L'institut
FEMTO-ST
Département Mécanique Appliquée
Patrice Le Moal
Département Mécanique Appliquée
Équipe Micro
Équipe Micro
CNRS
- Courriel :
- patrice.lemoal [at] femto-st.fr
03.81.66.66.17
- Addresse :
-
Mécanique Appliquée (UFC)
24 rue de l'Epitaphe
25000 BESANCON
Publications de Patrice LE MOAL
2025 (3)
- article - A new criterion based on the distribution of cluster onsets for interpreting acoustic emission data signals : three case studies in structural and process monitoring
Pattern Analysis and Applications (Volume 28, Issue (), sep 2025, Pages :152 (19))
Ramasso, Emmanuel | Mbarga Nkogo, Martin | Chandarana, Neha | Bourbon, Gilles | Le Moal, Patrice | Lefebvre, Quentin | Personeni, Martial | Soutis, Constantinos | Gresil, Matthieu | Thibaud, Sébastien - inproceedings - On the use physics-informed neural networks for predicting the dynamic behavior of beam structures
XX International Symposium on Dynamic Problems of Mechanics (XX DINAME 2025) / Sao Paulo, Brazil (2025, Pages pages 7)
Teloli, Rafaël | Thiam, Mohamed | Tittarelli, Roberta | Le Moal, Patrice | Ramasso, Emmanuel | Ouisse, Morvanbibtex@inproceedings{0f62e72c-d66c-4cf5-afac-5d6a1116f07b, title = {On the use physics-informed neural networks for predicting the dynamic behavior of beam structures}, author = {Teloli, Rafa\"el and Thiam, Mohamed and Tittarelli, Roberta and Le Moal, Patrice and Ramasso, Emmanuel and Ouisse, Morvan}, year = {2025}, address = {Sao Paulo, Brazil}, booktitle = {XX International Symposium on Dynamic Problems of Mechanics (XX DINAME 2025)}, editor = {0f62e72c-d66c-4cf5-afac-5d6a1116f07b-editor.pdf}, month = {mar}, pages = {7} } - article - A physics-informed neural networks framework for model parameter identification of beam-like structures
Mechanical Systems and Signal Processing (MSSP) (Volume 224, feb 2025, Pages :112189 (17))
Teloli, Rafaël | Tittarelli, Roberta | Bigot, Maël | Coelho, Lucas | Ramasso, Emmanuel | Le Moal, Patrice | Ouisse, Morvan
2024 (3)
- article - Identification par des réseaux de neurones guidés par la physique
Techniques de l'ingénieur (Volume S7221 V1, oct 2024, Pages :23)
Tittarelli, Roberta | Le Moal, Patrice | Ouisse, Morvan | Ramasso, Emmanuel - article - Modeling and experiments on flexible side-electrodes electrostatic actuators : Influence of the contact interface on the available force
Sensors and Actuators A: Physical (Volume 373, aug 2024, Pages :115406 (14))
Le Moal, Patrice | Bourbon, Gilles - inproceedings - Physics-Informed Neural Networks for Inverse Problems in Structural Dynamics
SPIE Smart Structures + Nondestructive Evaluation 2024 (2024) / Long Beach, California, United States (Volume 12950, 2024, Pages pages 5)
Teloli, Rafaël | Bigot, Maël | Coelho, Lucas | Ramasso, Emmanuel | Tittarelli, Roberta | Le Moal, Patrice | Ouisse, Morvanressource | doi | bibtex@inproceedings{ec73fc26-fd73-4be8-af7a-1173b7415a17, title = {Physics-Informed Neural Networks for Inverse Problems in Structural Dynamics}, author = {Teloli, Rafa\"el and Bigot, Ma\"el and Coelho, Lucas and Ramasso, Emmanuel and Tittarelli, Roberta and Le Moal, Patrice and Ouisse, Morvan}, year = {2024}, address = {Long Beach, California, United States}, booktitle = {SPIE Smart Structures + Nondestructive Evaluation 2024 (2024)}, editor = {ec73fc26-fd73-4be8-af7a-1173b7415a17-editor.pdf}, month = {mar}, pages = {5}, url = {https://publiweb.femto-st.fr/tntnet/entries/20529/documents/author/data}, volume = {12950}, doi = {10.1117/12.3010918} }
2022 (4)
- inproceedings - A variational bayesian clustering approach to acoustic emission interpretation including soft labels
BELIEF 2022 (2022) / Paris, France (Volume 13506, 2022, Pages pages 23 - 32)
