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• Patrice Le Moal

Patrice Le Moal

Département Mécanique Appliquée
équipe Micro

CNRS

Courriel :

patrice.lemoal [at] femto-st.fr

03.81.66.66.17

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Mécanique Appliquée (UFC)

24 rue de l'Epitaphe
25000 BESANCON

Publications de Patrice Le Moal

Voir toutes les publications (54)2024 (2)2022 (4)2021 (5)2020 (2)2019 (5)2018 (4)2017 (4)2016 (10)2015 (6)2014 (4)2013 (1)2012 (4)2011 (3)

2024 (2)

• article - Modeling and experiments on flexible side-electrodes electrostatic actuators : Influence of the contact interface on the available force
  Sensors and Actuators A: Physical (Volume 373, aug 2024, Pages :115406 (14))
  Le Moal, Patrice | Bourbon, Gilles
  
  pdf | doi
• inproceedings - Physics-Informed Neural Networks for Inverse Problems in Structural Dynamics
  SPIE Smart Structures + Nondestructive Evaluation 2024 (2024) / Long Beach, California, United States (Volume 12950, 2024, Pages pages 5)
  Teloli, Rafaël | Bigot, Maël | Coelho, Lucas | Ramasso, Emmanuel | Tittarelli, Roberta | Le Moal, Patrice | Ouisse, Morvan
  
  pdf | doi | bibtex@inproceedings{ec73fc26-fd73-4be8-af7a-1173b7415a17, title = {Physics-Informed Neural Networks for Inverse Problems in Structural Dynamics}, author = {Teloli, Rafa\"el and Bigot, Ma\"el and Coelho, Lucas and Ramasso, Emmanuel and Tittarelli, Roberta and Le Moal, Patrice and Ouisse, Morvan}, year = {2024}, address = {Long Beach, California, United States}, booktitle = {SPIE Smart Structures + Nondestructive Evaluation 2024 (2024)}, editor = {ec73fc26-fd73-4be8-af7a-1173b7415a17-editor.pdf}, month = {mar}, pages = {5}, url = {https://publiweb.femto-st.fr/tntnet/entries/20529/documents/author/data}, volume = {12950}, doi = {10.1117/12.3010918} }

2022 (4)

• inproceedings - A variational bayesian clustering approach to acoustic emission interpretation including soft labels
  BELIEF 2022 (2022) / Paris, France (Volume 13506, 2022, Pages pages 23 - 32)
  Mbarga Nkogo, Martin | Ramasso, Emmanuel | Le Moal, Patrice | Bourbon, Gilles
  
  pdf | doi | bibtex@inproceedings{2cfaa9ee-722a-44e8-ad94-1d9753618cbc, title = {A variational bayesian clustering approach to acoustic emission interpretation including soft labels}, author = {Mbarga Nkogo, Martin and Ramasso, Emmanuel and Le Moal, Patrice and Bourbon, Gilles}, year = {2022}, address = {Paris, France}, booktitle = {BELIEF 2022 (2022)}, editor = {}, month = {oct}, pages = {23 - 32}, url = {https://publiweb.femto-st.fr/tntnet/entries/19560/documents/author/data}, volume = {13506}, doi = {10.1007/978-3-031-17801-6_3} }
• inproceedings - Towards integrated health monitoring of bio-based composite structures : influence of acoustic emission sensor embedment on material integrity
  20th European Conference on Composite Materials (ECCM 2022) / Lausanne, Switzerland (2022, Pages pages 9)
  Seychal, Guillem | Gabrion, Xavier | Ramasso, Emmanuel | Bourbon, Gilles | Le Moal, Patrice | Placet, Vincent
  
