FEMTO-ST-Franche Comté Electronique Mécanique Thermique et Optique - Sciences et Technologies

Category article

2017

• Microfabricated vapor cells filled with a cesium dispensing paste for miniature atomic clocks
  Applied Physics Letters (Volume 110, Issue (16), apr 2017, Pages :164103 )
  Maurice, Vincent | Rutkowski, Jaroslaw | Kroemer, Eric | Bargiel, Sylwester | Passilly, Nicolas | Boudot, Rodolphe | Gorecki, Christophe | Mauri, Luca | Moraja, Marco
  
  doi | bibtex@article{114f6a07-2e3e-4e57-9b27-eccd3851ab2e, title = {Microfabricated vapor cells filled with a cesium dispensing paste for miniature atomic clocks }, author = {Maurice, Vincent and Rutkowski, Jaroslaw and Kroemer, Eric and Bargiel, Sylwester and Passilly, Nicolas and Boudot, Rodolphe and Gorecki, Christophe and Mauri, Luca and Moraja, Marco}, year = {2017}, month = {apr}, number = {16}, pages = {164103 }, volume = {110}, doi = {10.1063/1.4981772}, journal = {Applied Physics Letters}, publisher = {American Institute of Physics (AIP)} }
• Design and fabrication of a 2-axis electrothermal MEMS micro-scanner for optical coherence tomography
  Micromachines (Volume 8, Issue (5), may 2017, Pages :146)
  Tanguy, Quentin | Bargiel, Sylwester | Xie, Huikai | Passilly, Nicolas | Barthes, Magali | Gaiffe, Olivier | Rutkowski, Jaroslaw | Lutz, Philippe | Gorecki, Christophe
  
  doi | bibtex@article{6138c6cb-f29f-4a07-ab15-0b2bf28399ac, title = {Design and fabrication of a 2-axis electrothermal MEMS micro-scanner for optical coherence tomography}, author = {Tanguy, Quentin and Bargiel, Sylwester and Xie, Huikai and Passilly, Nicolas and Barthes, Magali and Gaiffe, Olivier and Rutkowski, Jaroslaw and Lutz, Philippe and Gorecki, Christophe}, year = {2017}, month = {may}, number = {5}, pages = {146}, volume = {8}, doi = {10.3390/mi8050146}, journal = {Micromachines}, publisher = {MDPI} }
• Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography
  Micromachines (Volume 8, Issue (5), may 2017, Pages :146)
  Tanguy, Quentin | Bargiel, Sylwester | Xie, Huikai | Passilly, Nicolas | Barthes, Magali | Gaiffe, Olivier | Rutkowski, Jaroslaw | Lutz, Philippe | Gorecki, Christophe
  
  doi | bibtex@article{76a3d06e-6792-43d0-b1be-9584d4d64807, title = {Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography}, author = {Tanguy, Quentin and Bargiel, Sylwester and Xie, Huikai and Passilly, Nicolas and Barthes, Magali and Gaiffe, Olivier and Rutkowski, Jaroslaw and Lutz, Philippe and Gorecki, Christophe}, year = {2017}, month = {may}, number = {5}, pages = {146}, volume = {8}, doi = {doi:10.3390/mi8050146}, journal = {Micromachines}, publisher = {MDPI} }

2016

• Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances
  Optics Letters (Volume 41, Issue (1), jan 2016, Pages :96-99)
  Albero Silvestre, Jorge | Perrin, Stéphane | Passilly, Nicolas | Krauter, Johann | Gauthier-Manuel, Ludovic | Froehly, Luc | Lullin, Justine | Bargiel, Sylwester | Osten, Wolfgang | Gorecki, Christophe
  
  doi | bibtex@article{2e38157c-ae71-48b5-b023-f14e72aa62a7, title = {Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances}, author = {Albero Silvestre, Jorge and Perrin, St\'{e}phane and Passilly, Nicolas and Krauter, Johann and Gauthier-Manuel, Ludovic and Froehly, Luc and Lullin, Justine and Bargiel, Sylwester and Osten, Wolfgang and Gorecki, Christophe}, year = {2016}, month = {jan}, number = {1}, pages = {96-99}, volume = {41}, doi = {10.1364/OL.41.000096}, journal = {Optics Letters} }
• Miniature Schwarzschild objective as a micro-optical component free of main aberrations: Concept, design and first realization with silicon-glass micro-machining
  Applied Optics (Volume 55, Issue (10), mar 2016, Pages :2771 - 2779)
  Baranski, Maciej | Passilly, Nicolas | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe
  
  doi | bibtex@article{20b27360-6926-4fde-959f-24dd8be9e89c, title = {Miniature Schwarzschild objective as a micro-optical component free of main aberrations: Concept, design and first realization with silicon-glass micro-machining}, author = {Baranski, Maciej and Passilly, Nicolas and Bargiel, Sylwester and Froehly, Luc and Gorecki, Christophe}, year = {2016}, month = {mar}, number = {10}, pages = {2771 - 2779}, volume = {55}, doi = {10.1364/AO.55.002771}, journal = {Applied Optics} }

2015

• Dense arrays of millimeter-sized glass lenses fabricated at wafer-level
  Optics Express (Volume 23, Issue (9), may 2015, Pages :11702 - 11712)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gauthier-Manuel, Ludovic | Bernard, Florent | Froehly, Luc | Krauter, Johann | Osten, Wolfgang | Gorecki, Christophe
  