Mbarga Nkogo, Martin | Ramasso, Emmanuel | Le Moal, Patrice | Bourbon, Gillesressource | doi | bibtex@inproceedings{2cfaa9ee-722a-44e8-ad94-1d9753618cbc, title = {A variational bayesian clustering approach to acoustic emission interpretation including soft labels}, author = {Mbarga Nkogo, Martin and Ramasso, Emmanuel and Le Moal, Patrice and Bourbon, Gilles}, year = {2022}, address = {Paris, France}, booktitle = {BELIEF 2022 (2022)}, editor = {}, month = {oct}, pages = {23 - 32}, url = {https://publiweb.femto-st.fr/tntnet/entries/19560/documents/author/data}, volume = {13506}, doi = {10.1007/978-3-031-17801-6_3} } - inproceedings - Towards integrated health monitoring of bio-based composite structures : influence of acoustic emission sensor embedment on material integrity
20th European Conference on Composite Materials (ECCM 2022) / Lausanne, Switzerland (2022, Pages pages 9)
Seychal, Guillem | Gabrion, Xavier | Ramasso, Emmanuel | Bourbon, Gilles | Le Moal, Patrice | Placet, Vincentbibtex@inproceedings{5d51ea4a-9d1f-4c1c-937e-8d4f12682a41, title = {Towards integrated health monitoring of bio-based composite structures : influence of acoustic emission sensor embedment on material integrity}, author = {Seychal, Guillem and Gabrion, Xavier and Ramasso, Emmanuel and Bourbon, Gilles and Le Moal, Patrice and Placet, Vincent}, year = {2022}, address = {Lausanne, Switzerland}, booktitle = {20th European Conference on Composite Materials (ECCM 2022)}, editor = {5d51ea4a-9d1f-4c1c-937e-8d4f12682a41-editor.pdf}, month = {jun}, pages = {9} } - article - Towards in-situ acoustic emission-based health monitoring in bio-based composites structures: Does embedment of sensors affect the mechanical behaviour of flax/epoxy laminates ?
Composites Part B-Engineering (Volume 236, may 2022, Pages :109787 (13))
Seychal, Guillem | Ramasso, Emmanuel | Le Moal, Patrice | Bourbon, Gilles | Gabrion, Xavier | Placet, Vincent - article - Suppressing residual vibrations in comb-drive electrostatic actuators : A command shaping technique adapted to nomadic applications
Sensors and Actuators A: Physical (Volume 334, feb 2022, Pages :113366 (12))
Ameur, Haythem | Le Moal, Patrice | Bourbon, Gilles | Vuillemin, Cedric | Sworowski, Marc
2021 (5)
- article - Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation
Smart Materials and Structures (Volume 30, Issue (7), jul 2021, Pages :07LT01 (6))
Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph - inproceedings - Compact Digital Microrobot Based on Multistable Modules
2021 International Conference on Robotics and Automation (ICRA 2021) / Xi'an, China (2021, Pages pages 1 - 8)
Mohand Ousaid, Abdenbi | Bouhadda, Ismail | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philipperessource | bibtex@inproceedings{c35f3853-16d0-471c-9786-36ccdc7c51dc, title = {Compact Digital Microrobot Based on Multistable Modules}, author = {Mohand Ousaid, Abdenbi and Bouhadda, Ismail and Bourbon, Gilles and Le Moal, Patrice and Haddab, Yassine and Lutz, Philippe}, year = {2021}, address = {Xi'an, China}, booktitle = {2021 International Conference on Robotics and Automation (ICRA 2021)}, month = {may}, pages = {1 - 8}, url = {https://publiweb.femto-st.fr/tntnet/entries/18043/documents/author/data} } - article - Compact Digital Microrobot Based on Multistable Modules
IEEE Robotics and automation letters (Volume 6, Issue (2), apr 2021, Pages :1922 - 1933)
Mohand Ousaid, Abdenbi | Bouhadda, Ismail | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philippe - article - CMUT-Based Sensor for Acoustic Emission Application: Experimental and Theoretical Contributions to Sensitivity Optimization
Sensors (Volume 21, Issue (6), mar 2021, Pages :2042 (19))
Boubenia, Redha | Le Moal, Patrice | Bourbon, Gilles | Ramasso, Emmanuel | Joseph, Eric - article - Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection
Nonlinear Dynamics (Volume 103, Issue (3), feb 2021, Pages :2329 - 2343)
Jallouli, Aymen | Kacem, Najib | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
2020 (2)
- article - Towards a better understanding of the CMUTs potential for SHMapplications
Sensors and Actuators A: Physical (Volume 313, oct 2020, Pages :112212 (11))
Butaud, Pauline | Le Moal, Patrice | Bourbon, Gilles | Placet, Vincent | Ramasso, Emmanuel | Verdin, Benoît | Joseph, Eric - article - Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
