Research departments

Main technological resources


Main technological resources


From a technical point of view, all the facilities are divided into different technological resources in the clean-room. To manufacture a component, several technological steps can be linked up :

Lithography (reproduction of a design by using photosensitive or electron polymer)

Deposition (of materials with differents properties)

Etching (dry or wet etching)

Characterization (validation of the devices all along the different steps of fabrication)

Bonding-Packaging (packaging of the final component)

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