  pdf | doi | bibtex@article{1c33597e-4bb3-4c3d-a0d2-f5d6ee96e8c4, title = {Dense arrays of millimeter-sized glass lenses fabricated at wafer-level}, author = {Albero Silvestre, Jorge and Perrin, St\'{e}phane and Bargiel, Sylwester and Passilly, Nicolas and Baranski, Maciej and Gauthier-Manuel, Ludovic and Bernard, Florent and Froehly, Luc and Krauter, Johann and Osten, Wolfgang and Gorecki, Christophe}, year = {2015}, month = {may}, number = {9}, pages = {11702 - 11712}, url = {https://publiweb.femto-st.fr/tntnet/entries/11267/documents/author/data}, volume = {23}, doi = {10.1364/OE.23.011702}, journal = {Optics Express}, publisher = {Osa Publishing} }
• Impact of mirror spider legs on imaging quality in Mirau micro-interferometry
  Optics Letters (Volume 40, Issue (10), may 2015, Pages :2209 - 2212)
  Lullin, Justine | Perrin, Stéphane | Baranski, Maciej | Bargiel, Sylwester | Froehly, Luc | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  doi | bibtex@article{a363cf6d-d9cf-4160-b897-cdb32045cbce, title = {Impact of mirror spider legs on imaging quality in Mirau micro-interferometry}, author = {LULLIN, Justine and PERRIN, St\'{e}phane and Baranski, Maciej and Bargiel, Sylwester and Froehly, Luc and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2015}, month = {may}, number = {10}, pages = {2209 - 2212}, volume = {40}, doi = {dx.doi.org/10.1364/OL.40.002209}, journal = {Optics Letters}, publisher = {Osa Publishing} }
• An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
  Journal of Micromechanics and Microengineering (Volume 25, Issue (11), oct 2015, Pages :115013)
  Lullin, Justine | Bargiel, Sylwester | Le Moal, Patrice | Perrin, Stéphane | Albero Silvestre, Jorge | Passilly, Nicolas | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
  
  pdf | doi | bibtex@article{3885bb0e-eb13-4425-aef7-0b244a1e7c47, title = {An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry }, author = {Lullin, Justine and Bargiel, Sylwester and Le Moal, Patrice and Perrin, St\'{e}phane and Albero Silvestre, Jorge and Passilly, Nicolas and Froehly, Luc and Lardet-Vieudrin, Franck and Gorecki, Christophe}, year = {2015}, month = {oct}, number = {11}, pages = {115013}, url = {https://publiweb.femto-st.fr/tntnet/entries/12077/documents/author/data}, volume = {25}, doi = {10.1088/0960-1317/25/11/115013}, journal = {Journal of Micromechanics and Microengineering} }
• Swept source optical coherence tomography endomicroscope based on vertically integrated Mirau micro interferometer: concept and technology
  IEEE Sensors Journal (Volume 15, Issue (12), dec 2015, Pages :7061 - 7070 )
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Froehly, Luc | Baranski, Maciej | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  pdf | doi | bibtex@article{7abf8d7f-254b-49a8-8b87-f0d00d60caa7, title = {Swept source optical coherence tomography endomicroscope based on vertically integrated Mirau micro interferometer: concept and technology }, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Froehly, Luc and Baranski, Maciej and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2015}, month = {dec}, number = {12}, pages = {7061 - 7070 }, url = {https://publiweb.femto-st.fr/tntnet/entries/12080/documents/author/data}, volume = {15}, doi = {10.1109/JSEN.2015.2469547}, journal = {IEEE Sensors Journal} }
• Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems
  Applied Optics (Volume 54, Issue (22), aug 2015, Pages :6924 - 6934)
  Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe | Chenping, Jia | Fromel, J. | Wiemer, Maik
  
  pdf | doi | bibtex@article{7be7e92a-b142-470c-9616-03c59d371043, title = {Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems}, author = {Baranski, Maciej and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe and Chenping, Jia and Fromel, J. and Wiemer, Maik }, year = {2015}, month = {aug}, number = {22}, pages = {6924 - 6934}, url = {https://publiweb.femto-st.fr/tntnet/entries/12158/documents/author/data}, volume = {54}, doi = {10.1364/AO.54.006924}, journal = {Applied Optics} }

2014

• Wafer-level fabrication of micro Cube-typed beam-splitters by saw-dicing of glass substrates
  IEEE Photonics Technology Letters (Volume 26, Issue (1), jan 2014, Pages :100 - 103)
  Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Chenping, Jia | Frömel, Jörg | Wiemer, Maik
  
  doi | bibtex@article{5fcbda12-505e-4ea6-9f19-6550dacfe264, title = {Wafer-level fabrication of micro Cube-typed beam-splitters by saw-dicing of glass substrates}, author = {Baranski, Maciej and Bargiel, Sylwester and Passilly, Nicolas and Guichardaz, Blandine and Herth, Etienne and Gorecki, Christophe and Chenping, Jia and Fr\"{o}mel, J\"{o}rg and Wiemer, Maik }, year = {2014}, month = {jan}, number = {1}, pages = {100 - 103}, volume = {26}, doi = {10.1109/LPT.2013.2289981}, journal = {IEEE Photonics Technology Letters} }
• A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement
  Optics Express (Volume 22, Issue (11), may 2014, Pages :13202 - 132012)
  Baranski, Maciej | Perrin, Stéphane | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@article{097bc229-8383-4182-a27e-a5994cb567f8, title = {A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement}, author = {Baranski, Maciej and PERRIN, St\'{e}phane and Passilly, Nicolas and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, month = {may}, number = {11}, pages = {13202 - 132012}, volume = {22}, doi = {10.1364/OE.22.013202}, journal = {Optics Express}, publisher = {Osa Publishing} }

2012

• Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses
  Procedia Engineering (Volume 47, sep 2012, Pages :1133 – 1136)
  Bargiel, Sylwester | Jia, Minping | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  doi | bibtex@article{986017f9-6f54-4588-939a-b07301831358, title = {Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses}, author = {Bargiel, Sylwester and Jia, Minping and Baranski, Maciej and Fr\"{o}mel, J\"{o}rg and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, month = {sep}, pages = {1133 – 1136}, volume = {47}, doi = {http://dx.doi.org/10.1016/j.proeng.2012.09.351}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• Microsystèmes et microcomposants pour l’instrumentation optique sur puce
  Photoniques (Volume 60, aug 2012, Pages :33 - 37)
  Passilly, Nicolas | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@article{027a8c20-3ec5-4755-80a7-cf86f7932749, title = {Microsyst\`{e}mes et microcomposants pour l’instrumentation optique sur puce }, author = {Passilly, Nicolas and Bargiel, Sylwester and Gorecki, Christophe}, year = {2012}, month = {aug}, pages = {33 - 37}, volume = {60}, doi = {10.1051/photon/20126033}, journal = {Photoniques}, publisher = {EDP Sciences} }

