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• Vincent Walter

Vincent Walter

Département Mécanique Appliquée
équipe Micro

UFC - UFR ST

Courriel :

vincent.walter [at] femto-st.fr

03.81.66.67.27

Adresse :

Mécanique Appliquée (UFC)

24 rue de l'Epitaphe
25000 BESANCON

Publications de Vincent Walter

Voir toutes les publications (28)2022 (1)2021 (1)2020 (3)2019 (2)2018 (2)2017 (4)2016 (8)2015 (2)2014 (4)2012 (1)

2022 (1)

• article - On the equivalence between mass perturbation and DC voltage bias in coupled MEMS resonators : Theoretical and experimental investigation
  Journal of Applied Physics (Volume 132, Issue (2), jul 2022, Pages :024502 (18))
  Rabenimanana, Toky Harrison | Najar, Fehmi | Ghommem, Mehdi | Walter, Vincent | Kacem, Najib
  
  pdf | doi

2021 (1)

• article - Enhancing the linear dynamic range of a mode-localized MEMS mass sensor with repulsive electrostatic actuation
  Smart Materials and Structures (Volume 30, Issue (7), jul 2021, Pages :07LT01 (6))
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  pdf | doi

2020 (3)

• article - Towards an ultra-sensitive hybrid mass sensor based on mode localization without resonance tracking
  Sensors (Volume 20, Issue (18), sep 2020, Pages :5295 (22))
  Humbert, Claude | Walter, Vincent | Kacem, Najib | Leblois, Thérèse
  
  pdf | doi
• article - Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization
  Applied Physics Letters (Volume 117, Issue (3), jul 2020, Pages :033502 (6))
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  pdf | doi
• article - Implementation of a tunable hybrid system with coupled high Q-factor resonators based on mode localization for sensing purposes
  Smart Materials and Structures (Volume 29, Issue (2), jan 2020, Pages :02LT01 (6))
  Humbert, Claude | Goavec-Merou, Gwenhaël | Walter, Vincent | Kacem, Najib | Leblois, Thérèse
  
  doi

2019 (2)

• article - Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation
  Sensors and Actuators A: Physical (Volume 295, aug 2019, Pages :643 - 652)
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  pdf | doi
• inproceedings - Mode localization in two coupled nearly identical MEMS cantilevers for mass sensing
  International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE 2019) / Anaheim, United States (2019)
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Bourbon, Gilles | Lardies, Joseph
  
  bibtex@inproceedings{1c66f2d8-35cb-4a6d-b461-266b4435ea58, title = {Mode localization in two coupled nearly identical MEMS cantilevers for mass sensing}, author = {Rabenimanana, Toky Harrison and Walter, Vincent and Kacem, Najib and Le Moal, Patrice and Bourbon, Gilles and Lardies, Joseph}, year = {2019}, address = {Anaheim, United States}, booktitle = {International Design Engineering Technical Conferences and Computers and Information in Engineering Conference (IDETC/CIE 2019)}, month = {aug} }

2018 (2)

• inproceedings - On the implementation of mode localization between physical and digital resonators
  IEEE International Ultrasonics Symposium (IUS 2018) / Kobe, Japan (2018, Pages pages 1 - 4)
  Humbert, Claude | Goavec-Merou, Gwenhaël | Bertin, Thomas | Kacem, Najib | Walter, Vincent | Leblois, Thérèse
  
  doi | bibtex@inproceedings{04eb43b5-3476-4365-89b8-7b3bc56eb157, title = {On the implementation of mode localization between physical and digital resonators}, author = {Humbert, Claude and Goavec-Merou, Gwenha\"el and Bertin, Thomas and Kacem, Najib and Walter, Vincent and Leblois, Th\'er\`ese}, year = {2018}, address = {Kobe, Japan}, booktitle = {IEEE International Ultrasonics Symposium (IUS 2018)}, editor = {IEEE}, month = {oct}, pages = {1 - 4}, doi = {10.1109/ULTSYM.2018.8580140 } }
• inproceedings - Nonlinear analytical model of two weakly coupled MEMS cantilevers for mass sensing using electrostatic actuation
  32th Eurosensors Conference (2018) / Graz, Austria (2018, Pages pages 5)
  Rabenimanana, Toky Harrison | Walter, Vincent | Kacem, Najib | Le Moal, Patrice | Lardies, Joseph
  
