi | bibtex
  • Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry
    Proc. SPIE. 9890, Optical Micro- and Nanometrology VI, 98900D (2016) (2016)
    Bargiel, Sylwester | Lullin, Justine | Le Moal, Patrice | Perrin, Stéphane | Passilly, Nicolas | Albero Silvestre, Jorge | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
    doi | bibtex
  • Array-type miniature interferometer as the core optical microsystem of an Optical Coherence Tomography device for tissue inspection
    Proc. SPIE. Optical Micro- and Nanometrology VI (Volume 9890, 2016, Pages pages 98900C-6)
    Passilly, Nicolas | Perrin, Stéphane | Lullin, Justine | Albero Silvestre, Jorge | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe | Krauter, Johann | Osten, Wolfgang | Wang, Wei - Shan | Wiemer, Maik
    doi | bibtex
  • Matrice d'interféromètres de Mirau micro-fabriqués comme composant d'un dispositif OCT plein-champ multicanaux
    Journées de l'Optique 2016 - JNOG - Club Horizons de l'optique / Bordeaux, France (Volume P165, 2016, Pages pages 405-406)
    Passilly, Nicolas | Perrin, Stéphane | Froehly, Luc | Bargiel, Sylwester | Gaiffe, Olivier | Lullin, Justine | Albero Silvestre, Jorge | Gorecki, Christophe
    bibtex
2015
  • Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer
    MOEMS and Miniaturized Systems XIV (Volume 9375, 2015, Pages pages 93750P (7 pages))
    Wang, Wei - Shan | Lullin, Justine | Wiemer, Maik | Fromel, J. | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe | Gessner, Thomas
    doi | bibtex
  • Technological platform for vertical multi-wafer integration of miniature imaging instruments
    MOEMS and Miniaturized Systems XIV (Volume 9375, 2015, Pages pages 93750L (8 pages))
    Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik | Fromel, J. | Wuensh, D. | Wang, Wei - Shan
    doi | bibtex
  • Microsystème OCT plein-champ multi-canaux à base de composants MOEMS intégrés verticalement
    Optique Bretagne 2015. Horizons de l’Optique / Rennes, France (2015, Pages pages 128-129)
    Passilly, Nicolas | Lullin, Justine | Perrin, Stéphane | Albero Silvestre, Jorge | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe
    pdf | bibtex
  • Full-field swept-source optical coherence tomography with phase-shifting techniques for skin cancer detection
    SPIE Optical Metrology. International Society for Optics and Photonics / Munich, Germany (Volume 9529, Issue , 2015, Pages pages 952913)
    Krauter, Johann | Boettcher, T. | Körner, K. | Gronle, M. | Osten, Wolfgang | Passilly, Nicolas | Froehly, Luc | Perrin, Stéphane | Gorecki, Christophe
    doi | bibtex
  • Spectroscopy and hyperfine clock frequency shift measurements in Cs vapor cells coated with octadecyltrichlorosilanes (OTS)
    Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International (2015, Pages pages 33 - 36)
    Abdel Hafiz, Moustafa | Maurice, Vincent | Chutani, Ravinder Kumar | Passilly, Nicolas | Gorecki, Christophe | Guerandel, S. | De Clercq, Emeric | Boudot, Rodolphe
    doi | bibtex
  • Performance analysis of a full-field and full-range swept-source OCT system
    Applied Advanced Optical Metrology Solutions / San Diego, California, United States (Volume 9576, 2015, Pages pages 957609)
    Krauter, Johann | Boettcher, T. | Korner, K. | Gronle, M. | Osten, Wolfgang | Passilly, Nicolas | Froehly, Luc | Perrin, Stéphane | Gorecki, Christophe
    doi | bibtex
  • Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy
    (2015)
    STRUK, Przemyslaw Piotr | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe
    pdf | bibtex
  • Fabrication de composants microoptiques par recuit de verre
    Horizons de l’Optique 2015 / Rennes, France (Publisher : Société Française d’Optique (SFO), 2015, Pages pages 126-127)
    Carrion Perez, José Vicente | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
    pdf | bibtex