  bibtex@inproceedings{5d51ea4a-9d1f-4c1c-937e-8d4f12682a41, title = {Towards integrated health monitoring of bio-based composite structures : influence of acoustic emission sensor embedment on material integrity}, author = {Seychal, Guillem and Gabrion, Xavier and Ramasso, Emmanuel and Bourbon, Gilles and Le Moal, Patrice and Placet, Vincent}, year = {2022}, address = {Lausanne, Switzerland}, booktitle = {20th European Conference on Composite Materials (ECCM 2022)}, editor = {5d51ea4a-9d1f-4c1c-937e-8d4f12682a41-editor.pdf}, month = {jun}, pages = {9} }
• article - Towards in-situ acoustic emission-based health monitoring in bio-based composites structures: Does embedment of sensors affect the mechanical behaviour of flax/epoxy laminates ?
  Composites Part B-Engineering (Volume 236, may 2022, Pages :109787 (13))
  Seychal, Guillem | Ramasso, Emmanuel | Le Moal, Patrice | Bourbon, Gilles | Gabrion, Xavier | Placet, Vincent
  
  pdf | doi
• article - Suppressing residual vibrations in comb-drive electrostatic actuators : A command shaping technique adapted to nomadic applications
  Sensors and Actuators A: Physical (Volume 334, feb 2022, Pages :113366 (12))
  Ameur, Haythem | Le Moal, Patrice | Bourbon, Gilles | Vuillemin, Cedric | Sworowski, Marc
  
  pdf | doi

2021 (5)

• article - Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation
  Smart Materials and Structures (Volume 30, Issue (7), jul 2021, Pages :07LT01 (6))
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  pdf | doi
• inproceedings - Compact Digital Microrobot Based on Multistable Modules
  2021 International Conference on Robotics and Automation (ICRA 2021) / Xi'an, China (2021, Pages pages 1 - 8)
  Mohand Ousaid, Abdenbi | Bouhadda, Ismail | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philippe
  
  pdf | bibtex@inproceedings{c35f3853-16d0-471c-9786-36ccdc7c51dc, title = {Compact Digital Microrobot Based on Multistable Modules}, author = {Mohand Ousaid, Abdenbi and Bouhadda, Ismail and Bourbon, Gilles and Le Moal, Patrice and Haddab, Yassine and Lutz, Philippe}, year = {2021}, address = {Xi'an, China}, booktitle = {2021 International Conference on Robotics and Automation (ICRA 2021)}, month = {may}, pages = {1 - 8}, url = {https://publiweb.femto-st.fr/tntnet/entries/18043/documents/author/data} }
• article - Compact Digital Microrobot Based on Multistable Modules
  IEEE Robotics and automation letters (Volume 6, Issue (2), apr 2021, Pages :1922 - 1933)
  Mohand Ousaid, Abdenbi | Bouhadda, Ismail | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philippe
  
  pdf | doi
• article - CMUT-Based Sensor for Acoustic Emission Application: Experimental and Theoretical Contributions to Sensitivity Optimization
  Sensors (Volume 21, Issue (6), mar 2021, Pages :2042 (19))
  Boubenia, Redha | Le Moal, Patrice | Bourbon, Gilles | Ramasso, Emmanuel | Joseph, Eric
  
  pdf | doi
• article - Experimental characterization of nonlinear static and dynamic behaviors of circular capacitive microplates with initial deflection
  Nonlinear Dynamics (Volume 103, Issue (3), feb 2021, Pages :2329 - 2343)
  Jallouli, Aymen | Kacem, Najib | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
  
  pdf | doi

2020 (2)

• article - Towards a better understanding of the CMUTs potential for SHMapplications
  Sensors and Actuators A: Physical (Volume 313, oct 2020, Pages :112212 (11))
  Butaud, Pauline | Le Moal, Patrice | Bourbon, Gilles | Placet, Vincent | Ramasso, Emmanuel | Verdin, Benoît | Joseph, Eric
  
  pdf | doi
• article - Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
  Applied Physics Letters (Volume 117, Issue (3), jul 2020, Pages :033502 (6))
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  pdf | doi

2019 (5)

