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• Maciej Baranski

Maciej Baranski

Département MN2S
équipe MOSAIC

CNRS

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maciej.baranski [at] femto-st.fr

03.63.08.24.57

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15B avenue des Montboucons
25030 BESANCON cedex

Publications de Maciej Baranski

Voir toutes les publications (32)2023 (1)2022 (1)2019 (3)2016 (1)2015 (6)2014 (10)2013 (2)2012 (6)2011 (1)2010 (1)

2023 (1)

• inproceedings - Phononic microresonators coupled by surface acoustic waves
  2023 DPG-Frühjahrstagung der Sektion Kondensierte Materie (DPG-Frühjahrstagung der Sektion Kondensierte Materie 2023) / Dresden, Germany (2023)
  Benchabane-Gaiffe, Sarah | Baranski, Maciej | Feng, Gao | Gaiffe, Olivier | Soumann, Valérie | Salut, Roland | Khelif, Abdelkrim
  
  bibtex@inproceedings{3f862a08-1128-4491-aed4-ff2e1551714c, title = {Phononic microresonators coupled by surface acoustic waves}, author = {Benchabane-Gaiffe, Sarah and Baranski, Maciej and Feng, Gao and Gaiffe, Olivier and Soumann, Val\'erie and Salut, Roland and Khelif, Abdelkrim}, year = {2023}, address = {Dresden, Germany}, booktitle = {2023 DPG-Fr\"uhjahrstagung der Sektion Kondensierte Materie (DPG-Fr\"uhjahrstagung der Sektion Kondensierte Materie 2023)}, editor = {}, month = {mar} }

2022 (1)

• inproceedings - Linear and nonlinear interactions in surface acoustic wave driven phononic resonators
  4th Workshop on Optomechanics and Brillouin Scattering: Fundamentals, Applications and Technologies (WOMBAT 2022) / Erlanger, Germany (2022)
  Benchabane-Gaiffe, Sarah | Chatellier, Jules | Baranski, Maciej | Raguin, Laëtitia | Gaiffe, Olivier | Salut, Roland | Soumann, Valérie | Jallouli, Aymen | Cote, Jean-Marc | Khelif, Abdelkrim
  
  pdf | bibtex@inproceedings{31786f02-33fc-49ac-889d-73623c39a1d3, title = {Linear and nonlinear interactions in surface acoustic wave driven phononic resonators}, author = {Benchabane-Gaiffe, Sarah and Chatellier, Jules and Baranski, Maciej and Raguin, La\"etitia and Gaiffe, Olivier and Salut, Roland and Soumann, Val\'erie and Jallouli, Aymen and Cote, Jean-Marc and Khelif, Abdelkrim}, year = {2022}, address = {Erlanger, Germany}, booktitle = {4th Workshop on Optomechanics and Brillouin Scattering: Fundamentals, Applications and Technologies (WOMBAT 2022)}, month = {jun}, url = {https://publiweb.femto-st.fr/tntnet/entries/19171/documents/author/data} }

2019 (3)

• article - Microfabrication of axicons by glass blowing at a wafer-level
  Optics Letters (Volume 44, Issue (13), jun 2019, Pages :3282 - 3285)
  Carrion Perez, José Vicente | Albero Silvestre, Jorge | Baranski, Maciej | Gorecki, Christophe | Passilly, Nicolas
  
  doi
• article - Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components
  Micromachines (Volume 10, Issue (3), mar 2019, Pages :185 (22))
  Bargiel, Sylwester | Baranski, Maciej | Wiemer, Maik | Fromel, Jörg | Wang, Wei - Shan | Gorecki, Christophe
  
  pdf | doi
• article - Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE
  Journal of Vacuum Science & Technology B (Volume 37, Issue (2), feb 2019, Pages :021206 (10))
  Herth, Etienne | Baranski, Maciej | Belharet, Djaffar | Edmond, Samson | Bouville, David | Calvet, Laurie E. | Gorecki, Christophe
  
  pdf | doi

2016 (1)

• article - Miniature Schwarzschild objective as a micro-optical component free of main aberrations: Concept, design and first realization with silicon-glass micro-machining
  Applied Optics (Volume 55, Issue (10), mar 2016, Pages :2771 - 2779)
  Baranski, Maciej | Passilly, Nicolas | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe
  
  doi

2015 (6)