  doi | bibtex@inproceedings{b756faa5-4859-4420-8b0d-6eaa7f1b85e8, title = {Nonlinear analytical model of two weakly coupled MEMS cantilevers for mass sensing using electrostatic actuation}, author = {Rabenimanana, Toky Harrison and Walter, Vincent and Kacem, Najib and Le Moal, Patrice and Lardies, Joseph}, year = {2018}, address = {Graz, Austria}, booktitle = {32th Eurosensors Conference (2018)}, month = {sep}, pages = {5}, doi = {10.3390/proceedings2131084} }

2017 (4)

• article - Squeeze film damping and stiffening in circular CMUT with air-filled cavity: Influence of the lateral venting boundary conditions and the bias voltage
  Sensors and Actuators A: Physical (Volume 266, oct 2017, Pages :15 - 23)
  Galisultanov, Ayrat | Le Moal, Patrice | Bourbon, Gilles | Walter, Vincent
  
  pdf | doi
• inproceedings - Dynamic behavior of a mass sensing mems device using electrostatic actuation and mode localization
  International Conference on Engineering Vibration (ICoEV 2017) / Sofia, Bulgaria (2017)
  Walter, Vincent | Kacem, Najib | Lardies, Joseph
  
  bibtex@inproceedings{28fe952a-387c-45f1-8963-8053dbff43de, title = {Dynamic behavior of a mass sensing mems device using electrostatic actuation and mode localization}, author = {Walter, Vincent and Kacem, Najib and Lardies, Joseph}, year = {2017}, address = {Sofia, Bulgaria}, booktitle = {International Conference on Engineering Vibration (ICoEV 2017)}, month = {sep} }
• article - Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation
  Procedia Engineering (Volume 168, jun 2017, Pages :924 - 928)
  Kacem, Najib | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
  
  pdf | doi
• article - Modal parameter identification of a CMUT membrane using response data only
  Mechanics & Industry (Volume 18, Issue (8), mar 2017, Pages :10)
  Lardies, Joseph | Bourbon, Gilles | Le Moal, Patrice | Kacem, Najib | Walter, Vincent | Le, Thien Phu
  
  pdf | doi

2016 (8)

• article - Pull-in instability tuning in imperfect nonlinear circular microplates under electrostatic actuation
  Physics Letters A (Volume 380, Issue (46), dec 2016, Pages :3886 - 3890)
  Jallouli, Aymen | Kacem, Najib | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent | Lardies, Joseph
  
  doi
• inproceedings - Modal parameter identification of a CMUT membrane using response data only
  5ème Colloque Analyse Vibratoire Expérimentale / Blois, France (2016)
  Lardies, Joseph | Bourbon, Gilles | Kacem, Najib | Le Moal, Patrice | Walter, Vincent | Le, Thien Phu
  
  bibtex@inproceedings{f31ad096-a37b-49d6-8f0d-75d70a3bc5a8, title = {Modal parameter identification of a CMUT membrane using response data only}, author = {Lardies, Joseph and Bourbon, Gilles and Kacem, Najib and Le Moal, Patrice and Walter, Vincent and Le, Thien Phu}, year = {2016}, address = {Blois, France}, booktitle = {5\`eme Colloque Analyse Vibratoire Exp\'erimentale}, month = {nov} }
• inproceedings - Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation
  30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
  Kacem, Najib | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
  
