Research departments

Nanotechnologies


Nanotechnologies



MIMENTO Centre owns two machines enabling the fabrication of submicronic structures. Electron beam lithography enables to nanostructure electron beam resists whereas Focused Ion Beam (FIB) enables to perform localised etchings by means of an ion beam with a very high accuracy.

Photo_Nanotechnologie


Equipments :

FIB Helios
Litho1


Contact :

roland.salut@femto-st.fr