• article - Swept source optical coherence tomography endomicroscope based on vertically integrated Mirau micro interferometer: concept and technology
  IEEE Sensors Journal (Volume 15, Issue (12), dec 2015, Pages :7061 - 7070 )
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Froehly, Luc | Baranski, Maciej | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  pdf | doi
• article - Simple method based on intensity measurements for characterization of aberrations from micro-optical components
  Applied Optics (Volume 54, Issue (31), nov 2015, Pages :9060-9064)
  Perrin, Stéphane | Baranski, Maciej | Froehly, Luc | Albero Silvestre, Jorge | Passilly, Nicolas | Gorecki, Christophe
  
  doi
• article - Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems
  Applied Optics (Volume 54, Issue (22), aug 2015, Pages :6924 - 6934)
  Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe | Chenping, Jia | Fromel, Jörg | Wiemer, Maik
  
  pdf | doi
• article - Dense arrays of millimeter-sized glass lenses fabricated at wafer-level
  Optics Express (Volume 23, Issue (9), may 2015, Pages :11702 - 11712)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gauthier-Manuel, Ludovic | Bernard, Florent | Froehly, Luc | Krauter, Johann | Osten, Wolfgang | Gorecki, Christophe
  
  pdf | doi
• article - Impact of mirror spider legs on imaging quality in Mirau micro-interferometry
  Optics Letters (Volume 40, Issue (10), may 2015, Pages :2209 - 2212)
  Lullin, Justine | Perrin, Stéphane | Baranski, Maciej | Bargiel, Sylwester | Froehly, Luc | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  doi
• inproceedings - Technological platform for vertical multi-wafer integration of miniature imaging instruments
  XIV SPIE MOEMS and Miniaturized Systems / San Fransico, CA, United States (Volume 9375, 2015, Pages pages 93750L (8))
  Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik | Fromel, Jörg | Wuensh, D. | Wang, Wei - Shan
  
  doi | bibtex@inproceedings{747812a1-b9a7-4525-81f9-04759782c318, title = {Technological platform for vertical multi-wafer integration of miniature imaging instruments}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik and Fromel, J. and Wuensh, D. and Wang, Wei - Shan}, year = {2015}, address = {San Fransico, CA, United States}, booktitle = {XIV SPIE MOEMS and Miniaturized Systems}, month = {feb}, pages = {93750L (8)}, volume = {9375}, doi = {10.1117/12.2078007}, organization = {SPIE}, publisher = {SPIE} }

2014 (10)

• inproceedings - Topography Measurements of High Gradient and Reflective Micro-structures by Digital Holography
  7th International Workshop on Advanced Optical Imaging and Metrology / Nurthingen, Germany (2014, Pages pages 623 - 628)
  Jozwik, Michal | Kozacki, Tomasz | Lizewski, Kamil | Baranski, Maciej | Gorecki, Christophe
  
  doi | bibtex@inproceedings{a71b1e3f-0634-4b29-9458-6d2564aed403, title = {Topography Measurements of High Gradient and Reflective Micro-structures by Digital Holography}, author = {Jozwik, Michal and Kozacki, Tomasz and Lizewski, Kamil and Baranski, Maciej and Gorecki, Christophe}, year = {2014}, address = {Nurthingen, Germany}, booktitle = {7th International Workshop on Advanced Optical Imaging and Metrology}, editor = {Micha{\l} J\'ozwik, Tomasz Kozacki, Kamil Li\.{z}ewski, Maciej Bara\'nski, Christophe Gorecki}, month = {sep}, pages = {623 - 628}, doi = {10.1007/978-3-642-36359-7_115}, organization = {Fringe 2013}, publisher = {Springer} }
• inproceedings - Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry
  2014 International Conference on Optical MEMS and Nanophotonics (OMN2014) / Glasgow, United Kingdom (Volume , Issue 14682765 , 2014, Pages pages 87 - 88)
  Lullin, Justine | Bargiel, Sylwester | Courjon, Emilie | Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{b7f0ca52-bbea-43d8-8cd0-0a8e1fc1b98a, title = {Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry}, author = {LULLIN, Justine and Bargiel, Sylwester and Courjon, Emilie and PERRIN, St\'ephane and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, address = {Glasgow, United Kingdom}, booktitle = {2014 International Conference on Optical MEMS and Nanophotonics (OMN2014)}, month = {aug}, number = {14682765 }, pages = {87 - 88}, volume = { }, organization = {IEEE}, publisher = {IEEE} }
• inproceedings - Simple setup for optical characterization of microlenses
  Proc. SPIE, Interferometry XVII: Advanced Applications. / San Diego, California, United States. (Volume 9204, 2014, Pages pages 92040D)
  Perrin, Stéphane | Baranski, Maciej | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@inproceedings{9fd85794-795a-458d-a2e8-035b62a490f7, title = {Simple setup for optical characterization of microlenses }, author = {Perrin, St\'ephane and Baranski, Maciej and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {San Diego, California, United States.}, booktitle = {Proc. SPIE, Interferometry XVII: Advanced Applications.}, month = {aug}, pages = {92040D}, volume = {9204}, doi = {doi:10.1117/12.2061299} }
• article - Deep Wet-Etched Silicon Cavities for Micro-Optical Sensors: Influence of Masking on 111 Sidewalls Surface Quality
  Journal of Microelectromechanical Systems (Volume 23, Issue (3), jun 2014, Pages :585 - 591)
  Chutani, Ravinder Kumar | Passilly, Nicolas | Albero Silvestre, Jorge | Baranski, Maciej | Gorecki, Christophe
  