  bibtex@inproceedings{8f37b0e7-3a23-47d4-a3b7-0f523f55c05d, title = {Mode veering and internal resonance in mechanically coupled nanocantilevers under electrostatic actuation}, author = {Kacem, Najib and Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Lardies, Joseph}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} }
• inproceedings - Electrostatic actuation to counterbalance the manufacturing defects in a MEMS mass detection sensor using mode localization
  30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
  Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Kacem, Najib | Lardies, Joseph
  
  bibtex@inproceedings{4d1dc079-0d82-49d7-ac36-d0b258688ccc, title = {Electrostatic actuation to counterbalance the manufacturing defects in a MEMS mass detection sensor using mode localization}, author = {Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Kacem, Najib and Lardies, Joseph}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} }
• inproceedings - Electromechanical coupling between comb-drive actuators and charge pump converters
  30th Eurosensors Conference (EUROSENSORS 2016) / Budapest, Hungary (2016, Pages pages 4 p)
  Verdin, Benoît | Le Moal, Patrice | Bourbon, Gilles | Walter, Vincent
  
  bibtex@inproceedings{bf42dcfb-ab52-4480-9f3e-db665ae0e762, title = {Electromechanical coupling between comb-drive actuators and charge pump converters}, author = {Verdin, Beno\^it and Le Moal, Patrice and Bourbon, Gilles and Walter, Vincent}, year = {2016}, address = {Budapest, Hungary}, booktitle = {30th Eurosensors Conference (EUROSENSORS 2016)}, month = {sep}, pages = {4 p} }
• inproceedings - Dynamic characteristics of circular CMUTs with air-filled cavities
  IEEE International Ultrasonics Symposium (IUS 2016) / Tours, France (2016, Pages pages 4 p)
  Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gilles
  
  pdf | bibtex@inproceedings{754c4798-8df3-486f-a523-013d91ffb3de, title = {Dynamic characteristics of circular CMUTs with air-filled cavities}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2016}, address = {Tours, France}, booktitle = {IEEE International Ultrasonics Symposium (IUS 2016)}, month = {sep}, pages = {4 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13278/documents/author/data} }
• inproceedings - Squeeze film damping in CMUTs with air-filled cavities
  15th International Worshop on Micromachined Ultrasonic Transducers / Rome, Italy (2016, Pages pages 2 p)
  Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gilles
  
  pdf | bibtex@inproceedings{348a39a3-18b9-4481-8c59-52e9293c57a1, title = {Squeeze film damping in CMUTs with air-filled cavities}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2016}, address = {Rome, Italy}, booktitle = {15th International Worshop on Micromachined Ultrasonic Transducers}, month = {jun}, pages = {2 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13273/documents/author/data} }
• article - Characterization of capacitive micromachined ultrasonic transducers
  Microsystem Technologies (Volume 22, Issue (3), mar 2016, Pages :593 - 601)
  Bellaredj, Mohamed | Lardies, Joseph | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent | Berthillier, Marc
  
  doi

2015 (2)

• inproceedings - Nonlinear dynamics of circular capacitive micromachined ultrasonic transducers
  IEEE Conference on Sensors (SENSORS 2015) / Busan, Korea, Republic Of (2015, Pages pages 4)
  Kacem, Najib | Jallouli, Aymen | Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice | Lardies, Joseph
  
  pdf | bibtex@inproceedings{4556b836-7bfb-415c-a5ef-33646eadcb71, title = {Nonlinear dynamics of circular capacitive micromachined ultrasonic transducers}, author = {Kacem, Najib and Jallouli, Aymen and Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice and Lardies, Joseph}, year = {2015}, address = {Busan, Korea, Republic Of}, booktitle = {IEEE Conference on Sensors (SENSORS 2015)}, month = {nov}, pages = {4}, url = {https://publiweb.femto-st.fr/tntnet/entries/12186/documents/author/data} }
• inproceedings - Residual stress in Silicon membranes of circular CMUT
  COMSOL Conference (2015) / Grenoble, France (2015, Pages pages 13 p)
  Galisultanov, Ayrat | Le Moal, Patrice | Walter, Vincent | Bourbon, Gilles
  