Applied Physics Letters (Volume 117, Issue (3), jul 2020, Pages :033502 (6))
Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
2019 (5)
- inproceedings - Acoustic emission sensing using MEMS for structural health monitoring : demonstration of a newly designed Capacitive Micro machined Ultrasonic Transducer
12th International Workshop on Structural Health Monitoring (IWSHM 2019) / Stanford, CA, United States (2019, Pages pages 10)
Boubenia, Redha | Bourbon, Gilles | Le Moal, Patrice | Joseph, Eric | Ramasso, Emmanuel | Placet, Vincentressource | bibtex@inproceedings{2a349e98-ff8a-44fd-8861-7b11bf780fa9, title = {Acoustic emission sensing using MEMS for structural health monitoring : demonstration of a newly designed Capacitive Micro machined Ultrasonic Transducer}, author = {Boubenia, Redha and Bourbon, Gilles and Le Moal, Patrice and Joseph, Eric and Ramasso, Emmanuel and Placet, Vincent}, year = {2019}, address = {Stanford, CA, United States}, booktitle = {12th International Workshop on Structural Health Monitoring (IWSHM 2019)}, month = {sep}, pages = {10}, url = {https://publiweb.femto-st.fr/tntnet/entries/16116/documents/author/data} } - article - Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation
Sensors and Actuators A: Physical (Volume 295, aug 2019, Pages :643 - 652)
Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph - inproceedings - Mode localization in two coupled nearly identical MEMS cantilevers for mass sensing
International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE 2019) / Anaheim, United States (2019)
Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Josephbibtex@inproceedings{1c66f2d8-35cb-4a6d-b461-266b4435ea58, title = {Mode localization in two coupled nearly identical MEMS cantilevers for mass sensing}, author = {Rabenimanana, Toky Harrison and Walter, Vincent and Kacem, Najib and Le Moal, Patrice and Bourbon, Gilles and Lardies, Joseph}, year = {2019}, address = {Anaheim, United States}, booktitle = {International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE 2019)}, month = {aug} } - inproceedings - CMUT sensors based on circular membranes array for SHM applications
Smart Structures + Nondestructive Evaluation (SPIE 2019) / Denver, United States (2019, Pages pages 8)
Butaud, Pauline | Bourbon, Gilles | Le Moal, Patrice | Joseph, Eric | Verdin, Benoît | Ramasso, Emmanuel | Placet, Vincentressource | bibtex@inproceedings{0bb4e65b-169c-46f1-8524-d1a48979458d, title = {CMUT sensors based on circular membranes array for SHM applications}, author = {Butaud, Pauline and Bourbon, Gilles and Le Moal, Patrice and Joseph, Eric and Verdin, Beno\^it and Ramasso, Emmanuel and Placet, Vincent}, year = {2019}, address = {Denver, United States}, booktitle = {Smart Structures + Nondestructive Evaluation (SPIE 2019)}, month = {mar}, pages = {8}, url = {https://publiweb.femto-st.fr/tntnet/entries/16115/documents/author/data} } - article - On the design of a preshaped curved beam bistable mechanism
Mechanism and Machine Theory (Volume 131, jan 2019, Pages :204 - 217)
Hussein, Hussein | Le Moal, Patrice | Younes, Rafic | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippe
2018 (4)
- inproceedings - Repeatability and reproducibility analysis of a multistable module devoted to digital microrobotics
IEEE RSJ International Conference on Intelligent Robots and Systems (IROS 2018) / Madrid, Spain (2018, Pages pages 4889 - 4894)