  doi
• article - A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement
  Optics Express (Volume 22, Issue (11), may 2014, Pages :13202 - 132012)
  Baranski, Maciej | Perrin, Stéphane | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi
• inproceedings - Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function
  SPIE Photonics Europe 2014 / Bruxelles, Belgique (Volume 9132, 2014, Pages pages 913216 (1-8) )
  Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@inproceedings{d0f9a0d8-9d21-48aa-b266-ced52d563b76, title = {Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function }, author = {Perrin, St\'ephane and Baranski, Maciej and Passilly, Nicolas and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {Bruxelles, Belgique}, booktitle = {SPIE Photonics Europe 2014}, month = {apr}, pages = {913216 (1-8) }, volume = {9132}, doi = {10.1117/12.2051122} }
• inproceedings - Arrays of millimeter-sized glass lenses for miniature inspection system
  SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014 / Brussels, Belgium (Volume 9130, 2014, Pages pages 91300U)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
  
  doi | bibtex@inproceedings{9f5d4945-f972-40e3-bbab-1e1e96e47c41, title = {Arrays of millimeter-sized glass lenses for miniature inspection system}, author = {Albero Silvestre, Jorge and Perrin, St\'ephane and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gauthier-Manuel, Ludovic and Gorecki, Christophe}, year = {2014}, address = {Brussels, Belgium}, booktitle = {SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014}, month = {apr}, pages = {91300U}, volume = {9130}, doi = {10.1117/12.2051043} }
• misc - Arrays of millimeter-sized glass lenses for miniature inspection systems
  (apr 2014)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
  
  bibtex@misc{87403dab-a526-4686-952c-19f823dd2a36, title = {Arrays of millimeter-sized glass lenses for miniature inspection systems}, author = {Albero Silvestre, Jorge and Perrin, St\'ephane and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gauthier-Manuel, Ludovic and Gorecki, Christophe}, year = {2014}, month = {apr} }
• article - Wafer-level fabrication of micro Cube-typed beam-splitters by saw-dicing of glass substrates
  IEEE Photonics Technology Letters (Volume 26, Issue (1), jan 2014, Pages :100 - 103)
  Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Chenping, Jia | Frömel, Jörg | Wiemer, Maik
  
  doi
• inproceedings - Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners
  (Publisher : Fraunhofer, Volume 9, Issue 1, 2014, Pages pages 128 - 133)
  Wiemer, Maik | Wuensh, D. | Fromel, Jörg | Gessner, Thomas | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{6aff2851-b97b-4782-b529-7f1449e11526, title = {Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners}, author = {Wiemer, Maik and Wuensh, D. and Fromel, J. and Gessner, Thomas and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, editor = {6aff2851-b97b-4782-b529-7f1449e11526-editor.pdf}, month = {jan}, number = {1}, pages = {128 - 133}, volume = {9}, journal = {International Journal of Microwave and Optical Technology}, publisher = {Fraunhofer} }

2013 (2)

• inproceedings - Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate
  17th International Conference on Solid-State Sensors, Actuators and Microsystems / Barcelona, Spain (2013, Pages pages 534 - 537)
  Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Jia, C. | Fromel, Jörg | Wiemer, Maik
  
  doi | bibtex@inproceedings{fbb7b968-f208-465a-b961-9429254f096f, title = {Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Guichardaz, Blandine and Herth, Etienne and Gorecki, Christophe and Jia, C. and Fromel, J. and Wiemer, Maik }, year = {2013}, address = {Barcelona, Spain}, booktitle = {17th International Conference on Solid-State Sensors, Actuators and Microsystems}, month = {jun}, pages = {534 - 537}, doi = {10.1109/Transducers.2013.6626821} }
• inproceedings - 3D micro-optical lens scanner made by multi-wafer bonding technology
  / San Francisco, California, USA (Volume 8616, 2013, Pages pages 861605 (10))
  Bargiel, Sylwester | Gorecki, Christophe | Baranski, Maciej | Passilly, Nicolas | Wiemer, Maik | Jia, C. | Fromel, Jörg
  
  doi | bibtex@inproceedings{e0353c75-a7ca-445e-bb0c-aaadca9f54d3, title = {3D micro-optical lens scanner made by multi-wafer bonding technology}, author = {Bargiel, Sylwester and Gorecki, Christophe and Baranski, Maciej and Passilly, Nicolas and Wiemer, Maik and Jia, C. and Fromel, J.}, year = {2013}, address = {San Francisco, California, USA}, month = {feb}, pages = {861605 (10)}, volume = {8616}, doi = {10.1117/12.2002422}, organization = {Conference on MOEMS and Miniaturized Systems XII}, journal = {Proceedings of SPIE} }