2011

• Micromachined array-type Mirau interferometer for parallel inspection of MEMS
  Journal of Micromechanics and Microengineering (Volume 21, Issue (6), jun 2011, Pages :065005 (10 pages))
  Albero Silvestre, Jorge | Bargiel, Sylwester | Passilly, Nicolas | Dannberg, P. | Stumpf, M. | Zeitner, U.D. | Rousselot, Christophe | Gastinger, Kay | Gorecki, Christophe
  
  doi | bibtex@article{albero:hal-00655057, title = {Micromachined array-type Mirau interferometer for parallel inspection of MEMS}, author = {Albero Silvestre, Jorge and Bargiel, Sylwester and Passilly, Nicolas and Dannberg, P. and Stumpf, M. and Zeitner, U.D. and Rousselot, Christophe and Gastinger, Kay and Gorecki, Christophe}, year = {2011}, month = {jun}, number = {6}, pages = {065005 (10 pages)}, volume = {21}, doi = {10.1088/0960-1317/21/6/065005}, journal = {Journal of Micromechanics and Microengineering}, publisher = {IOP Publishing LTD} }

2010

• Towards micro-assembly of hybrid MOEMS components on reconfigurable silicon free-space micro-optical bench
  Journal of Micromechanics and Microengineering (Volume 20, Issue (4), apr 2010, Pages :045012 (12pages))
  Bargiel, Sylwester | Rabenorosoa, Kanty | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe
  
  pdf | doi | bibtex@article{bargiel:hal-00525274, title = {Towards micro-assembly of hybrid MOEMS components on reconfigurable silicon free-space micro-optical bench}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Clevy, C\'{e}dric and Gorecki, Christophe and Lutz, Philippe}, year = {2010}, month = {apr}, number = {4}, pages = {045012 (12pages)}, url = {https://publiweb.femto-st.fr/tntnet/entries/1316/documents/author/data}, volume = {20}, doi = {10.1088/0960-1317/20/4/045012}, journal = {Journal of Micromechanics and Microengineering}, publisher = {IOP Publishing LTD} }
• A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications
  Sensors and Actuators A: Physical (Volume 163, Issue (1), sep 2010, Pages :255 - 265)
  Laszczyk, Karolina Urszula | Bargiel, Sylwester | Gorecki, Christophe | Krezel, Jerzy | Dziuban, Piotr | Kujawińska, Malgorzata | Callet, Damien | Frank, Sven
  
  doi | bibtex@article{35113c46-a9ae-4131-9632-c1277675dd48, title = {A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications}, author = {Laszczyk, Karolina Urszula and Bargiel, Sylwester and Gorecki, Christophe and Krężel, Jerzy and Dziuban, Piotr and Kujawińska, Malgorzata and Callet, Damien and Frank, Sven}, year = {2010}, month = {sep}, number = {1}, pages = {255 - 265}, volume = {163}, doi = {http://dx.doi.org/10.1016/j.sna.2010.06.020}, journal = {Sensors and Actuators A: Physical}, publisher = {Elsevier} }

Category inproceedings

2017

• Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispenser
  European Frequency and Time Forum joint with International Frequency Control Symposium (EFTF-IFCS 2017) / Besançon, France (2017, Pages pages 636 - 637)
  Maurice, Vincent | Rutkowski, Jaroslaw | Kroemer, Eric | Bargiel, Sylwester | Passilly, Nicolas | Boudot, Rodolphe | Chutani, Ravinder Kumar | Galliou, Serge | Gorecki, Christophe | Mauri, Luca | Moraja, Marco
  
  doi | bibtex@inproceedings{527c1b70-fb4b-4903-9f7f-eb4f5a6be5c6, title = {Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispenser}, author = {Maurice, Vincent and Rutkowski, Jaroslaw and Kroemer, Eric and Bargiel, Sylwester and Passilly, Nicolas and Boudot, Rodolphe and Chutani, Ravinder Kumar and Galliou, Serge and Gorecki, Christophe and Mauri, Luca and Moraja, Marco}, year = {2017}, address = {Besan\c{c}on, France}, booktitle = {European Frequency and Time Forum joint with International Frequency Control Symposium (EFTF-IFCS 2017)}, month = {oct}, pages = {636 - 637}, doi = {10.1109/FCS.2017.8088984}, organization = {IEEE International Ultrasonics Symposium (IUS)} }
• Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispensers
  European Frequency and Time Forum joint with International Frequency Control Symposium (EFTF-IFCS 2017) (2017)
  Maurice, Vincent | Rutkowski, Jaroslaw | Kroemer, Eric | Bargiel, Sylwester | Passilly, Nicolas | Boudot, Rodolphe | Chutani, Ravinder Kumar | Galliou, Serge | Gorecki, Christophe | Mauri, Luca | Moraja, Marco
  
  doi | bibtex@inproceedings{2dcb229b-2da0-4bac-bbcd-162d7c84fb1a, title = {Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispensers}, author = {Maurice, Vincent and Rutkowski, Jaroslaw and Kroemer, Eric and Bargiel, Sylwester and Passilly, Nicolas and Boudot, Rodolphe and Chutani, Ravinder Kumar and Galliou, Serge and Gorecki, Christophe and Mauri, Luca and Moraja, Marco}, year = {2017}, booktitle = {European Frequency and Time Forum joint with International Frequency Control Symposium (EFTF-IFCS 2017)}, month = {oct}, doi = {10.1109/FCS.2017.8088984} }
• Ramsey-CPT spectroscopy in buffer-gas filled Cs vapor micro-fabricated cells
  European Frequency and Time Forum joint with International Frequency Control Symposium (EFTF-IFCS 2017) / Besançon, France (2017)
  Boudot, Rodolphe | Maurice, Vincent | Kroemer, Eric | Rutkowski, Jaroslaw | Abdel Hafiz, Moustafa | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{78f3322a-0784-4739-a58e-b1e92f9503b5, title = {Ramsey-CPT spectroscopy in buffer-gas filled Cs vapor micro-fabricated cells}, author = {Boudot, Rodolphe and Maurice, Vincent and Kroemer, Eric and Rutkowski, Jaroslaw and Abdel hafiz, Moustafa and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe}, year = {2017}, address = {Besan\c{c}on, France}, booktitle = {European Frequency and Time Forum joint with International Frequency Control Symposium (EFTF-IFCS 2017)}, month = {oct} }
• Miniature Cs vapor cells and atomic clocks in FEMTO-ST
  (2017)
  Boudot, Rodolphe | Passilly, Nicolas | Maurice, Vincent | Vicarini, Rémy | Rutkowski, Jaroslaw | Abdel Hafiz, Moustafa | Bargiel, Sylwester | Galliou, Serge | Gorecki, Christophe
  
