Research departments


Nanorobotics (Robotics and Mechatronics at small scales)

Team website

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Team leader

Cédric CLEVY


Micro and nano-scales are unbelievably concentrating scientific and technological challenges. There are now pressing needs to conduct ground-basis investigations especially at the level of elementary objects such as biological ones (cells, natural fibers, DNA…) and artificial ones (nanowires, integrated optics components, nanocrystals, nano-antenna, metamaterials and nanolamellas).

In this scope, we are investigating a robotic approach that is disruptive at these scales, consisting in the characterization, manipulation and assembly of single components. This approach enables to combine high flexibility, dexterity and accuracy together, opening to new ways to understand phenomena at the micro and nano-scales. It also aims at establishing the proof-of-concept for “smarter, cleaner and intelligent” technologies able to manufacture the next generation of high added value micro and nanodevices.

Goals and Research Areas

- modelling and design of micro-nanorobotic and micromechatronic systems based on smart materials, soft or polyarticulated robot architectures

- control of robot based on sensor feedback or calibration approaches

- development of measurement techniques (force, vision, 3D reconstruction, ….)


Works conducted within the nanorobotics team aim at successfully achieving highly accurate, high speed and complex robotized tasks such as manipulation, assembly and characterization in air or in vacuum environments. We are notably investigating:

-  the design of innovative robot architectures and functionalities merging smart materials and integrated mechatronic approaches

- the development of high performances sensors adapted to micro and nano-scales either in a scope of high integration level or for metrology purposes

- the control of micro and nanorobots to propose original manipulation strategies, to study robot-environment interactions and to achieve tasks with high performances

Implementing our work

- fabrication of complex structures and systems in clean-room or in-situ SEM supported by the PIA-Equipex-Robotex through the Microrobotex platform

- development of experimental set-up and procedures for the validation of physical-based models and qualification of robot performances