Bouhadda, Ismail | Mohand Ousaid, Abdenbi | Hussein, Hussein | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philipperessource | doi | bibtex@inproceedings{c9b980a8-66a2-430b-9ecd-cdd3c839842d, title = {Repeatability and reproducibility analysis of a multistable module devoted to digital microrobotics}, author = {Bouhadda, Ismail and Mohand Ousaid, Abdenbi and Hussein, Hussein and Bourbon, Gilles and Le Moal, Patrice and Haddab, Yassine and Lutz, Philippe}, year = {2018}, address = {Madrid, Spain}, booktitle = {IEEE RSJ International Conference on Intelligent Robots and Systems (IROS 2018)}, month = {oct}, pages = {4889 - 4894}, url = {https://publiweb.femto-st.fr/tntnet/entries/14904/documents/author/data}, doi = {10.1109/IROS.2018.8594259}, organization = {IEEE/RSJ International conference on intelligent robot and systems ( IROS )} } - inproceedings - Nonlinear analytical model of two weakly coupled MEMS cantilevers for mass sensing using electrostatic actuation
32th Eurosensors Conference (2018) / Graz, Austria (2018, Pages pages 5)
Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Lardies, Josephdoi | bibtex@inproceedings{b756faa5-4859-4420-8b0d-6eaa7f1b85e8, title = {Nonlinear analytical model of two weakly coupled MEMS cantilevers for mass sensing using electrostatic actuation}, author = {Rabenimanana, Toky Harrison and Walter, Vincent and Kacem, Najib and Le Moal, Patrice and Lardies, Joseph}, year = {2018}, address = {Graz, Austria}, booktitle = {32th Eurosensors Conference (2018)}, month = {sep}, pages = {5}, doi = {10.3390/proceedings2131084} } - inproceedings - Bordering the footprint of AE sensor using a bank of sharply-defined frequency domain capacitive micromachined ultrasonic transducers
9th European Workshop on Structural Health Monitoring Series (2018) / Manchester, United Kingdom (2018, Pages pages 7)
Butaud, Pauline | Bourbon, Gilles | Le Moal, Patrice | Joseph, Eric | Verdin, Benoît | Ramasso, Emmanuel | Placet, Vincent | Boubakar, Lamine Mohamedressource | bibtex@inproceedings{5da8abad-6674-4864-b464-2590039a6dd1, title = {Bordering the footprint of AE sensor using a bank of sharply-defined frequency domain capacitive micromachined ultrasonic transducers}, author = {Butaud, Pauline and Bourbon, Gilles and Le Moal, Patrice and Joseph, Eric and Verdin, Beno\^it and Ramasso, Emmanuel and Placet, Vincent and Boubakar, Lamine Mohamed}, year = {2018}, address = {Manchester, United Kingdom}, booktitle = {9th European Workshop on Structural Health Monitoring Series (2018)}, month = {jul}, pages = {7}, url = {https://publiweb.femto-st.fr/tntnet/entries/15114/documents/author/data} } - article - Design and fabrication of novel discrete actuators for microrobotic tasks
Sensors and Actuators A: Physical (Volume 271, mar 2018, Pages :373 - 382)
Hussein, Hussein | Bouhadda, Ismail | Mohand Ousaid, Abdenbi | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philippe
2017 (4)
- article - Squeeze film damping and stiffening in circular CMUT with air-filled cavity: Influence of the lateral venting boundary conditions and the bias voltage
Sensors and Actuators A: Physical (Volume 266, oct 2017, Pages :15 - 23)
Galisultanov, Ayrat | Le Moal, Patrice | Bourbon, Gilles | Walter, Vincent - article - Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation
Procedia Engineering (Volume 168, jun 2017, Pages :924 - 928)
Kacem, Najib | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph - inproceedings - Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning
Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2017) / Bordeaux, France (2017, Pages pages 4)
Bouhadda, Ismail | Mohand Ousaid, Abdenbi | Le Moal, Patrice | Bourbon, Gilles | Lutz, Philipperessource | doi | bibtex@inproceedings{878481cf-ae92-4a45-9572-09da72dfbbab, title = {Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning}, author = {Bouhadda, Ismail and Mohand Ousaid, Abdenbi and Le Moal, Patrice and Bourbon, Gilles and Lutz, Philippe}, year = {2017}, address = {Bordeaux, France}, booktitle = {Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2017)}, month = {may}, pages = {4}, url = {https://publiweb.femto-st.fr/tntnet/entries/14826/documents/author/data}, doi = {10.1109/DTIP.2017.7984472}, organization = {Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS} } - article - Modal parameter identification of a CMUT membrane using response data only
Mechanics & Industry (Volume 18, Issue (8), mar 2017, Pages :10)
