FEMTO-ST-Franche Comté Electronique Mécanique Thermique et Optique - Sciences et Technologies
Video de présentationFrom basic research to industrial partnership
Deposition of structured films by GLAD
Home > Research departments > MN2S > Research axes > MINAMAS > Deposition of structured films by GLAD
Chapters
- Modeling, designing and understanding of fabrication processes and multi-physics behaviors of functi
- Deposition of structured films by GLAD
Deposition of structured films by GLAD
As a complement to our activities in topic I, concerning GLAD (GLancing Angle Deposition) thin films growth, we have developed a Monte-Carlo code. It allows us to interpret and predict the structural and morphological characteristics of the films at the micro- and nanometric scales. Zigzag, rod-like, S-shaped, or spiral geometries can thus be simulated and their characteristic sizes studied by varying the relevant physical parameters of the code.
Significant results
- N. Martin, K. Robbie and L. Carpentier, “Architecturer des couches minces par la technique GLAD”, Chapitre de l’ouvrage collectif”, Nanomatériaux et fonctionnalisation des surfaces” par J. Takadoum, Hermès, Paris, à paraître en 2008
⇒ 