  • Glass on MEMS – hybrid and monolithic integration technologies for miniature optical instruments
    16th EPFL CMi Annual Meeting / Lausanne, Switzerland (2015)
    Bargiel, Sylwester | Lullin, Justine | STRUK, Przemyslaw Piotr | Baranski, Maciej | Albero Silvestre, Jorge | Passilly, Nicolas | Gorecki, Christophe
    bibtex
2014
  • Optical Design of a Vertically Integrated Array-type Mirau-based OCT system
    SPIE Photonics Europe 2014 / Brussels, Belgique (Volume 9132, 2014, Pages pages 91320L)
    Krauter, Johann | Boettcher, T. | Osten, Wolfgang | Lyda, W. | Passilly, Nicolas | Froehly, Luc | Bargiel, Sylwester | Albero Silvestre, Jorge | Perrin, Stéphane | Lullin, Justine | Gorecki, Christophe
    bibtex
  • Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function
    SPIE Photonics Europe 2014 / Bruxelles, Belgique (Volume 9132, 2014, Pages pages 913216 (1-8) )
    Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
    doi | bibtex
  • Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry
    2014 International Conference on Optical MEMS and Nanophotonics (OMN2014) / Glasgow, UK (Volume , Issue 14682765 , 2014, Pages pages 87 - 88)
    Lullin, Justine | Bargiel, Sylwester | Courjon, Emilie | Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
    bibtex
  • Simple setup for optical characterization of microlenses
    Proc. SPIE, Interferometry XVII: Advanced Applications. / San Diego, California, United States. (Volume 9204, 2014, Pages pages 92040D)
    Perrin, Stéphane | Baranski, Maciej | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
    doi | bibtex
  • A platform for vertical multi-wafer integration of micromachined microscopes
    19th Chemnitzer Seminar “System integration technologies” / Chemnitz, Allemagne (2014)
    Gorecki, Christophe
    bibtex
  • Topography Measurements of High Gradient and Reflective Micro-structures by Digital Holography
    7th International Workshop on Advanced Optical Imaging and Metrology / Nurtingen, UK (2014, Pages pages 623 - 628)
    Jozwik, Michal | Kozacki, Tomasz | Lizewski, Kamil | Baranski, Maciej | Gorecki, Christophe
    doi | bibtex
  • Arrays of millimeter-sized glass lenses for miniature inspection system
    SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014 / Brussels, Belgium (Volume 9130, 2014, Pages pages 91300U)
    Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
    doi | bibtex
  • Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners
    (Publisher : Fraunhofer, Volume 9, Issue 1, 2014, Pages pages 128 - 133)
    Wiemer, Maik | Wuensh, D. | Fromel, J. | Gessner, Thomas | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
    bibtex
  • Miniature Cs vapor cell atomic clocks based on Coherent Population Trapping in FEMTO-ST
    Proceedings of the Micro- and Millimetre Wave Technology and Techniques Workshop 2014 / Noordwijk, The Netherlands (2014)
    Boudot, Rodolphe | Maurice, Vincent | Chutani, Ravinder Kumar | Kroemer, Eric | Abbe, Philippe | Galliou, Serge | Passilly, Nicolas | Gorecki, Christophe
    bibtex
2013
  • Premier prototype européen d'une horloge atomique MEMS
    / Paris, France (2013)
    Boudot, Rodolphe | Passilly, Nicolas | Hasegawa, Madoka | Galliou, Serge | Chutani, Ravinder Kumar | Giordano, Vincent | Gorecki, Christophe
    bibtex
  • Microsystèmes pour instrumentation optique sur puce
    Atelier "Instrumentation optique embarquée" / Toulouse, France (2013)
    Gorecki, Christophe
    bibtex
  • MEMS et microoptique pour l'instrumentation optique sur puce
    14èmes Journées Nano, Micro et Optoélectronique (JNMO) / Evian, France (2013)
    Gorecki, Christophe
    bibtex
  • 3D micro-optical lens scanner made by multi-wafer bonding technology
    / San Francisco, California, USA (Volume 8616, 2013, Pages pages 861605 (10 pages))
    Bargiel, Sylwester | Gorecki, Christophe | Baranski, Maciej | Passilly, Nicolas | Wiemer, Maik | Jia, C. | Fromel, J.