• inproceedings - Acoustic emission sensing using MEMS for structural health monitoring : demonstration of a newly designed Capacitive Micro machined Ultrasonic Transducer
  12th International Workshop on Structural Health Monitoring (IWSHM 2019) / Stanford, CA, United States (2019, Pages pages 10)
  Boubenia, Redha | Bourbon, Gilles | Le Moal, Patrice | Joseph, Eric | Ramasso, Emmanuel | Placet, Vincent
  
  pdf | bibtex@inproceedings{2a349e98-ff8a-44fd-8861-7b11bf780fa9, title = {Acoustic emission sensing using MEMS for structural health monitoring : demonstration of a newly designed Capacitive Micro machined Ultrasonic Transducer}, author = {Boubenia, Redha and Bourbon, Gilles and Le Moal, Patrice and Joseph, Eric and Ramasso, Emmanuel and Placet, Vincent}, year = {2019}, address = {Stanford, CA, United States}, booktitle = {12th International Workshop on Structural Health Monitoring (IWSHM 2019)}, month = {sep}, pages = {10}, url = {https://publiweb.femto-st.fr/tntnet/entries/16116/documents/author/data} }
• inproceedings - Mode localization in two coupled nearly identical MEMS cantilevers for mass sensing
  International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE 2019) / Anaheim, United States (2019)
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  bibtex@inproceedings{1c66f2d8-35cb-4a6d-b461-266b4435ea58, title = {Mode localization in two coupled nearly identical MEMS cantilevers for mass sensing}, author = {Rabenimanana, Toky Harrison and Walter, Vincent and Kacem, Najib and Le Moal, Patrice and Bourbon, Gilles and Lardies, Joseph}, year = {2019}, address = {Anaheim, United States}, booktitle = {International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE 2019)}, month = {aug} }
• article - Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation
  Sensors and Actuators A: Physical (Volume 295, aug 2019, Pages :643 - 652)
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  pdf | doi
• inproceedings - CMUT sensors based on circular membranes array for SHM applications
  Smart Structures + Nondestructive Evaluation (SPIE 2019) / Denver, United States (2019, Pages pages 8)
  Butaud, Pauline | Bourbon, Gilles | Le Moal, Patrice | Joseph, Eric | Verdin, Benoît | Ramasso, Emmanuel | Placet, Vincent
  
  pdf | bibtex@inproceedings{0bb4e65b-169c-46f1-8524-d1a48979458d, title = {CMUT sensors based on circular membranes array for SHM applications}, author = {Butaud, Pauline and Bourbon, Gilles and Le Moal, Patrice and Joseph, Eric and Verdin, Beno\^it and Ramasso, Emmanuel and Placet, Vincent}, year = {2019}, address = {Denver, United States}, booktitle = {Smart Structures + Nondestructive Evaluation (SPIE 2019)}, month = {mar}, pages = {8}, url = {https://publiweb.femto-st.fr/tntnet/entries/16115/documents/author/data} }
• article - On the design of a preshaped curved beam bistable mechanism
  Mechanism and Machine Theory (Volume 131, jan 2019, Pages :204 - 217)
  Hussein, Hussein | Le Moal, Patrice | Younes, Rafic | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippe
  
  pdf | doi

2018 (4)

• inproceedings - Repeatability and reproducibility analysis of a multistable module devoted to digital microrobotics
  IEEE RSJ International Conference on Intelligent Robots and Systems (IROS 2018) / Madrid, Spain (2018, Pages pages 4889 - 4894)
  Bouhadda, Ismail | Mohand Ousaid, Abdenbi | Hussein, Hussein | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philippe
  
  pdf | doi | bibtex@inproceedings{c9b980a8-66a2-430b-9ecd-cdd3c839842d, title = {Repeatability and reproducibility analysis of a multistable module devoted to digital microrobotics}, author = {Bouhadda, Ismail and Mohand Ousaid, Abdenbi and Hussein, Hussein and Bourbon, Gilles and Le Moal, Patrice and Haddab, Yassine and Lutz, Philippe}, year = {2018}, address = {Madrid, Spain}, booktitle = {IEEE RSJ International Conference on Intelligent Robots and Systems (IROS 2018)}, month = {oct}, pages = {4889 - 4894}, url = {https://publiweb.femto-st.fr/tntnet/entries/14904/documents/author/data}, doi = {10.1109/IROS.2018.8594259}, organization = {IEEE/RSJ International conference on intelligent robot and systems ( IROS )} }
• inproceedings - Nonlinear analytical model of two weakly coupled MEMS cantilevers for mass sensing using electrostatic actuation
  32th Eurosensors Conference (2018) / Graz, Austria (2018, Pages pages 5)
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Lardies, Joseph
  
