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Micro-Instrumentation

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Micro-Instrumentation

Research themes

  • Near-field microscopies
  • Instrumentation
  • Local scale physical modeling
Main applications
  • Thermoelastic microscopy and near-field radiometry
  • Thermal imaging
  • Optical vibrometry for microsystem device characterization
  • Near-field acoustic microscopy
  • Dynamic electric force microscope
Know-how
  • Characterizations of surface, interface and material properties
  • Modélisations locales des phénomènes thermiques, thermoélastiques et mécaniques
  • Développement d'instruments de métrologie à petite échelle

The group is lead by Pascal Vairac.

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