    doi | bibtex
  • Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate
    17th International Conference on Solid-State Sensors, Actuators and Microsystems / Barcelone (2013, Pages pages 534 - 537)
    Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Jia, C. | Fromel, J. | Wiemer, Maik
    doi | bibtex
  • Developments of miniature atomic clocks based on Coherent Population Trapping, VCSELs and MEMS: Technology of fabrication and laser source requirements
    Proc. of 2nd European Workshop on VeCSELs / Montpellier, France (2013, Pages pages 51)
    Passilly, Nicolas | Boudot, Rodolphe | Chutani, Ravinder Kumar | Gorecki, Christophe | Al-Samaneh, Ahmed | Wahl, D. | Michalzik, Rainer
    bibtex
2012
  • Characterization of compact CPT Clocks based on a Cs-Ne microcell
    Prcoceedings of the European Frequency and Time Forum (EFTF), 2012 / Gothenburg, Suède (Publisher : IEEE, 2012, Pages pages 79--82)
    Boudot, Rodolphe | Liu, Xiaochi | Kraemer, E. | Abbe, Philippe | Passilly, Nicolas | Galliou, Serge | Chutani, Ravinder Kumar | Giordano, Vincent | Gorecki, Christophe | Al-Samaneh, Ahmed | Wahl, D. | Michalzik, Rainer
    doi | bibtex
  • Thermal analysis of LTCC packaged MEMS atomic clock
    Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) / Grenoble, France (Publisher : IEEE, 2012, Pages pages 171 - 173)
    Chutani, Ravinder Kumar | Galliou, Serge | Passilly, Nicolas | Gorecki, Christophe | Sitomaniemi, A. | Heikkinen, M. | Kautio, K. | Keränen, A. | Jornod, A.
    bibtex
  • Development of First European Chip-scale Atomic Clocks:Technologies, Assembling and Metrology
    26th European Conference on Solid-State Transducers, EUROSENSOR 2012 / Krakow, Poland (Publisher : Elsevier, Volume 47, 2012, Pages pages 898 – 903)
    Gorecki, Christophe
    doi | bibtex
  • Fabrication of 100% fill factor arrays of microlenses from Silicon molds
    Micro-Optics 2012 / Brussels, Belgium (Volume 8428, Issue 84281G, 2012, Pages pages 1 - 7)
    Baranski, Maciej | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
    doi | bibtex
  • Micromachined array-type Mirau interferometer for MEMS metrology
    SPIE 8494, Interferometry XVI: Applications / San Diego, California (Volume 8494, 2012, Pages pages 849403)
    Gorecki, Christophe | Bargiel, Sylwester | Albero Silvestre, Jorge | Passilly, Nicolas | Kujawińska, Malgorzata | Zeitner, U.D.