  doi | bibtex@inproceedings{b756faa5-4859-4420-8b0d-6eaa7f1b85e8, title = {Nonlinear analytical model of two weakly coupled MEMS cantilevers for mass sensing using electrostatic actuation}, author = {Rabenimanana, Toky Harrison and Walter, Vincent and Kacem, Najib and Le Moal, Patrice and Lardies, Joseph}, year = {2018}, address = {Graz, Austria}, booktitle = {32th Eurosensors Conference (2018)}, month = {sep}, pages = {5}, doi = {10.3390/proceedings2131084} }
• inproceedings - Bordering the footprint of AE sensor using a bank of sharply-defined frequency domain capacitive micromachined ultrasonic transducers
  9th European Workshop on Structural Health Monitoring Series (2018) / Manchester, United Kingdom (2018, Pages pages 7)
  Butaud, Pauline | Bourbon, Gilles | Le Moal, Patrice | Joseph, Eric | Verdin, Benoît | Ramasso, Emmanuel | Placet, Vincent | Boubakar, Lamine Mohamed
  
  pdf | bibtex@inproceedings{5da8abad-6674-4864-b464-2590039a6dd1, title = {Bordering the footprint of AE sensor using a bank of sharply-defined frequency domain capacitive micromachined ultrasonic transducers}, author = {Butaud, Pauline and Bourbon, Gilles and Le Moal, Patrice and Joseph, Eric and Verdin, Beno\^it and Ramasso, Emmanuel and Placet, Vincent and Boubakar, Lamine Mohamed}, year = {2018}, address = {Manchester, United Kingdom}, booktitle = {9th European Workshop on Structural Health Monitoring Series (2018)}, month = {jul}, pages = {7}, url = {https://publiweb.femto-st.fr/tntnet/entries/15114/documents/author/data} }
• article - Design and fabrication of novel discrete actuators for microrobotic tasks
  Sensors and Actuators A: Physical (Volume 271, mar 2018, Pages :373 - 382)
  Hussein, Hussein | Bouhadda, Ismail | Mohand Ousaid, Abdenbi | Bourbon, Gilles | Le Moal, Patrice | Haddab, Yassine | Lutz, Philippe
  
  pdf | doi

2017 (4)

• article - Squeeze film damping and stiffening in circular CMUT with air-filled cavity: Influence of the lateral venting boundary conditions and the bias voltage
  Sensors and Actuators A: Physical (Volume 266, oct 2017, Pages :15 - 23)
  Galisultanov, Ayrat | Le Moal, Patrice | Bourbon, Gilles | Walter, Vincent
  
  pdf | doi
• article - Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation
  Procedia Engineering (Volume 168, jun 2017, Pages :924 - 928)
  Kacem, Najib | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
  
  pdf | doi
• inproceedings - Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning
  Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2017) / Bordeaux, France (2017, Pages pages 4)
  Bouhadda, Ismail | Mohand Ousaid, Abdenbi | Le Moal, Patrice | Bourbon, Gilles | Lutz, Philippe
  
  pdf | doi | bibtex@inproceedings{878481cf-ae92-4a45-9572-09da72dfbbab, title = {Dynamic characterization of an electrothermal actuator devoted to discrete MEMS positioning}, author = {Bouhadda, Ismail and Mohand Ousaid, Abdenbi and Le Moal, Patrice and Bourbon, Gilles and Lutz, Philippe}, year = {2017}, address = {Bordeaux, France}, booktitle = {Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2017)}, month = {may}, pages = {4}, url = {https://publiweb.femto-st.fr/tntnet/entries/14826/documents/author/data}, doi = {10.1109/DTIP.2017.7984472}, organization = {Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS} }
• article - Modal parameter identification of a CMUT membrane using response data only
  Mechanics & Industry (Volume 18, Issue (8), mar 2017, Pages :10)
  Lardies, Joseph | Bourbon, Gilles | Le Moal, Patrice | Kacem, Najib | Walter, Vincent | Le, Thien Phu
  
  pdf | doi

2016 (10)

