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• Samuel Queste

Samuel Queste

Département MN2S

UFC - UFR ST

Courriel :

samuel.queste [at] femto-st.fr

03.81.66.66.47

Adresse :

TEMIS

15B avenue des Montboucons
25030 BESANCON cedex

Publications de Samuel Queste

Voir toutes les publications (23)2024 (1)2023 (2)2022 (3)2019 (1)2012 (3)2011 (4)2010 (8)2009 (1)

2024 (1)

• inproceedings - Studies on He and Ne gas permeation in microfabricated cells using Al2O3 coatings
  37th IEEE European Frequency and Time Forum (EFTF 2024) / Neuchâtel, Switzerland (Volume ~, Issue ~, 2024, Pages pages 1)
  Carlé, Clément | Karvinen, Petri | Keshavarzi, Shervin | Queste, Samuel | Abdel Hafiz, Moustafa | Maurice, Vincent | Boudot, Rodolphe | Passilly, Nicolas
  
  pdf | bibtex@inproceedings{cb4b112b-9012-4c15-848e-9dedc317af62, title = {Studies on He and Ne gas permeation in microfabricated cells using Al2O3 coatings}, author = {Carl\'e, Cl\'ement and Karvinen, Petri and Keshavarzi, Shervin and Queste, Samuel and Abdel Hafiz, Moustafa and Maurice, Vincent and Boudot, Rodolphe and Passilly, Nicolas}, year = {2024}, address = {Neuch\^atel, Switzerland}, booktitle = {37th IEEE European Frequency and Time Forum (EFTF 2024)}, editor = {}, month = {jun}, number = {~}, pages = {1}, url = {https://publiweb.femto-st.fr/tntnet/entries/20346/documents/author/data}, volume = {~} }

2023 (2)

• article - Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices
  Micromachines (Volume 14, Issue (7), jul 2023, Pages :1297 (18))
  Bargiel, Sylwester | Cogan, Julien | Queste, Samuel | Oliveri, Stefania | Gauthier-Manuel, Ludovic | Raschetti, Marina | Beurthey, Stephan | Perrin-Terrin, Mathieu
  
  pdf | doi
• article - Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al2O3 coatings
  Journal of Applied Physics (Volume 133, jun 2023, Pages :214501 (7))
  Carlé, Clément | Keshavarzi, Shervin | Mursa, Andrei | Karvinen, Petri | Chutani, Ravinder Kumar | Bargiel, Sylwester | Queste, Samuel | Vicarini, Rémy | Abbé, Philippe | Abdel Hafiz, Moustafa | Maurice, Vincent | Boudot, Rodolphe | Passilly, Nicolas
  
  pdf | doi

2022 (3)

• article - Wafer-level vapor cells filled with laser-actuated hermetic seals for integrated atomic devices
  Microsystems & Nanoengineering (Volume 8, Issue (129), dec 2022, Pages :13)
  Maurice, Vincent | Carlé, Clément | Keshavarzi, Shervin | Chutani, Ravinder Kumar | Queste, Samuel | Gauthier-Manuel, Ludovic | Cote, Jean-Marc | Vicarini, Rémy | Abdel Hafiz, Moustafa | Boudot, Rodolphe | Passilly, Nicolas
  
  pdf | doi
• inproceedings - Microfabricated alkali vapor cells using local sealing
  2022 INMAQS Technical Workshop (INMAQS 2022) / Talk, United Kingdom (2022)
  Maurice, Vincent | Chutani, Ravinder Kumar | Carlé, Clément | Keshavarzi, Shervin | Queste, Samuel | Gauthier-Manuel, Ludovic | Cote, Jean-Marc | Vicarini, Rémy | Boudot, Rodolphe | Passilly, Nicolas
  
  pdf | bibtex@inproceedings{cdf9ad7a-5100-4f97-a535-3ae67bf9561b, title = {Microfabricated alkali vapor cells using local sealing}, author = {Maurice, Vincent and Chutani, Ravinder Kumar and Carl\'e, Cl\'ement and Keshavarzi, Shervin and Queste, Samuel and Gauthier-Manuel, Ludovic and Cote, Jean-Marc and Vicarini, R\'emy and Boudot, Rodolphe and Passilly, Nicolas}, year = {2022}, address = {Talk, United Kingdom}, booktitle = {2022 INMAQS Technical Workshop (INMAQS 2022)}, month = {sep}, url = {https://publiweb.femto-st.fr/tntnet/entries/19283/documents/author/data} }
• inproceedings - Versatile microfabricated alkali vapor cells using local sealing
  2022 International Frequency Control Symposium-European Frequency (IFCS-EFTF 2022) / Paris, France (2022, Pages pages 2)
  Maurice, Vincent | Chutani, Ravinder Kumar | Carlé, Clément | Keshavarzi, Shervin | Queste, Samuel | Gauthier-Manuel, Ludovic | Cote, Jean-Marc | Vicarini, Rémy | Boudot, Rodolphe | Passilly, Nicolas
  