    doi | bibtex
  • Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses
    26th European Conference on Solid-State Transducers, EUROSENSOR 2012 / Krakow, Poland (Volume 47, 2012, Pages pages 1133 - 1136)
    Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
    doi | bibtex
  • Interferometry of AlN-based microcantilevers to determine the material properties and failure mechanisms
    Proc. SPIE 8430, Optical Micro- and Nanometrology IV / Brussels, Belgium (Volume 8430, 2012, Pages pages 84300D)
    Gorecki, Christophe | Krupa, Katarzyna | Józwik, Michał
    doi | bibtex
  • Determination of failure mechanisms for aln-based microcantilevers with using of twyman-green interferometry
    Proc. SPIE 8494, Interferometry XVI: Applications / San Diego, CA (Volume 8494, 2012, Pages pages 84940T)
    Gorecki, Christophe
    doi | bibtex
  • Development of First European Chip-scale Atomic Clocks:Technologies, Assembling and Metrology
    26th European Conference on Solid-State Transducers, EUROSENSOR 2012 / Cracovie, Pologne (2012)
    Gorecki, Christophe
    bibtex
  • Bonding and contacting of vertically integrated 3-D microscanners
    IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition / San Jose, CA (2012)
    Wiemer, Maik | Fromel, J. | Jia, C. | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
    bibtex
  • Development of First European Chip-scale Atomic Clocks: Technologies, Assembling and Metrology
    26th European Conference on Solid-State Transducers, EUROSENSOR 2012 / Krakow, Poland (Publisher : Elsevier, Volume 47, 2012, Pages pages 898 - 903)
    Gorecki, Christophe
    doi | bibtex
  • MOEMS and microoptical components for optics and time-frequency
    20th International Conference on Advanced Laser Technologies (ALT’12) / Thun, Suisse (2012)
    Gorecki, Christophe
    bibtex
  • A hierarchic bonding procedure for the assembly of micro confocal microscope
    / Tokyo, Japan (2012, Pages pages 187 - 189)
    Jia, C. | Fromel, J. | Gessner, Thomas | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gorecki, Christophe
    doi | bibtex
2011
  • Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization
    International Manufacturing Science and Engineering Conference, MSEC'11. / Oregon State University Corvallis, USA (Volume sur CD ROM, 2011, Pages pages 1-7)
    Rabenorosoa, Kanty | Clevy, Cédric | Bargiel, Sylwester | Mascaro, Jean-Philippe | Lutz, Philippe | Gorecki, Christophe
    pdf | bibtex
  • Microfabrication And Thermal Behavior Of Miniature Cesium-Vapor Cells For Atomic Clock Operations
    24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) / Cancun, Mexico (Publisher : IEEE, 2011, Pages pages 712 - 715)
    Hasegawa, Madoka | Chutani, Ravinder Kumar | Gorecki, Christophe | Boudot, Rodolphe | Dziuban, Piotr | Galliou, Serge | Passilly, Nicolas | Giordano, Vincent | Jornod, A.
    doi | bibtex
  • Dark line resonances in Cs-Ne vapor microcells for chip scale atomic clocks
    Proc. of the 2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (IFCS/EFTF) / San Francisco, CA (2011, Pages pages 794 - 798)
    Boudot, Rodolphe | Dziuban, Piotr | Liu, Xiaochi | Hasegawa, Madoka | Chutani, Ravinder Kumar | Galliou, Serge | Giordano, Vincent | Gorecki, Christophe
    doi | bibtex
  • Cs collisional frequency shift measurements in microcells filled with a Ne-Ar buffer gas mixture
    IEEE International Frequency Control Symposium / San Francisco, CA (2011, Pages pages 230 - 232)
    Boudot, Rodolphe | Dziuban, Piotr | Giordano, Vincent | Gorecki, Christophe | Miletic, Danijela | Affolderbach, Chistoph | Mileti, Gaetano | Knapkiewicz, Pawel | Dziuban, Jan Andrzej
    doi | bibtex
  • Micromachined array-type Mirau interferometer for MEMS metrology
    / Beijing, China (2011, Pages pages 546 - 549)
    Gorecki, Christophe | Bargiel, Sylwester | Albero Silvestre, Jorge | Passilly, Nicolas | Rousselot, Christophe | Zeitner, U.D. | Gastinger, Kay
    doi | bibtex
  • Light shift in CPT based Cs miniature atomic clocks
    2011 Joint Conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS) / San Francisco, CA (2011, Pages pages 200 - 202)
    Miletic, Danijela | Affolderbach, Chistoph | Mileti, Gaetano | Hasegawa, Madoka | Gorecki, Christophe
    doi | bibtex
  • Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table
    Proc. of Eurosensor XXIV Conference / Linz, Austria (Publisher : Elsevier, Volume 5, 2011, Pages pages 428 - 431)
    Bargiel, Sylwester | Rabenorosoa, Kanty | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe | Mascaro, Jean-Philippe
    pdf | doi | bibtex
  • Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens
    / Linz, Austria (Publisher : Elsevier, Volume 5, 2011, Pages pages 762 - 765)
    Bargiel, Sylwester | Gorecki, Christophe | Verdot, Thierry | Laszczyk, Karolina Urszula | Albero Silvestre, Jorge | El Fissi, Lamia
    doi | bibtex
  • Parallel approach to MEMS and micro-optics interferometric testing
    22nd congress of the International Commission for Optics 2011 (ICO 22) / Puebla, Mexico (2011)
    Kujawińska, Malgorzata | Beer, Stephan | Gastinger, Kay | Gorecki, Christophe | Haugholt, K - H. | Józwik, Michał | Lambelet, Patick | Paris, R. | Styk, A. | Zeitner, U.D.