  bibtex@inproceedings{7b2aa586-04b9-4636-9bda-83cb859d63d8, title = {Miniature Cs vapor cells and atomic clocks in FEMTO-ST}, author = {Boudot, Rodolphe and Passilly, Nicolas and Maurice, Vincent and Vicarini, R\'{e}my and Rutkowski, Jaroslaw and Abdel hafiz, Moustafa and Bargiel, Sylwester and Galliou, Serge and Gorecki, Christophe}, year = {2017}, month = {nov} }
• Endomicroscope for Gastrointestinal Cancer Detection: Concept and Preliminary Results
  / Strasbourg - France (2017, Pages pages 1 - 3)
  Chikhaoui, Mohamed Taha | Ourak, Mouloud | Tanguy, Quentin | Struk, Przemyslaw Piotr | Rabenorosoa, Kanty | Bargiel, Sylwester | Tamadazte, Brahim | Passilly, Nicolas | Gaiffe, Olivier | Froehly, Luc | Gorecki, Christophe | Lutz, Philippe | Andreff, Nicolas
  
  bibtex@inproceedings{e24dda5f-4f27-4b2b-adbd-493486093a7f, title = {Endomicroscope for Gastrointestinal Cancer Detection: Concept and Preliminary Results}, author = {Chikhaoui, Mohamed Taha and Ourak, Mouloud and Tanguy, Quentin and STRUK, Przemyslaw Piotr and Rabenorosoa, Kanty and Bargiel, Sylwester and Tamadazte, Brahim and Passilly, Nicolas and Gaiffe, Olivier and Froehly, Luc and Gorecki, Christophe and Lutz, Philippe and Andreff, Nicolas}, year = {2017}, address = {Strasbourg - France}, month = {nov}, pages = {1 - 3}, organization = {Surgetica 2017} }

2016

• Wafer-level fabrication of arrays of glass lens doublets
  SPIE Micro-Optics 2016 (Volume 9888, 2016, Pages pages 98880T (8 pages))
  Passilly, Nicolas | Perrin, Stéphane | Albero Silvestre, Jorge | Krauter, Johann | Gaiffe, Olivier | Gauthier-Manuel, Ludovic | Froehly, Luc | Lullin, Justine | Bargiel, Sylwester | Osten, Wolfgang | Gorecki, Christophe
  
  doi | bibtex@inproceedings{01667c72-9e2b-4bf1-a8d2-232f70a9b532, title = {Wafer-level fabrication of arrays of glass lens doublets}, author = {Passilly, Nicolas and Perrin, St\'{e}phane and Albero Silvestre, Jorge and Krauter, Johann and Gaiffe, Olivier and Gauthier-Manuel, Ludovic and Froehly, Luc and Lullin, Justine and Bargiel, Sylwester and Osten, Wolfgang and Gorecki, Christophe}, year = {2016}, booktitle = {SPIE Micro-Optics 2016}, month = {apr}, pages = {98880T (8 pages)}, volume = {9888}, doi = {10.1117/12.2228833}, organization = {SPIE Photonics Europe Conference} }
• Vertical integration of array-type miniature interferometers at wafer level by using multi-stack anodic bonding
  Proc. SPIE. 9890, Optical Micro- and Nanometrology VI, 989011 (2016)
  Wang, Wei - Shan | Wiemer, Maik | Froemel, Joerg | Enderlein,Tom | Gessner, Thomas | Lullin, Justine | Bargiel, Sylwester | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  doi | bibtex@inproceedings{e49c1ddc-692a-4cb1-9b94-b62b1c177b29, title = {Vertical integration of array-type miniature interferometers at wafer level by using multi-stack anodic bonding}, author = {Wang, Wei - Shan and Wiemer, Maik and Froemel, Joerg and Enderlein,Tom and Gessner, Thomas and Lullin, Justine and Bargiel, Sylwester and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2016}, booktitle = {Proc. SPIE. 9890, Optical Micro- and Nanometrology VI, 989011}, month = {apr}, doi = {10.1117/12.2229884}, organization = {SPIE Photonics Europe Conference} }
• Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry
  Proc. SPIE. 9890, Optical Micro- and Nanometrology VI, 98900D (2016) (2016)
  Bargiel, Sylwester | Lullin, Justine | Le Moal, Patrice | Perrin, Stéphane | Passilly, Nicolas | Albero Silvestre, Jorge | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
  
  doi | bibtex@inproceedings{759e01ed-b084-49d5-beff-df30133e9eb2, title = {Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry}, author = {Bargiel, Sylwester and Lullin, Justine and Le Moal, Patrice and Perrin, St\'{e}phane and Passilly, Nicolas and Albero Silvestre, Jorge and Froehly, Luc and Lardet-Vieudrin, Franck and Gorecki, Christophe}, year = {2016}, booktitle = {Proc. SPIE. 9890, Optical Micro- and Nanometrology VI, 98900D (2016)}, month = {apr}, doi = {10.1117/12.2230487}, organization = {SPIE Photonics Europe Conference} }
• Array-type miniature interferometer as the core optical microsystem of an Optical Coherence Tomography device for tissue inspection
  Proc. SPIE. Optical Micro- and Nanometrology VI (Volume 9890, 2016, Pages pages 98900C-6)
  Passilly, Nicolas | Perrin, Stéphane | Lullin, Justine | Albero Silvestre, Jorge | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe | Krauter, Johann | Osten, Wolfgang | Wang, Wei - Shan | Wiemer, Maik
  
  doi | bibtex@inproceedings{d5e1daaa-7f2c-422c-88fa-c336f81cd909, title = {Array-type miniature interferometer as the core optical microsystem of an Optical Coherence Tomography device for tissue inspection}, author = {Passilly, Nicolas and Perrin, St\'{e}phane and Lullin, Justine and Albero Silvestre, Jorge and Bargiel, Sylwester and Froehly, Luc and Gorecki, Christophe and Krauter, Johann and Osten, Wolfgang and Wang, Wei - Shan and Wiemer, Maik }, year = {2016}, booktitle = {Proc. SPIE. Optical Micro- and Nanometrology VI}, month = {apr}, pages = {98900C-6}, volume = {9890}, doi = {10.1117/12.2229477}, organization = {SPIE Photonics Europe Conference} }
• Matrice d'interféromètres de Mirau micro-fabriqués comme composant d'un dispositif OCT plein-champ multicanaux
  Journées de l'Optique 2016 - JNOG - Club Horizons de l'optique / Bordeaux, France (Volume P165, 2016, Pages pages 405-406)
  Passilly, Nicolas | Perrin, Stéphane | Froehly, Luc | Bargiel, Sylwester | Gaiffe, Olivier | Lullin, Justine | Albero Silvestre, Jorge | Gorecki, Christophe
  