Lardies, Joseph | Bourbon, Gilles | Le Moal, Patrice | Kacem, Najib | Walter, Vincent | Le, Thien Phu
2016 (10)
- article - Pull-in instability tuning in imperfect nonlinear circular microplates under electrostatic actuation
Physics Letters A (Volume 380, Issue (46), dec 2016, Pages :3886 - 3890)
Jallouli, Aymen | Kacem, Najib | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent | Lardies, Joseph - inproceedings - Modal parameter identification of a CMUT membrane using response data only
5ème Colloque Analyse Vibratoire Expérimentale / Blois, France (2016)
Lardies, Joseph | Bourbon, Gilles | Kacem, Najib | Le Moal, Patrice | Walter, Vincent | Le, Thien Phubibtex@inproceedings{f31ad096-a37b-49d6-8f0d-75d70a3bc5a8, title = {Modal parameter identification of a CMUT membrane using response data only}, author = {Lardies, Joseph and Bourbon, Gilles and Kacem, Najib and Le Moal, Patrice and Walter, Vincent and Le, Thien Phu}, year = {2016}, address = {Blois, France}, booktitle = {5\`eme Colloque Analyse Vibratoire Exp\'erimentale}, month = {nov} } - inproceedings - Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation
30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
Kacem, Najib | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Josephbibtex@inproceedings{8f37b0e7-3a23-47d4-a3b7-0f523f55c05d, title = {Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation}, author = {Kacem, Najib and Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Lardies, Joseph}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} } - inproceedings - Electrostatic actuation to counterbalance the manufacturing defects in a MEMS mass detection sensor using mode localization
30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Kacem, Najib | Lardies, Josephbibtex@inproceedings{4d1dc079-0d82-49d7-ac36-d0b258688ccc, title = {Electrostatic actuation to counterbalance the manufacturing defects in a MEMS mass detection sensor using mode localization}, author = {Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Kacem, Najib and Lardies, Joseph}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} } - inproceedings - Electromechanical coupling between comb-drive actuators and charge pump converters
30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
Verdin, Benoît | Le Moal, Patrice | Bourbon, Gilles | Walter, Vincentbibtex@inproceedings{bf42dcfb-ab52-4480-9f3e-db665ae0e762, title = {Electromechanical coupling between comb-drive actuators and charge pump converters}, author = {Verdin, Beno\^it and Le Moal, Patrice and Bourbon, Gilles and Walter, Vincent}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} } - inproceedings - Dynamic characteristics of circular CMUTs with air-filled cavities
IEEE International Ultrasonics Symposium (IUS 2016) / Tours, France (2016, Pages pages 4 p)
Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gillesressource | bibtex@inproceedings{754c4798-8df3-486f-a523-013d91ffb3de, title = {Dynamic characteristics of circular CMUTs with air-filled cavities}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2016}, address = {Tours, France}, booktitle = {IEEE International Ultrasonics Symposium (IUS 2016)}, month = {sep}, pages = {4 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13278/documents/author/data} } - inproceedings - Squeeze film damping in CMUTs with air-filled cavities
15th International Worshop on Micromachined Ultrasonic Transducers / Rome, Italy (2016, Pages pages 2 p)
Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gillesressource | bibtex@inproceedings{348a39a3-18b9-4481-8c59-52e9293c57a1, title = {Squeeze film damping in CMUTs with air-filled cavities}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2016}, address = {Rome, Italy}, booktitle = {15th International Worshop on Micromachined Ultrasonic Transducers}, month = {jun}, pages = {2 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13273/documents/author/data} } - inproceedings - Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry
VI SPIE Optical Micro- and Nanometrology ( 2016) / Brussels, Belgium (2016)
Bargiel, Sylwester | Lullin, Justine | Le Moal, Patrice | Perrin, Stéphane | Passilly, Nicolas | Albero Silvestre, Jorge | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophedoi | bibtex@inproceedings{759e01ed-b084-49d5-beff-df30133e9eb2, title = {Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry}, author = {Bargiel, Sylwester and Lullin, Justine and Le Moal, Patrice and Perrin, St\'ephane and Passilly, Nicolas and Albero Silvestre, Jorge and Froehly, Luc and Lardet-Vieudrin, Franck and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology ( 2016)}, month = {apr}, doi = {10.1117/12.2230487}, organization = {SPIE Photonics Europe Conference} } - article - Characterization of capacitive micromachined ultrasonic transducers
Microsystem Technologies (Volume 22, Issue (3), mar 2016, Pages :593 - 601)
Bellaredj, Mohamed | Lardies, Joseph | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent | Berthillier, Marc - article - Dynamic electro-thermo-mechanical modeling of a U-shaped electrothermal actuator
Journal of Micromechanics and Microengineering (Volume 26, Issue (2), jan 2016, Pages :11 p)
Hussein, Hussein | Tahhan, Arèf | Le Moal, Patrice | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippe
2015 (6)
- inproceedings - Nonlinear dynamics of circular capacitive micromachined ultrasonic transducers
IEEE Conference on Sensors (SENSORS 2015) / Busan, Korea, Republic Of (2015, Pages pages 4)
Kacem, Najib | Jallouli, Aymen | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Josephressource | bibtex@inproceedings{4556b836-7bfb-415c-a5ef-33646eadcb71, title = {Nonlinear dynamics of circular capacitive micromachined ultrasonic transducers}, author = {Kacem, Najib and Jallouli, Aymen and Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Lardies, Joseph}, year = {2015}, address = {Busan, Korea, Republic Of}, booktitle = {IEEE Conference on Sensors (SENSORS 2015)}, month = {nov}, pages = {4}, url = {https://publiweb.femto-st.fr/tntnet/entries/12186/documents/author/data} } - article - An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
Journal of Micromechanics and Microengineering (Volume 25, Issue (11), oct 2015, Pages :115013)
Lullin, Justine | Bargiel, Sylwester | Le Moal, Patrice | Perrin, Stéphane | Albero Silvestre, Jorge | Passilly, Nicolas | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe - inproceedings - Residual stress in Silicon membranes of circular CMUT
COMSOL Conference (2015) / Grenoble, France (2015, Pages pages 13 p)
Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gillesressource | bibtex@inproceedings{f5c122a9-ea91-4fd1-b7c3-0b97ad135123, title = {Residual stress in Silicon membranes of circular CMUT}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2015}, address = {Grenoble, France}, booktitle = {COMSOL Conference (2015)}, month = {oct}, pages = {13 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13272/documents/author/data} } - article - Modeling and Stress Analysis of a Pre-Shaped Curved Beam : Influence of High Modes of Buckling
International Journal of Applied Mechanics (Volume 7, Issue (4), aug 2015, Pages :1550055 (20))
Hussein, Hussein | Le Moal, Patrice | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippe - inproceedings - Dynamique non-linéaire d’un transducteur capacitif ultrasonore micro-usiné à membrane circulaire
22ème Congrès Français de Mécanique (CFM 2015) / Lyon, France (2015, Pages pages 3 p)
Jallouli, Aymen | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Josephbibtex@inproceedings{0c19b7c3-9bd1-4ff5-bf2f-04bb459ab3f7, title = {Dynamique non-lin\'eaire d'un transducteur capacitif ultrasonore micro-usin\'e \`a membrane circulaire}, author = {Jallouli, Aymen and Kacem, Najib and Le Moal, Patrice and Bourbon, Gilles and Lardies, Joseph}, year = {2015}, address = {Lyon, France}, booktitle = {22\`eme Congr\`es Fran\c{c}ais de M\'ecanique (CFM 2015)}, editor = {0c19b7c3-9bd1-4ff5-bf2f-04bb459ab3f7-editor.pdf}, month = {aug}, pages = {3 p} } - inproceedings - A computational model for large-amplitude nonlinear vibration of circular CMUTs under primary resonance