  pdf | bibtex@inproceedings{f5c122a9-ea91-4fd1-b7c3-0b97ad135123, title = {Residual stress in Silicon membranes of circular CMUT}, author = {Galisultanov, Ayrat and Le Moal, Patrice and Walter, Vincent and Bourbon, Gilles}, year = {2015}, address = {Grenoble, France}, booktitle = {COMSOL Conference (2015)}, month = {oct}, pages = {13 p}, url = {https://publiweb.femto-st.fr/tntnet/entries/13272/documents/author/data} }

2014 (4)

• inproceedings - Residual stress in capacitive micromachined ultrasonic transducers fabricated with anaodic bonding using SOI wafer
  EUROSENSORS 2014 (2014, Pages pages 1 - 4)
  Walter, Vincent | Bourbon, Gilles | Le Moal, Patrice
  
  pdf | bibtex@inproceedings{53f96627-ba43-42e2-b062-c1ae02b92c96, title = {Residual stress in capacitive micromachined ultrasonic transducers fabricated with anaodic bonding using SOI wafer}, author = {Walter, Vincent and Bourbon, Gilles and Le Moal, Patrice}, year = {2014}, booktitle = {EUROSENSORS 2014}, month = {sep}, pages = {1 - 4}, url = {https://publiweb.femto-st.fr/tntnet/entries/8152/documents/author/data} }
• inproceedings - Characterization of capacitive micromachined ultrasonic transducers
  International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP) (2014)
  Lardies, Joseph | Bellaredj, Mohamed | Belgacem, Brahim | Bourbon, Gilles | Le Moal, Patrice | Walter, Vincent
  
  pdf | bibtex@inproceedings{e8cfc138-a901-4d34-88c8-226ca14b02d7, title = {Characterization of capacitive micromachined ultrasonic transducers}, author = {Lardies, Joseph and Bellaredj, Mohamed and Belgacem, Brahim and Bourbon, Gilles and Le Moal, Patrice and Walter, Vincent}, year = {2014}, booktitle = {International Symposium on Design, Test, Integration and Packaging of MEMS / MOEMS (DTIP)}, month = {apr}, url = {https://publiweb.femto-st.fr/tntnet/entries/7159/documents/author/data} }
• misc - Capteur passif et réversible de déformations
  (mar 2014)
  Louvigné, P.F. | Minotti, P. | Vescovo, Paul | Walter, Vincent
  
  bibtex@misc{louvigne_capteur_2012, title = {Capteur passif et r\'eversible de d\'eformations}, author = {Louvign\'e, P.F. and Minotti, P. and Vescovo, P. and Walter, Vincent}, year = {2014}, month = {mar} }
• article - Anodic bonding using SOI wafer for fabrication of capacitive micromachined ultrasoonic transducers
  Journal of Micromechanics and Microengineering (Volume 24, Issue (2), jan 2014, Pages :025009)
  Bellaredj, Mohamed | Bourbon, Gilles | Walter, Vincent | Le Moal, Patrice | Berthillier, Marc
  
  pdf | doi

2012 (1)

• inproceedings - Critical steps in the anodic bonding process for fabrication of CMUTs
  11th International Workshop on Micromachined Ultrasonic Transducers / Tours, France (2012)
  Walter, Vincent | Bourbon, Gilles | Bellaredj, Mohamed | Berthillier, Marc | Le Moal, Patrice
  
  bibtex@inproceedings{walter_critical_2012, title = {Critical steps in the anodic bonding process for fabrication of CMUTs}, author = {Walter, Vincent and Bourbon, Gilles and Bellaredj, Mohamed and Berthillier, Marc and Le Moal, Patrice}, year = {2012}, address = {Tours, France}, booktitle = {11th International Workshop on Micromachined Ultrasonic Transducers}, month = {jun} }