    doi | bibtex
2010
  • Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.
    Frontiers of Assembly and Manufacturing - Selected papers from ISAM 2009 / Seoul, Korea (Publisher : Springer, 2010, Pages pages 99 - 112)
    Rabenorosoa, Kanty | Bargiel, Sylwester | Clevy, Cédric | Lutz, Philippe | Gorecki, Christophe
    pdf | doi | bibtex
  • Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table
    Eurosensor XXIV Conference / Linz, Autriche (Publisher : Elsevier, Volume 5, 2010, Pages pages 428-431)
    Bargiel, Sylwester | Rabenorosoa, Kanty | Mascaro, Jean-Philippe | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe
    pdf | doi | bibtex
  • Fabrication and spectroscopy of Cs vapor cells with buffer gas for miniature atomic clock
    EFTF-2010 24th European Frequency and Time Forum / Noordwijk (Publisher : IEEE, 2010, Pages pages P1.13 (6 pages))
    Miletic, Danijela | Affolderbach, Chistoph | Breschi, E | Schori, C. | Mileti, Gaetano | Hasegawa, Madoka | Chutani, Ravinder Kumar | Dziuban, Piotr | Boudot, Rodolphe | Giordano, Vincent | Gorecki, Christophe
    doi | bibtex
  • Spectroscopy of micro-fabricated Cs vapours cells for miniature atomic clocks
    16th International School on Quantum Electronics: Laser Physics and Applications / Nessebar, Bulgaria (Publisher : SPIE, Volume 7747, 2010, Pages pages 77470F)
    Miletic, Danijela | Affolderbach, Chistoph | Mileti, Gaetano | Hasegawa, Madoka | Gorecki, Christophe
    doi | bibtex
  • Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens
    Eurosensor XXIV Conference / Linz, Austria (Publisher : Elsevier, Volume 5, 2010, Pages pages 762 – 765)
    Bargiel, Sylwester | Gorecki, Christophe | Verdot, Thierry | Laszczyk, Karolina Urszula | Albero Silvestre, Jorge | El Fissi, Lamia
    doi | bibtex
  • MEMS caesium vapour cell for european micro-atomic-clock
    Proc. Eurosensors XXIV, September 5–8, 2010, Linz, Austria / Linz, Austria (Publisher : Elsevier, Volume 5, 2010, Pages pages 721 - 724)
    Knapkiewicz, Pawel | Dziuban, Jan Andrzej | Walczak, Rafał | Mauri, Luca | Dziuban, Piotr | Gorecki, Christophe
    doi | bibtex
  • Reliability study of AlN-driven microcantilevers based on interferometric measurements of their static and dynamic behaviours
    Interferometry XV: Applications / San Diego, CA (Publisher : SPIE, Volume 7791, 2010, Pages pages 779104)
    Gorecki, Christophe | Krupa, Katarzyna | Józwicki, Romuald | Jozwik, Michal
    doi | bibtex
  • Level set method for microfabrication simulations
    Micro-Optics 2010 / Brussels, Belgium (Publisher : SPIE, Volume 7716, 2010, Pages pages 77161W)
    Baranski, Maciej | Kasztelanic, Rafal | Albero Silvestre, Jorge | Nieradko, Lukasz | Gorecki, Christophe
    doi | bibtex
  • Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS
    Micro-Optics 2010 / Brussels, Belgium (Publisher : SPIE, Volume 7716, 2010, Pages pages 771621)
    Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe | Gastinger, Kay