  bibtex@inproceedings{0058a09c-ce45-4e33-a7a7-1cc575b98968, title = {Matrice d'interf\'{e}rom\`{e}tres de Mirau micro-fabriqu\'{e}s comme composant d'un dispositif OCT plein-champ multicanaux}, author = {Passilly, Nicolas and Perrin, St\'{e}phane and Froehly, Luc and Bargiel, Sylwester and Gaiffe, Olivier and Lullin, Justine and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2016}, address = {Bordeaux, France}, booktitle = {Journ\'{e}es de l'Optique 2016 - JNOG - Club Horizons de l'optique}, month = {jul}, pages = {405-406}, volume = {P165} }

2015

• Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer
  MOEMS and Miniaturized Systems XIV (Volume 9375, 2015, Pages pages 93750P (7 pages))
  Wang, Wei - Shan | Lullin, Justine | Wiemer, Maik | Fromel, J. | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe | Gessner, Thomas
  
  doi | bibtex@inproceedings{d3ccd283-a217-4d63-b5c9-a1c25af4e528, title = {Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer}, author = {Wang, Wei - Shan and LULLIN, Justine and Wiemer, Maik and Fromel, J. and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe and Gessner, T. }, year = {2015}, booktitle = {MOEMS and Miniaturized Systems XIV}, month = {feb}, pages = {93750P (7 pages)}, volume = {9375}, doi = {10.1117/12.2077641}, organization = {SPIE}, publisher = {SPIE} }
• Technological platform for vertical multi-wafer integration of miniature imaging instruments
  MOEMS and Miniaturized Systems XIV (Volume 9375, 2015, Pages pages 93750L (8 pages))
  Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik | Fromel, J. | Wuensh, D. | Wang, Wei - Shan
  
  doi | bibtex@inproceedings{747812a1-b9a7-4525-81f9-04759782c318, title = {Technological platform for vertical multi-wafer integration of miniature imaging instruments}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik and Fromel, J. and Wuensh, D. and Wang, Wei - Shan}, year = {2015}, booktitle = {MOEMS and Miniaturized Systems XIV}, month = {feb}, pages = {93750L (8 pages)}, volume = {9375}, doi = {10.1117/12.2078007}, organization = {SPIE}, publisher = {SPIE} }
• Microsystème OCT plein-champ multi-canaux à base de composants MOEMS intégrés verticalement
  Optique Bretagne 2015. Horizons de l’Optique / Rennes, France (2015, Pages pages 128-129)
  Passilly, Nicolas | Lullin, Justine | Perrin, Stéphane | Albero Silvestre, Jorge | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{94aefeab-55f7-47ce-9d4b-00a8f853bb79, title = {Microsyst\`{e}me OCT plein-champ multi-canaux \`{a} base de composants MOEMS int\'{e}gr\'{e}s verticalement}, author = {Passilly, Nicolas and Lullin, Justine and Perrin, St\'{e}phane and Albero Silvestre, Jorge and Bargiel, Sylwester and Froehly, Luc and Gorecki, Christophe}, year = {2015}, address = {Rennes, France}, booktitle = {Optique Bretagne 2015. Horizons de l’Optique}, month = {jul}, pages = {128-129}, url = {https://publiweb.femto-st.fr/tntnet/entries/11884/documents/author/data} }
• Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy
  (2015)
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{2bc56dd6-0d3e-4d59-b6dd-12b2efd13b05, title = {Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy}, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe}, year = {2015}, editor = {2015 European Union}, month = {aug}, url = {https://publiweb.femto-st.fr/tntnet/entries/12160/documents/author/data}, organization = {International Conference on Optical MEMS and Nanophotonics (OMN 2015)} }
• Glass on MEMS – hybrid and monolithic integration technologies for miniature optical instruments
  16th EPFL CMi Annual Meeting / Lausanne, Switzerland (2015)
  Bargiel, Sylwester | Lullin, Justine | Struk, Przemyslaw Piotr | Baranski, Maciej | Albero Silvestre, Jorge | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{22668d82-74d8-45ad-9e41-8a4819884cd8, title = {Glass on MEMS – hybrid and monolithic integration technologies for miniature optical instruments}, author = {Bargiel, Sylwester and Lullin, Justine and Struk, Przemyslaw Piotr and Baranski, Maciej and Albero Silvestre, Jorge and Passilly, Nicolas and Gorecki, Christophe}, year = {2015}, address = {Lausanne, Switzerland}, booktitle = {16th EPFL CMi Annual Meeting}, month = {may} }

2014

• Optical Design of a Vertically Integrated Array-type Mirau-based OCT system
  SPIE Photonics Europe 2014 / Brussels, Belgique (Volume 9132, 2014, Pages pages 91320L)
  Krauter, Johann | Boettcher, T. | Osten, Wolfgang | Lyda, W. | Passilly, Nicolas | Froehly, Luc | Bargiel, Sylwester | Albero Silvestre, Jorge | Perrin, Stéphane | Lullin, Justine | Gorecki, Christophe
  