• article - Pull-in instability tuning in imperfect nonlinear circular microplates under electrostatic actuation
  Physics Letters A (Volume 380, Issue (46), dec 2016, Pages :3886 - 3890)
  Jallouli, Aymen | Kacem, Najib | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent | Lardies, Joseph
  
  doi
• inproceedings - Modal parameter identification of a CMUT membrane using response data only
  5ème Colloque Analyse Vibratoire Expérimentale / Blois, France (2016)
  Lardies, Joseph | Bourbon, Gilles | Kacem, Najib | Le Moal, Patrice | Walter, Vincent | Le, Thien Phu
  
  bibtex@inproceedings{f31ad096-a37b-49d6-8f0d-75d70a3bc5a8, title = {Modal parameter identification of a CMUT membrane using response data only}, author = {Lardies, Joseph and Bourbon, Gilles and Kacem, Najib and Le Moal, Patrice and Walter, Vincent and Le, Thien Phu}, year = {2016}, address = {Blois, France}, booktitle = {5\`eme Colloque Analyse Vibratoire Exp\'erimentale}, month = {nov} }
• inproceedings - Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation
  30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
  Kacem, Najib | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
  
  bibtex@inproceedings{8f37b0e7-3a23-47d4-a3b7-0f523f55c05d, title = {Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation}, author = {Kacem, Najib and Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Lardies, Joseph}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} }
• inproceedings - Electrostatic actuation to counterbalance the manufacturing defects in a MEMS mass detection sensor using mode localization
  30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
  Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Kacem, Najib | Lardies, Joseph
  
  bibtex@inproceedings{4d1dc079-0d82-49d7-ac36-d0b258688ccc, title = {Electrostatic actuation to counterbalance the manufacturing defects in a MEMS mass detection sensor using mode localization}, author = {Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Kacem, Najib and Lardies, Joseph}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} }
• inproceedings - Electromechanical coupling between comb-drive actuators and charge pump converters
  30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
  Verdin, Benoît | Le Moal, Patrice | Bourbon, Gilles | Walter, Vincent
  
  bibtex@inproceedings{bf42dcfb-ab52-4480-9f3e-db665ae0e762, title = {Electromechanical coupling between comb-drive actuators and charge pump converters}, author = {Verdin, Beno\^it and Le Moal, Patrice and Bourbon, Gilles and Walter, Vincent}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} }
• inproceedings - Dynamic characteristics of circular CMUTs with air-filled cavities
  IEEE International Ultrasonics Symposium (IUS 2016) / Tours, France (2016, Pages pages 4 p)
  Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gilles
  
  pdf | bibtex@inproceedings{754c4798-8df3-486f-a523-013d91ffb3de, title = {Dynamic characteristics of circular CMUTs with air-filled cavities}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2016}, address = {Tours, France}, booktitle = {IEEE International Ultrasonics Symposium (IUS 2016)}, month = {sep}, pages = {4 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13278/documents/author/data} }
• inproceedings - Squeeze film damping in CMUTs with air-filled cavities
  15th International Worshop on Micromachined Ultrasonic Transducers / Rome, Italy (2016, Pages pages 2 p)
  Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gilles
  
  pdf | bibtex@inproceedings{348a39a3-18b9-4481-8c59-52e9293c57a1, title = {Squeeze film damping in CMUTs with air-filled cavities}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2016}, address = {Rome, Italy}, booktitle = {15th International Worshop on Micromachined Ultrasonic Transducers}, month = {jun}, pages = {2 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13273/documents/author/data} }
• inproceedings - Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry
  VI SPIE Optical Micro- and Nanometrology ( 2016) / Brussels, Belgium (2016)
  Bargiel, Sylwester | Lullin, Justine | Le Moal, Patrice | Perrin, Stéphane | Passilly, Nicolas | Albero Silvestre, Jorge | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
  
  doi | bibtex@inproceedings{759e01ed-b084-49d5-beff-df30133e9eb2, title = {Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry}, author = {Bargiel, Sylwester and Lullin, Justine and Le Moal, Patrice and Perrin, St\'ephane and Passilly, Nicolas and Albero Silvestre, Jorge and Froehly, Luc and Lardet-Vieudrin, Franck and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology ( 2016)}, month = {apr}, doi = {10.1117/12.2230487}, organization = {SPIE Photonics Europe Conference} }
• article - Characterization of capacitive micromachined ultrasonic transducers
  Microsystem Technologies (Volume 22, Issue (3), mar 2016, Pages :593 - 601)
  Bellaredj, Mohamed | Lardies, Joseph | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent | Berthillier, Marc
  
  doi
• article - Dynamic electro-thermo-mechanical modeling of a U-shaped electrothermal actuator
  Journal of Micromechanics and Microengineering (Volume 26, Issue (2), jan 2016, Pages :11 p)
  Hussein, Hussein | Tahhan, Arèf | Le Moal, Patrice | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippe
  
  pdf | doi

2015 (6)

