FEMTO-ST-Franche Comté Electronique Mécanique Thermique et Optique - Sciences et Technologies

Oxidation furnace: TEMPRESS OMEGA junior

Oxidation furnace: TEMPRESS OMEGA junior

Characteristics:

the oxidation is performed by an oxidazing gas reaction on a silicon surface at high temperature (800 – 1150°C); wet oxidation: Si 2H2O(gaz) -> SiO2 2H2; maximum temperature: 1300°C; gas: O2 (sparging)

Top of page

Heading's pages...

• Heading home
• Oxidation furnace: TEMPRESS OMEGA junior
• Rapid thermal annealing furnace: JIPELEC
• Tubular furnaces
• Vacuum thermal processing furnace (VAS)

• Directory
• Events
• Popularization
• Links

News of FEMTO-ST

• Two ERC Grants for FEMTO-ST Institute in 2011
• Summer school in Microrobotics and Self-assembly for hybrid MEMS
• 4M conference 2010