  bibtex@inproceedings{fa70f7d1-a76b-4c25-9114-50ba45653855, title = {Optical Design of a Vertically Integrated Array-type Mirau-based OCT system}, author = {Krauter, Johann and Boettcher, T. and Osten, Wolfgang and Lyda, W. and Passilly, Nicolas and Froehly, Luc and Bargiel, Sylwester and Albero Silvestre, Jorge and Perrin, St\'{e}phane and Lullin, Justine and Gorecki, Christophe}, year = {2014}, address = {Brussels, Belgique}, booktitle = {SPIE Photonics Europe 2014}, month = {apr}, pages = {91320L}, volume = {9132} }
• Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function
  SPIE Photonics Europe 2014 / Bruxelles, Belgique (Volume 9132, 2014, Pages pages 913216 (1-8) )
  Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@inproceedings{d0f9a0d8-9d21-48aa-b266-ced52d563b76, title = {Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function }, author = {Perrin, St\'{e}phane and Baranski, Maciej and Passilly, Nicolas and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {Bruxelles, Belgique}, booktitle = {SPIE Photonics Europe 2014}, month = {apr}, pages = {913216 (1-8) }, volume = {9132}, doi = {10.1117/12.2051122} }
• Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry
  2014 International Conference on Optical MEMS and Nanophotonics (OMN2014) / Glasgow, United Kingdom (Volume , Issue 14682765 , 2014, Pages pages 87 - 88)
  Lullin, Justine | Bargiel, Sylwester | Courjon, Emilie | Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{b7f0ca52-bbea-43d8-8cd0-0a8e1fc1b98a, title = {Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry}, author = {LULLIN, Justine and Bargiel, Sylwester and Courjon, Emilie and PERRIN, St\'{e}phane and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, address = {Glasgow, United Kingdom}, booktitle = {2014 International Conference on Optical MEMS and Nanophotonics (OMN2014)}, month = {aug}, number = {14682765 }, pages = {87 - 88}, volume = { }, organization = {IEEE}, publisher = {IEEE} }
• Simple setup for optical characterization of microlenses
  Proc. SPIE, Interferometry XVII: Advanced Applications. / San Diego, California, United States. (Volume 9204, 2014, Pages pages 92040D)
  Perrin, Stéphane | Baranski, Maciej | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@inproceedings{9fd85794-795a-458d-a2e8-035b62a490f7, title = {Simple setup for optical characterization of microlenses }, author = {Perrin, St\'{e}phane and Baranski, Maciej and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {San Diego, California, United States.}, booktitle = {Proc. SPIE, Interferometry XVII: Advanced Applications.}, month = {aug}, pages = {92040D}, volume = {9204}, doi = {doi:10.1117/12.2061299} }
• Arrays of millimeter-sized glass lenses for miniature inspection system
  SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014 / Brussels, Belgium (Volume 9130, 2014, Pages pages 91300U)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
  
  doi | bibtex@inproceedings{9f5d4945-f972-40e3-bbab-1e1e96e47c41, title = {Arrays of millimeter-sized glass lenses for miniature inspection system}, author = {Albero Silvestre, Jorge and Perrin, St\'{e}phane and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gauthier-Manuel, Ludovic and Gorecki, Christophe}, year = {2014}, address = {Brussels, Belgium}, booktitle = {SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014}, month = {apr}, pages = {91300U}, volume = {9130}, doi = {10.1117/12.2051043} }
• Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners
  (Publisher : Fraunhofer, Volume 9, Issue 1, 2014, Pages pages 128 - 133)
  Wiemer, Maik | Wuensh, D. | Fromel, J. | Gessner, Thomas | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{6aff2851-b97b-4782-b529-7f1449e11526, title = {Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners}, author = {Wiemer, Maik and Wuensh, D. and Fromel, J. and Gessner, Thomas and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, month = {jan}, number = {1}, pages = {128 - 133}, volume = {9}, journal = {International Journal of Microwave and Optical Technology}, publisher = {Fraunhofer} }

2013

• 3D micro-optical lens scanner made by multi-wafer bonding technology
  / San Francisco, California, USA (Volume 8616, 2013, Pages pages 861605 (10 pages))
  Bargiel, Sylwester | Gorecki, Christophe | Baranski, Maciej | Passilly, Nicolas | Wiemer, Maik | Jia, C. | Fromel, J.
  
  doi | bibtex@inproceedings{e0353c75-a7ca-445e-bb0c-aaadca9f54d3, title = {3D micro-optical lens scanner made by multi-wafer bonding technology}, author = {Bargiel, Sylwester and Gorecki, Christophe and Baranski, Maciej and Passilly, Nicolas and Wiemer, Maik and Jia, C. and Fromel, J.}, year = {2013}, address = {San Francisco, California, USA}, month = {feb}, pages = {861605 (10 pages)}, volume = {8616}, doi = {10.1117/12.2002422}, organization = {Conference on MOEMS and Miniaturized Systems XII}, journal = {Proceedings of SPIE} }
• Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate
  17th International Conference on Solid-State Sensors, Actuators and Microsystems / Barcelone (2013, Pages pages 534 - 537)
  Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Jia, C. | Fromel, J. | Wiemer, Maik
  
  doi | bibtex@inproceedings{fbb7b968-f208-465a-b961-9429254f096f, title = {Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Guichardaz, Blandine and Herth, Etienne and Gorecki, Christophe and Jia, C. and Fromel, J. and Wiemer, Maik }, year = {2013}, address = {Barcelone}, booktitle = {17th International Conference on Solid-State Sensors, Actuators and Microsystems}, month = {jun}, pages = {534 - 537}, doi = {10.1109/Transducers.2013.6626821} }

2012

• Micromachined array-type Mirau interferometer for MEMS metrology
  SPIE 8494, Interferometry XVI: Applications / San Diego, California (Volume 8494, 2012, Pages pages 849403)
  Gorecki, Christophe | Bargiel, Sylwester | Albero Silvestre, Jorge | Passilly, Nicolas | Kujawińska, Malgorzata | Zeitner, U.D.
  
  doi | bibtex@inproceedings{9adb7594-ddb9-47ed-af1b-79d031182901, title = {Micromachined array-type Mirau interferometer for MEMS metrology}, author = {Gorecki, Christophe and Bargiel, Sylwester and Albero Silvestre, Jorge and Passilly, Nicolas and Kujawińska, Malgorzata and Zeitner, U.D.}, year = {2012}, address = {San Diego, California}, booktitle = {SPIE 8494, Interferometry XVI: Applications}, editor = {Cosme Furlong; Christophe Gorecki; Erik L. Novak}, month = {sep}, pages = {849403}, volume = {8494}, doi = {10.1117/12.932226 }, organization = {SPIE Interferometry XVI: Applications}, journal = {Proceedings of SPIE} }
• Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses
  26th European Conference on Solid-State Transducers, EUROSENSOR 2012 / Krakow, Poland (Volume 47, 2012, Pages pages 1133 - 1136)
  Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  doi | bibtex@inproceedings{fe461fd2-36d5-4ace-b54c-50812fe2907c, title = {Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses}, author = {Bargiel, Sylwester and Jia, C. and Baranski, Maciej and Fr\"{o}mel, J\"{o}rg and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, address = {Krakow, Poland}, booktitle = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, month = {nov}, pages = {1133 - 1136}, volume = {47}, doi = {10.1016/j.proeng.2012.09.351}, organization = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• Bonding and contacting of vertically integrated 3-D microscanners
  IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition / San Jose, CA (2012)
  Wiemer, Maik | Fromel, J. | Jia, C. | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{8d6980da-82ca-4b2e-9a2a-883a04c84f52, title = {Bonding and contacting of vertically integrated 3-D microscanners}, author = {Wiemer, Maik and Fromel, J. and Jia, C. and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2012}, address = {San Jose, CA}, booktitle = {IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition}, month = {may} }
• A hierarchic bonding procedure for the assembly of micro confocal microscope
  / Tokyo, Japan (2012, Pages pages 187 - 189)
  Jia, C. | Fromel, J. | Gessner, Thomas | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gorecki, Christophe
  
