- Micky Rakotondrabe and Philippe Lutz
Automatic Control and Micro-Mechatronic Systems (AS2M) department
FEMTO-ST Institute, UMR CNRS 6174 -UFC/ENSMM/UTBM,
24 rue Alain Savary, Besançon, F-25000
France
Contact: mrakoton 'at' femto-st 'dot' fr,
plutz 'at' femto-st 'dot' fr
Part.1 - Main aspects of the control issues in the micro/nano-world
Part.2 - From closed-loop to open-loop control of piezocantilever
In the first part, we present a summary of the main properties and difficulties when performing the characterization, the measurement, the identification and the control of systems dedicated to the micro/nano-world.
In the second part, we present the control of piezoelectric cantilevers. The characteristics of piezoelectric materials, such as hysteresis and creep nonlinearities are first presented. Then, the use of closed-loop robust control laws to ameliorate their performances is described. Finally, issue and results with open-loop control techniques end the presentation.

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