• inproceedings - Nonlinear dynamics of circular capacitive micromachined ultrasonic transducers
  IEEE Conference on Sensors (SENSORS 2015) / Busan, Korea, Republic Of (2015, Pages pages 4)
  Kacem, Najib | Jallouli, Aymen | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
  
  pdf | bibtex@inproceedings{4556b836-7bfb-415c-a5ef-33646eadcb71, title = {Nonlinear dynamics of circular capacitive micromachined ultrasonic transducers}, author = {Kacem, Najib and Jallouli, Aymen and Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Lardies, Joseph}, year = {2015}, address = {Busan, Korea, Republic Of}, booktitle = {IEEE Conference on Sensors (SENSORS 2015)}, month = {nov}, pages = {4}, url = {https://publiweb.femto-st.fr/tntnet/entries/12186/documents/author/data} }
• article - An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
  Journal of Micromechanics and Microengineering (Volume 25, Issue (11), oct 2015, Pages :115013)
  Lullin, Justine | Bargiel, Sylwester | Le Moal, Patrice | Perrin, Stéphane | Albero Silvestre, Jorge | Passilly, Nicolas | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
  
  pdf | doi
• inproceedings - Residual stress in Silicon membranes of circular CMUT
  COMSOL Conference (2015) / Grenoble, France (2015, Pages pages 13 p)
  Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gilles
  
  pdf | bibtex@inproceedings{f5c122a9-ea91-4fd1-b7c3-0b97ad135123, title = {Residual stress in Silicon membranes of circular CMUT}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2015}, address = {Grenoble, France}, booktitle = {COMSOL Conference (2015)}, month = {oct}, pages = {13 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13272/documents/author/data} }
• article - Modeling and Stress Analysis of a Pre-Shaped Curved Beam : Influence of High Modes of Buckling
  International Journal of Applied Mechanics (Volume 7, Issue (4), aug 2015, Pages :1550055 (20))
  Hussein, Hussein | Le Moal, Patrice | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippe
  
  pdf | doi
• inproceedings - Dynamique non-linéaire d’un transducteur capacitif ultrasonore micro-usiné à membrane circulaire
  22ème Congrès Français de Mécanique (CFM 2015) / Lyon, France (2015, Pages pages 3 p)
  Jallouli, Aymen | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  bibtex@inproceedings{0c19b7c3-9bd1-4ff5-bf2f-04bb459ab3f7, title = {Dynamique non-lin\'eaire d'un transducteur capacitif ultrasonore micro-usin\'e \`a membrane circulaire}, author = {Jallouli, Aymen and Kacem, Najib and Le Moal, Patrice and Bourbon, Gilles and Lardies, Joseph}, year = {2015}, address = {Lyon, France}, booktitle = {22\`eme Congr\`es Fran\c{c}ais de M\'ecanique (CFM 2015)}, editor = {0c19b7c3-9bd1-4ff5-bf2f-04bb459ab3f7-editor.pdf}, month = {aug}, pages = {3 p} }
• inproceedings - A computational model for large-amplitude nonlinear vibration of circular CMUTs under primary resonance
  5th ECCOMAS Thematic Conference on Computational Methods in Structural Dynamics and Earthquake Engineering (COMPDYN 2015) / Crete Island, Greece (2015, Pages pages 10 p)
  Jallouli, Aymen | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  bibtex@inproceedings{b4524991-7e95-4e35-bfb0-b0257a8b1b2e, title = {A computational model for large-amplitude nonlinear vibration of circular CMUTs under primary resonance}, author = {Jallouli, Aymen and Kacem, Najib and Le Moal, Patrice and Bourbon, Gilles and Lardies, Joseph}, year = {2015}, address = {Crete Island, Greece}, booktitle = {5th ECCOMAS Thematic Conference on Computational Methods in Structural Dynamics and Earthquake Engineering (COMPDYN 2015)}, month = {may}, pages = {10 p} }