  doi | bibtex@inproceedings{5c047de9-6811-488a-b290-8edaa3e8b816, title = {A hierarchic bonding procedure for the assembly of micro confocal microscope}, author = {Jia, C. and Fromel, J. and Gessner, T. and Bargiel, Sylwester and Passilly, Nicolas and Baranski, Maciej and Gorecki, Christophe}, year = {2012}, address = {Tokyo, Japan}, month = {may}, pages = {187 - 189}, doi = {10.1109/LTB-3D.2012.6238087}, organization = {Low Temperature Bonding for 3D Integration (LTB-3D), 2012 - 3rd IEEE International Workshop on}, publisher = {IEEE} }

2011

• Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization
  International Manufacturing Science and Engineering Conference, MSEC'11. / Corvallis, Oregon, United States (Volume sur CD ROM, 2011, Pages pages 1-7)
  Rabenorosoa, Kanty | Clevy, Cédric | Bargiel, Sylwester | Mascaro, Jean-Philippe | Lutz, Philippe | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{rabenorosoa:hal-00612659, title = {Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization}, author = {Rabenorosoa, Kanty and Clevy, C\'{e}dric and Bargiel, Sylwester and Mascaro, Jean-Philippe and Lutz, Philippe and Gorecki, Christophe}, year = {2011}, address = {Corvallis, Oregon, United States}, booktitle = {International Manufacturing Science and Engineering Conference, MSEC'11.}, pages = {1-7}, url = {https://publiweb.femto-st.fr/tntnet/entries/1443/documents/author/data}, volume = {sur CD ROM}, organization = {American Society of Mechanical Engineers (ASME)} }
• Micromachined array-type Mirau interferometer for MEMS metrology
  / Beijing, China (2011, Pages pages 546 - 549)
  Gorecki, Christophe | Bargiel, Sylwester | Albero Silvestre, Jorge | Passilly, Nicolas | Rousselot, Christophe | Zeitner, U.D. | Gastinger, Kay
  
  doi | bibtex@inproceedings{1b88929f-8526-4792-943a-9a0339245ac0, title = {Micromachined array-type Mirau interferometer for MEMS metrology}, author = {Gorecki, Christophe and Bargiel, Sylwester and Albero Silvestre, Jorge and Passilly, Nicolas and Rousselot, Christophe and Zeitner, U.D. and Gastinger, Kay}, year = {2011}, address = {Beijing, China}, month = {jun}, pages = {546 - 549}, doi = {10.1109/TRANSDUCERS.2011.5969709}, organization = {Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International }, publisher = {IEEE} }
• Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table
  Proc. of Eurosensor XXIV Conference / Linz, Austria (Publisher : Elsevier, Volume 5, 2011, Pages pages 428 - 431)
  Bargiel, Sylwester | Rabenorosoa, Kanty | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe | Mascaro, Jean-Philippe
  
  pdf | doi | bibtex@inproceedings{78f94135-7320-430e-aea6-1bb0472e8c7c, title = {Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Cl\'{e}vy, C\'{e}dric and Gorecki, Christophe and Lutz, Philippe and Mascaro, Jean-Philippe}, year = {2011}, address = {Linz, Austria}, booktitle = {Proc. of Eurosensor XXIV Conference}, month = {jan}, pages = {428 - 431}, url = {https://publiweb.femto-st.fr/tntnet/entries/10972/documents/author/data}, volume = {5}, doi = {10.1016/j.proeng.2010.09.138}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens
  / Linz, Austria (Publisher : Elsevier, Volume 5, 2011, Pages pages 762 - 765)
  Bargiel, Sylwester | Gorecki, Christophe | Verdot, Thierry | Laszczyk, Karolina Urszula | Albero Silvestre, Jorge | El Fissi, Lamia
  
  doi | bibtex@inproceedings{dacba12a-aca2-4de7-a0c1-c88566f047d8, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens }, author = {Bargiel, Sylwester and Gorecki, Christophe and Verdot, T. and Laszczyk, Karolina Urszula and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2011}, address = {Linz, Austria}, month = {jan}, pages = {762 - 765}, volume = {5}, doi = {10.1016/j.proeng.2010.09.220}, journal = {Procedia Engineering}, publisher = {Elsevier} }

2010

• Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.
  Frontiers of Assembly and Manufacturing - Selected papers from ISAM 2009 / Seoul, Korea (Publisher : Springer, 2010, Pages pages 99 - 112)
  Rabenorosoa, Kanty | Bargiel, Sylwester | Clevy, Cédric | Lutz, Philippe | Gorecki, Christophe
  
  pdf | doi | bibtex@inproceedings{rabenorosoa:hal-00544900, title = {Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.}, author = {Rabenorosoa, Kanty and Bargiel, Sylwester and Clevy, C\'{e}dric and Lutz, Philippe and Gorecki, Christophe}, year = {2010}, address = {Seoul, Korea}, booktitle = {Frontiers of Assembly and Manufacturing - Selected papers from ISAM 2009}, edition = {1st}, editor = { Sukhan Lee, Ra\'{u}l Su\'{a}rez, Byung-Wook Choi }, month = {jan}, pages = {99 - 112}, url = {https://publiweb.femto-st.fr/tntnet/entries/1308/documents/author/data}, doi = {10.1007/978-3-642-14116-4_9}, publisher = {Springer} }
• Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table
  Eurosensor XXIV Conference / Linz, Autriche (Publisher : Elsevier, Volume 5, 2010, Pages pages 428-431)
  Bargiel, Sylwester | Rabenorosoa, Kanty | Mascaro, Jean-Philippe | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe
  
