Quartz-Tech project consists in the creation of an industrial “pilot line” dedicated to the microfabrication of piezoelectric components as Surface Acoustic Waves devices. This fabrication will occur in the FEMTO-ST Institute's cleanroom (at “Maison des Microtechniques”, TEMIS). The originality of the project is to share this “pilot line” between research and industry. This technological platform will be unique in France and will be placed at the heart of the wordwild competition.
Main technological equipments
High Resolution Lithography Machine