    doi | bibtex
  • Simulation and in-plane movement characterization of 2D MEMS platform
    Optical Micro- and Nanometrology III / Brussels, Belgium (Publisher : SPIE, Volume 7718, 2010, Pages pages 77180H)
    Krezel, Jerzy | Laszczyk, Karolina Urszula | Bargiel, Sylwester | Gorecki, Christophe | Kujawińska, Malgorzata | Parriaux, Olivier | Tonchev, Svetlen
    doi | bibtex
  • Towards the Realization of the First European MEMS Atomic Clock in the Frame of MAC-TFC Proposal
    International Microelectronics And Packaging IMAPS-CPMT (ELTE-IMAPS 2010) / Wroclaw, Poland (2010)
    Gorecki, Christophe
    bibtex
Category misc
2017
  • Cellule à gaz pour un capteur atomique et procédé de remplissage d'une cellule à gaz
    (jan 2017)
    Maurice, Vincent | Passilly, Nicolas | Gorecki, Christophe
    bibtex
  • Dispositif de mise en forme d'un faisceau laser pour un capteur atomique
    une référence international : WO 2017017351 A1 (feb 2017)
    Passilly, Nicolas | Gorecki, Christophe | Maurice, Vincent
    bibtex
2016
  • Caesium atomic micro-clock microcell buffer gas mixture
    (apr 2016)
    Boudot, Rodolphe | Gorecki, Christophe | Maurice, Vincent | Kroemer, Eric | Fouilland, B
    bibtex
2014
  • Arrays of millimeter-sized glass lenses for miniature inspection systems
    (apr 2014)
    Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
    bibtex
  • Cellule à vapeur alcaline notamment pour horloge atomique et procédé de fabrication
    Numéro de demande PCT/FR2013/052432 Date de publication 17 avr. 2014 Date de dépôt 11 oct. 2013 Date de priorité 12 oct. 2012 (apr 2014)
    Passilly, Nicolas | Gorecki, Christophe | Chutani, Ravinder Kumar | Boudot, Rodolphe
    bibtex
2010
  • Optical inspection system
    (dec 2010)
    Gorecki, Christophe
    bibtex
  • La collaboration franco-suisse dans le cadre du pro jet MAC TFC : vers une version européenne de micro-horloge atomique
    Présenté le 16 septembre 2010 (sep 2010)
    Gorecki, Christophe
    bibtex
Category proceedings
2015
  • Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy
    International Conference on Optical MEMS and Nanophotonics (OMN 2015), IEEE / Jerusalem, Israel (Editor : , Volume 2015, dec 2015)
    STRUK, Przemyslaw Piotr | Bargiel, Sylwester | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
    bibtex
Category unpublished
2012
  • Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses ( 2012)
    Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Fromel, J. | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
    bibtex
  • Reconnaissance de ses activités en MOEMS ( 2012)
    Gorecki, Christophe
    bibtex
  • Prix de l'European Optical Society ( 2012)
    Gorecki, Christophe
    bibtex
2010
  • Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens (sep 2010)
    Bargiel, Sylwester | Gorecki, Christophe | Laszczyk, Karolina Urszula | Verdot, Thierry | Albero Silvestre, Jorge | El Fissi, Lamia
    bibtex