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Environnemental Scanning Electron Microscope FEI / EDS


Environnemental SEM FEI Quanta 450W
and EDS EDAX APEX 2i
Photo_MEB_FEI


Contact :

Roland SALUT
TEMIS Sciences Building, Office N2-28
03 63 08 21 07 (Office)
03 63 08 23 10 (SEM Area)
roland.salut@femto-st.fr


Location :

TEMIS cleanroom
SEM Area


Principle :


The interaction between the electron beam and the sample produces different types of emission. The microscope Quanta 450W is equipped with various detectors in order to define images through the secondary and backscattered electrons and to analyze the emitted X-ray (EDS).

Fonctionnement_MEB FEI



Technical characteristic :

- Filament : W
- Voltage : 200 V to 30 kV
- Current < 2µA
- Pseudo-eucentric stage: 5 axes 100 mm x 100 mm (tilt until 70°)
- High vacuum (10-4 Pa), low vacuum (<130 Pa) and ESEM (<2600 Pa) modes
- IR Camera / NavCam
- Everhart-Thornley SE detector (res. 5 nm @ 30 kV & 10 nm @ 3 kV)
- vCD semi-conductor BSE detector (res. 5 nm @ 30 kV)
- Gaseous SE detector for environnemental mode
- Resolution max 3584 x 3094 pixels (16 bits)
- EDS SDD 10 mm² (qualitative and quantitative analysis, mapping) / Element detection from Boron, resolution < 133 eV for tx > 100.000 cps



SEM images :

Observation_MEB FEI
Billes Au_MEB FEI