5th ECCOMAS Thematic Conference on Computational Methods in Structural Dynamics and Earthquake Engineering (COMPDYN 2015) / Crete Island, Greece (2015, Pages pages 10 p)
Jallouli, Aymen | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Josephbibtex@inproceedings{b4524991-7e95-4e35-bfb0-b0257a8b1b2e, title = {A computational model for large-amplitude nonlinear vibration of circular CMUTs under primary resonance}, author = {Jallouli, Aymen and Kacem, Najib and Le Moal, Patrice and Bourbon, Gilles and Lardies, Joseph}, year = {2015}, address = {Crete Island, Greece}, booktitle = {5th ECCOMAS Thematic Conference on Computational Methods in Structural Dynamics and Earthquake Engineering (COMPDYN 2015)}, month = {may}, pages = {10 p} }
2014 (4)
- inproceedings - Residual stress in capacitive micromachined ultrasonic transducers fabricated with anaodic bonding using SOI wafer
EUROSENSORS 2014 (2014, Pages pages 1 - 4)
Walter, Vincent | Bourbon, Gilles | Le Moal, Patriceressource | bibtex@inproceedings{53f96627-ba43-42e2-b062-c1ae02b92c96, title = {Residual stress in capacitive micromachined ultrasonic transducers fabricated with anaodic bonding using SOI wafer}, author = {Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice}, year = {2014}, booktitle = {EUROSENSORS 2014}, month = {sep}, pages = {1 - 4}, url = {https://publiweb.femto-st.fr/tntnet/entries/8152/documents/author/data} } - inproceedings - Design optimization of bistable modules electrothermally actuated for digital microrobotics.
International Conference on Advanced Intelligent Mechatronics (AIM) - IEEE/ASME (2014, Pages pages 1273 - 1278)
Hussein, Hussein | Chalvet, Vincent | Le Moal, Patrice | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippedoi | bibtex@inproceedings{24f1acf8-b01f-401f-9af8-a64f99c9baf6, title = {Design optimization of bistable modules electrothermally actuated for digital microrobotics.}, author = {Hussein, Hussein and Chalvet, Vincent and Le Moal, Patrice and Bourbon, Gilles and Haddab, Yassine and Lutz, Philippe}, year = {2014}, booktitle = {International Conference on Advanced Intelligent Mechatronics (AIM) - IEEE/ASME}, month = {jul}, pages = {1273 - 1278}, doi = {10.1109/AIM.2014.6878257} } - inproceedings - Characterization of capacitive micromachined ultrasonic transducers
International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP) (2014)
Lardies, Joseph | Bellaredj, Mohamed | Belgacem, Brahim | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincentressource | bibtex@inproceedings{e8cfc138-a901-4d34-88c8-226ca14b02d7, title = {Characterization of capacitive micromachined ultrasonic transducers}, author = {Lardies, Joseph and Bellaredj, Mohamed and Belgacem, Brahim and Bourbon, Gilles and Le Moal, Patrice and Walter, Vincent}, year = {2014}, booktitle = {International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP)}, month = {apr}, url = {https://publiweb.femto-st.fr/tntnet/entries/7159/documents/author/data} } - article - Anodic bonding using SOI wafer for fabrication of capacitive micromachined ultrasoonic transducers
Journal of Micromechanics and Microengineering (Volume 24, Issue (2), jan 2014, Pages :025009)
Bellaredj, Mohamed | Bourbon, Gilles | Walter, Vincent | Le Moal, Patrice | Berthillier, Marc
2013 (1)
- misc - Indexation passive d'un élément mobile présentant des dents
(jul 2013)
Minotti, P. | Bourbon, Gilles | Le Moal, Patricebibtex@misc{minotti_indexation_2012, title = {Indexation passive d'un \'el\'ement mobile pr\'esentant des dents}, author = {Minotti, P. and Bourbon, Gilles and Le Moal, Patrice}, year = {2013}, month = {jul} }
2012 (4)
- misc - Dispositif d'actionnement avec élément d'entraînement actionné par reptation
(nov 2012)
