FEMTO-ST-Franche Comté Electronique Mécanique Thermique et Optique - Sciences et Technologies
Bent phononic waveguide
The scientific aims of the MINANO research axis are to create nano objects by structuration or auto assembly, to probe them locally, to explore their phononic and physical properties. The research axis is composed of three focused groups:
The research axis is coordinated by Vincent Laude. Access the MINANO pages.

Micro-needles for in-vivo electroporation
The sientific aim is to ally various skills in physics and engineering science to construct full-featured microsystems, for instance in view of designing full-featured MEMS/MOEMS combining optics, electronics, acoustics, fluidics, thermal sciences, and biochemistry.
The research axis is coordinated by Christophe Gorecki. Access the Multiphysics Microsystems pages.

GLancing Angle Deposition (GLAD) of thin layers
The scientific aims of the MINAMAS research axis are to study and deposit nano structured thin films for MEMS/NEMS, and to study the surface properties of materials: micro nano tribology, adhesion and surface forces.
The research axis is coordinated by Nicolas Martin. Access the MINAMAS pages.