2014 (4)

• inproceedings - Residual stress in capacitive micromachined ultrasonic transducers fabricated with anaodic bonding using SOI wafer
  EUROSENSORS 2014 (2014, Pages pages 1 - 4)
  Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice
  
  pdf | bibtex@inproceedings{53f96627-ba43-42e2-b062-c1ae02b92c96, title = {Residual stress in capacitive micromachined ultrasonic transducers fabricated with anaodic bonding using SOI wafer}, author = {Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice}, year = {2014}, booktitle = {EUROSENSORS 2014}, month = {sep}, pages = {1 - 4}, url = {https://publiweb.femto-st.fr/tntnet/entries/8152/documents/author/data} }
• inproceedings - Design optimization of bistable modules electrothermally actuated for digital microrobotics.
  International Conference on Advanced Intelligent Mechatronics (AIM) - IEEE/ASME (2014, Pages pages 1273 - 1278)
  Hussein, Hussein | Chalvet, Vincent | Le Moal, Patrice | Bourbon, Gilles | Haddab, Yassine | Lutz, Philippe
  
  doi | bibtex@inproceedings{24f1acf8-b01f-401f-9af8-a64f99c9baf6, title = {Design optimization of bistable modules electrothermally actuated for digital microrobotics.}, author = {Hussein, Hussein and Chalvet, Vincent and Le Moal, Patrice and Bourbon, Gilles and Haddab, Yassine and Lutz, Philippe}, year = {2014}, booktitle = {International Conference on Advanced Intelligent Mechatronics (AIM) - IEEE/ASME}, month = {jul}, pages = {1273 - 1278}, doi = {10.1109/AIM.2014.6878257} }
• inproceedings - Characterization of capacitive micromachined ultrasonic transducers
  International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP) (2014)
  Lardies, Joseph | Bellaredj, Mohamed | Belgacem, Brahim | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent
  
  pdf | bibtex@inproceedings{e8cfc138-a901-4d34-88c8-226ca14b02d7, title = {Characterization of capacitive micromachined ultrasonic transducers}, author = {Lardies, Joseph and Bellaredj, Mohamed and Belgacem, Brahim and Bourbon, Gilles and Le Moal, Patrice and Walter, Vincent}, year = {2014}, booktitle = {International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP)}, month = {apr}, url = {https://publiweb.femto-st.fr/tntnet/entries/7159/documents/author/data} }
• article - Anodic bonding using SOI wafer for fabrication of capacitive micromachined ultrasoonic transducers
  Journal of Micromechanics and Microengineering (Volume 24, Issue (2), jan 2014, Pages :025009)
  Bellaredj, Mohamed | Bourbon, Gilles | Walter, Vincent | Le Moal, Patrice | Berthillier, Marc
  
  pdf | doi

2013 (1)

• misc - Indexation passive d'un élément mobile présentant des dents
  (jul 2013)
  Minotti, P. | Bourbon, Gilles | Le Moal, Patrice
  
  bibtex@misc{minotti_indexation_2012, title = {Indexation passive d'un \'el\'ement mobile pr\'esentant des dents}, author = {Minotti, P. and Bourbon, Gilles and Le Moal, Patrice}, year = {2013}, month = {jul} }

2012 (4)