Le Moal, Patrice | Bourbon, Gilles | Minotti, P. | Vescovo, Paulbibtex@misc{le_moal_dispositif_2012, title = {Dispositif d'actionnement avec \'el\'ement d'entra\^inement actionn\'e par reptation}, author = {Le Moal, Patrice and Bourbon, Gilles and Minotti, P. and Vescovo, P.}, year = {2012}, month = {nov} } - inproceedings - Analysis of pressure fields generated by large CMUTs arrays
11th International Workshop on Micromachined Ultrasonic Transducers / Tours, France (2012)
Berthillier, Marc | Le Moal, Patrice | Lardies, Josephbibtex@inproceedings{berthillier_analysis_2012, title = {Analysis of pressure fields generated by large CMUTs arrays}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2012}, address = {Tours, France}, booktitle = {11th International Workshop on Micromachined Ultrasonic Transducers}, month = {jun} } - inproceedings - Critical steps in the anodic bonding process for fabrication of CMUTs
11th International Workshop on Micromachined Ultrasonic Transducers / Tours, France (2012)
Walter, Vincent | Bourbon, Gilles | Bellaredj, Mohamed | Berthillier, Marc | Le Moal, Patricebibtex@inproceedings{walter_critical_2012, title = {Critical steps in the anodic bonding process for fabrication of CMUTs}, author = {Walter, Vincent and Bourbon, Gilles and Bellaredj, Mohamed and Berthillier, Marc and Le Moal, Patrice}, year = {2012}, address = {Tours, France}, booktitle = {11th International Workshop on Micromachined Ultrasonic Transducers}, month = {jun} } - inproceedings - Comparison of various models to compute the vibro-acoustic response of large CMUT arrays
Acoustics 2012 (2012, Pages pages 3125 - 3130)
Berthillier, Marc | Le Moal, Patrice | Lardies, Josephbibtex@inproceedings{berthillier_comparison_2012, title = {Comparison of various models to compute the vibro-acoustic response of large CMUT arrays}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2012}, booktitle = {Acoustics 2012}, month = {apr}, pages = {3125 - 3130} }
2011 (3)
- inproceedings - Dynamic and acoustic modelization of capacitive micromachined ultrasonic transducers
IEEE International Ultrasonics Symposium / Orlando, Florida, United States (2011, Pages pages 608 - 611)
Berthillier, Marc | Le Moal, Patrice | Lardies, Josephressource | doi | bibtex@inproceedings{berthillier_m._dynamic_2011, title = {Dynamic and acoustic modelization of capacitive micromachined ultrasonic transducers}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2011}, address = {Orlando, Florida, United States}, booktitle = {IEEE International Ultrasonics Symposium}, month = {oct}, pages = {608 - 611}, url = {https://publiweb.femto-st.fr/tntnet/entries/1192/documents/author/data}, doi = {10.1109/ULTSYM.2011.0147}, organization = {IEEE}, publisher = {IEEE} } - inproceedings - Calcul du rayonnement acoustique des transducteurs capacitifs ultrasonores micro-usinés
20ème Congrès Français de Mécanique (CFM 2011) / Besançon, France (2011)
Berthillier, Marc | Renault, D. | Arbey, O. | Le Moal, Patrice | Lardies, Josephressource | bibtex@inproceedings{berthillier_m._calcul_2011, title = {Calcul du rayonnement acoustique des transducteurs capacitifs ultrasonores micro-usin\'es}, author = {Berthillier, Marc and Renault, D. and Arbey, O. and Le Moal, Patrice and Lardies, Joseph}, year = {2011}, address = {Besan\c{c}on, France}, booktitle = {20\`eme Congr\`es Fran\c{c}ais de M\'ecanique (CFM 2011)}, month = {aug}, url = {https://publiweb.femto-st.fr/tntnet/entries/1177/documents/author/data} } - inproceedings - Method and tool for CMUT Network simulation
10th International Workshop on Micromachined Ultrasonic Transducers / Salerno, Italy (2011)
Berthillier, Marc | Le Moal, Patrice | Lardies, Josephressource | bibtex@inproceedings{berthillier_m._method_2011, title = {Method and tool for CMUT Network simulation}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2011}, address = {Salerno, Italy}, booktitle = {10th International Workshop on Micromachined Ultrasonic Transducers}, month = {apr}, url = {https://publiweb.femto-st.fr/tntnet/entries/1114/documents/author/data} }









