Research departments

Photolithography


Photolithography


The Photolithography resource is dedicated to the coating of photoresists which can be used as etching mask or for the deposition of thin films. The design is defined by our optical mask generator.

Photo_Photolithographie


Principles / Photoresists :

- Photolithography principle

- Photoresists

- Thick photoresists

- Dry photofilms

- Amazing shots from the photolithographic zone



The photoresists used at MIMENTO are the following :

Tableau résines_Fiche ressource Lithographie



Main equipments :

Mask1

Aligneur Double Face EVG

Spray1


Contact :

laurent.robert@femto-st.fr