• misc - Dispositif d'actionnement avec élément d'entraînement actionné par reptation
  (nov 2012)
  Le Moal, Patrice | Bourbon, Gilles | Minotti, P. | Vescovo, Paul
  
  bibtex@misc{le_moal_dispositif_2012, title = {Dispositif d'actionnement avec \'el\'ement d'entra\^inement actionn\'e par reptation}, author = {Le Moal, Patrice and Bourbon, Gilles and Minotti, P. and Vescovo, P.}, year = {2012}, month = {nov} }
• inproceedings - Critical steps in the anodic bonding process for fabrication of CMUTs
  11th International Workshop on Micromachined Ultrasonic Transducers / Tours, France (2012)
  Walter, Vincent | Bourbon, Gilles | Bellaredj, Mohamed | Berthillier, Marc | Le Moal, Patrice
  
  bibtex@inproceedings{walter_critical_2012, title = {Critical steps in the anodic bonding process for fabrication of CMUTs}, author = {Walter, Vincent and Bourbon, Gilles and Bellaredj, Mohamed and Berthillier, Marc and Le Moal, Patrice}, year = {2012}, address = {Tours, France}, booktitle = {11th International Workshop on Micromachined Ultrasonic Transducers}, month = {jun} }
• inproceedings - Analysis of pressure fields generated by large CMUTs arrays
  11th International Workshop on Micromachined Ultrasonic Transducers / Tours, France (2012)
  Berthillier, Marc | Le Moal, Patrice | Lardies, Joseph
  
  bibtex@inproceedings{berthillier_analysis_2012, title = {Analysis of pressure fields generated by large CMUTs arrays}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2012}, address = {Tours, France}, booktitle = {11th International Workshop on Micromachined Ultrasonic Transducers}, month = {jun} }
• inproceedings - Comparison of various models to compute the vibro-acoustic response of large CMUT arrays
  Acoustics 2012 (2012, Pages pages 3125 - 3130)
  Berthillier, Marc | Le Moal, Patrice | Lardies, Joseph
  
  bibtex@inproceedings{berthillier_comparison_2012, title = {Comparison of various models to compute the vibro-acoustic response of large CMUT arrays}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2012}, booktitle = {Acoustics 2012}, month = {apr}, pages = {3125 - 3130} }

2011 (3)

• inproceedings - Dynamic and acoustic modelization of capacitive micromachined ultrasonic transducers
  IEEE International Ultrasonics Symposium / Orlando, Florida, United States (2011, Pages pages 608 - 611)
  Berthillier, Marc | Le Moal, Patrice | Lardies, Joseph
  
  pdf | doi | bibtex@inproceedings{berthillier_m._dynamic_2011, title = {Dynamic and acoustic modelization of capacitive micromachined ultrasonic transducers}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2011}, address = {Orlando, Florida, United States}, booktitle = {IEEE International Ultrasonics Symposium}, month = {oct}, pages = {608 - 611}, url = {https://publiweb.femto-st.fr/tntnet/entries/1192/documents/author/data}, doi = {10.1109/ULTSYM.2011.0147}, organization = {IEEE}, publisher = {IEEE} }
• inproceedings - Calcul du rayonnement acoustique des transducteurs capacitifs ultrasonores micro-usinés
  20ème Congrès Français de Mécanique (CFM 2011) / Besançon, France (2011)
  Berthillier, Marc | Renault, D. | Arbey, O. | Le Moal, Patrice | Lardies, Joseph
  
  pdf | bibtex@inproceedings{berthillier_m._calcul_2011, title = {Calcul du rayonnement acoustique des transducteurs capacitifs ultrasonores micro-usin\'es}, author = {Berthillier, Marc and Renault, D. and Arbey, O. and Le Moal, Patrice and Lardies, Joseph}, year = {2011}, address = {Besan\c{c}on, France}, booktitle = {20\`eme Congr\`es Fran\c{c}ais de M\'ecanique (CFM 2011)}, month = {aug}, url = {https://publiweb.femto-st.fr/tntnet/entries/1177/documents/author/data} }
• inproceedings - Method and tool for CMUT Network simulation
  10th International Workshop on Micromachined Ultrasonic Transducers / Salerno, Italy (2011)
  Berthillier, Marc | Le Moal, Patrice | Lardies, Joseph
  
  pdf | bibtex@inproceedings{berthillier_m._method_2011, title = {Method and tool for CMUT Network simulation}, author = {Berthillier, Marc and Le Moal, Patrice and Lardies, Joseph}, year = {2011}, address = {Salerno, Italy}, booktitle = {10th International Workshop on Micromachined Ultrasonic Transducers}, month = {apr}, url = {https://publiweb.femto-st.fr/tntnet/entries/1114/documents/author/data} }