  pdf | doi | bibtex@inproceedings{bargiel:hal-00545451, title = {Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Mascaro, Jean-Philippe and Cl\'{e}vy, C\'{e}dric and Gorecki, Christophe and Lutz, Philippe}, year = {2010}, address = {Linz, Autriche}, booktitle = {Eurosensor XXIV Conference}, month = {sep}, pages = {428-431}, url = {https://publiweb.femto-st.fr/tntnet/entries/1332/documents/author/data}, volume = {5}, doi = {10.1016/proeng.2010.09.138}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens
  Eurosensor XXIV Conference / Linz, Austria (Publisher : Elsevier, Volume 5, 2010, Pages pages 762 – 765)
  Bargiel, Sylwester | Gorecki, Christophe | Verdot, Thierry | Laszczyk, Karolina Urszula | Albero Silvestre, Jorge | El Fissi, Lamia
  
  doi | bibtex@inproceedings{dcf96f2e-3efc-42b0-b325-de1414be5b2f, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens}, author = {Bargiel, Sylwester and Gorecki, Christophe and Verdot, T. and Laszczyk, Karolina Urszula and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2010}, address = {Linz, Austria}, booktitle = {Eurosensor XXIV Conference}, editor = {B. Jakoby and M.J. Vellekoop}, month = {sep}, pages = {762 – 765}, volume = {5}, doi = {http://dx.doi.org/10.1016/j.proeng.2010.09.220}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS
  Micro-Optics 2010 / Brussels, Belgium (Publisher : SPIE, Volume 7716, 2010, Pages pages 771621)
  Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe | Gastinger, Kay
  
  doi | bibtex@inproceedings{7362ad69-c528-44ee-925a-961f20cddea5, title = {Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS}, author = {Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe and Gastinger, Kay}, year = {2010}, address = {Brussels, Belgium}, booktitle = {Micro-Optics 2010}, month = {apr}, pages = {771621}, volume = {7716}, doi = {http://dx.doi.org/10.1117/12.853907}, journal = {Proceedings of SPIE}, publisher = {SPIE} }
• Simulation and in-plane movement characterization of 2D MEMS platform
  Optical Micro- and Nanometrology III / Brussels, Belgium (Publisher : SPIE, Volume 7718, 2010, Pages pages 77180H)
  Krezel, Jerzy | Laszczyk, Karolina Urszula | Bargiel, Sylwester | Gorecki, Christophe | Kujawińska, Malgorzata | Parriaux, Olivier | Tonchev, Svetlen
  
  doi | bibtex@inproceedings{e9a84487-bdc8-429e-8a18-de665dfc38f4, title = {Simulation and in-plane movement characterization of 2D MEMS platform}, author = {Krężel, Jerzy and Laszczyk, Karolina Urszula and Bargiel, Sylwester and Gorecki, Christophe and Kujawińska, Malgorzata and Parriaux, Olivier and Tonchev, Svetlen}, year = {2010}, address = {Brussels, Belgium}, booktitle = {Optical Micro- and Nanometrology III}, month = {apr}, pages = {77180H}, volume = {7718}, doi = {http://dx.doi.org/10.1117/12.855747}, journal = {Proceedings of SPIE}, publisher = {SPIE} }
• Next-generation test equipment for micro-production
  Optical Micro- and Nanometrology III (Publisher : SPIE, Volume 7718, 2010, Pages pages 77180F)
  Gastinger, Kay | Johnsen, Lars | Kujawińska, Malgorzata | Jozwik, Michal | Zeitner, U.D. | Dannberg, P. | Bargiel, Sylwester | Schaeffel, Christoph | Beer, Stephan | Moosburger, Rudolf | Lambelet, Patick
  
  doi | bibtex@inproceedings{fff37d4c-eb61-4368-9809-5e5399abd540, title = {Next-generation test equipment for micro-production}, author = {Gastinger, Kay and Johnsen, Lars and Kujawińska, Malgorzata and Jozwik, Michal and Zeitner, U.D. and Dannberg, P. and Bargiel, Sylwester and Schaeffel, Christoph and Beer, Stephan and Moosburger, Rudolf and Lambelet, Patick}, year = {2010}, booktitle = {Optical Micro- and Nanometrology III}, month = {apr}, pages = {77180F}, volume = {7718}, doi = {http://dx.doi.org/10.1117/12.855087}, journal = {Proceedings of SPIE}, publisher = {SPIE} }

Category misc

2014

• Arrays of millimeter-sized glass lenses for miniature inspection systems
  (apr 2014)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
  
  bibtex@misc{87403dab-a526-4686-952c-19f823dd2a36, title = {Arrays of millimeter-sized glass lenses for miniature inspection systems}, author = {Albero Silvestre, Jorge and Perrin, St\'{e}phane and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gauthier-Manuel, Ludovic and Gorecki, Christophe}, year = {2014}, month = {apr} }

Category proceedings

2015

• Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy
  International Conference on Optical MEMS and Nanophotonics (OMN 2015), IEEE / Jerusalem, Israel (Editor : , Volume 2015, dec 2015)
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  bibtex@proceedings{d93ce048-2a0f-4351-b685-e1927ef610e2, title = {Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy}, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2015}, address = {Jerusalem, Israel}, month = {dec}, pages = {We3.2-1 We3.2-2}, volume = {2015}, organization = {International Conference on Optical MEMS and Nanophotonics (OMN 2015)}, publisher = {IEEE} }

Category unpublished

2012

• Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses ( 2012)
  Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Fromel, J. | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  bibtex@unpublished{1450ecbd-824d-4afc-8785-788dec75538c, title = {Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses}, author = {Bargiel, Sylwester and Jia, C. and Baranski, Maciej and Fromel, J. and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, editor = {Eurosensors XXVI} }

2010

• Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens (sep 2010)
  Bargiel, Sylwester | Gorecki, Christophe | Laszczyk, Karolina Urszula | Verdot, Thierry | Albero Silvestre, Jorge | El Fissi, Lamia
  
  bibtex@unpublished{f5216dc0-48ce-4b89-974e-cd75bb284773, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens}, author = {Bargiel, Sylwester and Gorecki, Christophe and Laszczyk, Karolina Urszula and Verdot, T. and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2010}, month = {sep} }