2012 (6)

• inproceedings - Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses
  26th European Conference on Solid-State Transducers, EUROSENSOR 2012 / Krakow, Poland (Volume 47, 2012, Pages pages 1133 - 1136)
  Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  doi | bibtex@inproceedings{fe461fd2-36d5-4ace-b54c-50812fe2907c, title = {Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses}, author = {Bargiel, Sylwester and Jia, C. and Baranski, Maciej and Fr\"omel, J\"org and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, address = {Krakow, Poland}, booktitle = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, month = {nov}, pages = {1133 - 1136}, volume = {47}, doi = {10.1016/j.proeng.2012.09.351}, organization = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• article - Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses
  Procedia Engineering (Volume 47, sep 2012, Pages :1133 – 1136)
  Bargiel, Sylwester | Jia, Minping | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  doi
• inproceedings - Fabrication of 100% fill factor arrays of microlenses from Silicon molds
  Micro-Optics 2012 / Brussels, Belgium (Volume 8428, Issue 84281G, 2012, Pages pages 1 - 7)
  Baranski, Maciej | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  doi | bibtex@inproceedings{93548673-d6ad-4da7-9031-d1f0bc957866, title = {Fabrication of 100% fill factor arrays of microlenses from Silicon molds}, author = {Baranski, Maciej and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2012}, address = {Brussels, Belgium}, booktitle = {Micro-Optics 2012}, month = {jun}, number = {84281G}, pages = {1 - 7}, volume = {8428}, doi = {10.1117/12.921875}, organization = {SPIE , Micro-Optics 2012}, publisher = {SPIE} }
• inproceedings - Bonding and contacting of vertically integrated 3-D microscanners
  IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition / San Jose, CA (2012)
  Wiemer, Maik | Fromel, Jörg | Jia, C. | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{8d6980da-82ca-4b2e-9a2a-883a04c84f52, title = {Bonding and contacting of vertically integrated 3-D microscanners}, author = {Wiemer, Maik and Fromel, J. and Jia, C. and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2012}, address = {San Jose, CA}, booktitle = {IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition}, month = {may} }
• inproceedings - A hierarchic bonding procedure for the assembly of micro confocal microscope
  / Tokyo, Japan (2012, Pages pages 187 - 189)
  Jia, C. | Fromel, Jörg | Gessner, Thomas | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gorecki, Christophe
  
  doi | bibtex@inproceedings{5c047de9-6811-488a-b290-8edaa3e8b816, title = {A hierarchic bonding procedure for the assembly of micro confocal microscope}, author = {Jia, C. and Fromel, J. and Gessner, T. and Bargiel, Sylwester and Passilly, Nicolas and Baranski, Maciej and Gorecki, Christophe}, year = {2012}, address = {Tokyo, Japan}, month = {may}, pages = {187 - 189}, doi = {10.1109/LTB-3D.2012.6238087}, organization = {Low Temperature Bonding for 3D Integration (LTB-3D), 2012 - 3rd IEEE International Workshop on}, publisher = {IEEE} }
• unpublished - Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses ( 2012)
  Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Fromel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  bibtex@unpublished{1450ecbd-824d-4afc-8785-788dec75538c, title = {Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses}, author = {Bargiel, Sylwester and Jia, C. and Baranski, Maciej and Fromel, J. and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, editor = {Eurosensors XXVI} }

2011 (1)

• article - A Numerical Model of Wet Isotropic Etching of Silicon Molds for Microlenses Fabrication
  Journal of The Electrochemical Society (Volume 158, Issue (11), oct 2011, Pages :D681 - D688)
  Baranski, Maciej | Albero Silvestre, Jorge | Kasztelanic, Rafal | Gorecki, Christophe
  
  doi

2010 (1)

• inproceedings - Level set method for microfabrication simulations
  Micro-Optics 2010 / Brussels, Belgium (Publisher : SPIE, Volume 7716, 2010, Pages pages 77161W)
  Baranski, Maciej | Kasztelanic, Rafal | Albero Silvestre, Jorge | Nieradko, Lukasz | Gorecki, Christophe
  
  doi | bibtex@inproceedings{6d970a54-8b8a-4dca-b371-83d9e691ea51, title = {Level set method for microfabrication simulations}, author = {Baranski, Maciej and Kasztelanic, Rafal and Albero Silvestre, Jorge and Nieradko, Lukasz and Gorecki, Christophe}, year = {2010}, address = {Brussels, Belgium}, booktitle = {Micro-Optics 2010}, month = {apr}, pages = {77161W}, volume = {7716}, doi = {10.1117/12.853836}, journal = {Proceedings of SPIE}, publisher = {SPIE} }