several AFM, STL, SNOM,...
Scanning Electron Microscope Stereoscan 440 Leica
Fogale Nanotech optical surface profiler
Tencor Alpha-Step IQ surface profiler
Interferometric microscope
Tridimensionnal roughness meter
Spectroscopic ellipsometer
Nanoindenteur
XPS analysis system (Thermo VG)
Probe station (BF HF)