  pdf | bibtex@inproceedings{305dfdac-175c-459f-acc8-f22f15db1b6a, title = {Versatile microfabricated alkali vapor cells using local sealing}, author = {Maurice, Vincent and Chutani, Ravinder Kumar and Carl\'e, Cl\'ement and Keshavarzi, Shervin and Queste, Samuel and Gauthier-Manuel, Ludovic and Cote, Jean-Marc and Vicarini, R\'emy and Boudot, Rodolphe and Passilly, Nicolas}, year = {2022}, address = {Paris, France}, booktitle = {2022 International Frequency Control Symposium-European Frequency (IFCS-EFTF 2022)}, month = {apr}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/18955/documents/author/data} }

2019 (1)

• inproceedings - New method of monitoring the intrinsic strain during electrochemical deposition process using rosette gauge
  45th International Conference on Micro and Nano Engineering (MNE 2019) / Rhodes, Greece (2019)
  Belharet, Djaffar | Gabrion, Xavier | Courtot, Anthony | Robert, Laurent | Queste, Samuel | Ulliac, Gwenn
  
  bibtex@inproceedings{3457192f-65c6-4191-8eb1-186bbbb6e408, title = {New method of monitoring the intrinsic strain during electrochemical deposition process using rosette gauge }, author = {Belharet, Djaffar and Gabrion, Xavier and Courtot, Anthony and Robert, Laurent and Queste, Samuel and Ulliac, Gwenn}, year = {2019}, address = {Rhodes, Greece}, booktitle = {45th International Conference on Micro and Nano Engineering (MNE 2019)}, month = {sep} }

2012 (3)

• article - Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes
  Microelectronic Engineering (Volume 88, Issue (8), aug 2012, Pages :2679 – 2682)
  Metwally, Khaled Hussein | Queste, Samuel | Robert, Laurent | Salut, Roland | Khan Malek, Chantal
  
  doi
• article - Micro-pillar testing of amorphous silica
  International Journal of Applied Glass Science (Volume 3, Issue (1), mar 2012, Pages :36 - 43)
  Lacroix, Remi | Chomienne, Vincent | Kermouche, Guillaume | Teisseire, Jeremie | Barthel, Etienne | Queste, Samuel
  
  doi
• article - Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination
  Microsystem Technologies (Volume 18, Issue (2), feb 2012, Pages :199 - 207 )
  Metwally, Khaled Hussein | Robert, Laurent | Queste, Samuel | Gauthier-Manuel, Bernard | Khan Malek, Chantal
  
  doi

2011 (4)

• article - Ultra-smooth LiNbO3 micro and nano structures for photonic applications
  Microelectronic Engineering (Volume 88, Issue (8), aug 2011, Pages :2417 - 2419)
  Ulliac, Gwenn | Edouard Guichardaz, Blandine | Rauch, Jean-Yves | Queste, Samuel | Benchabane-Gaiffe, Sarah | Courjal, Nadège
  
  pdf | doi
• article - Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes
  Microelectronic Engineering (Volume 88, Issue (8), aug 2011, Pages :2679 - 2682)
  Metwally, Khaled Hussein | Queste, Samuel | Robert, Laurent | Salut, Roland | Khan Malek, Chantal
  
  doi
• article - Injection Moulding Using an Exchangeable Si Mould Insert
  Micro and Nanosystems (Volume 3, Issue (3), aug 2011, Pages :230 - 235)
  Singh, Akanksha | Metwally, Khaled Hussein | Michel, Gérard | Queste, Samuel | Robert, Laurent | Khan Malek, Chantal
  
• inproceedings - Dry etching of single crystal PMN-PT piezoelectric material.
  Micro Electro Mechanical Systems. / Cancun, Mexique (Volume sur CD ROM, 2011, Pages pages 237-240)
  Agnus, Joel | Ivan, Ioan Alexandru | Queste, Samuel
  
  pdf | bibtex@inproceedings{agnus:hal-00566569, title = {Dry etching of single crystal PMN-PT piezoelectric material.}, author = {Agnus, Jo\"el and IVAN, Ioan Alexandru and Queste, Samuel}, year = {2011}, address = {Cancun, Mexique}, booktitle = {Micro Electro Mechanical Systems.}, editor = {24th International Conference on Micro Electro Mechanical Systems, MEMS'11}, pages = {237-240}, url = {https://publiweb.femto-st.fr/tntnet/entries/1418/documents/author/data}, volume = {sur CD ROM} }

2010 (8)

• inproceedings - Micro-injection Moulding using an Exchangeable Microstructured Si Mould Insert
  Proceedings of the 7th International Conference on Multi-Material Micro Manufacture (4M 2010) / Bourg en Bresse and Oyonnax, France (2010, Pages pages doi:10.3850/978-981-08-6555-9_171)
  Singh, Akanksha | Michel, Gérard | Queste, Samuel | Robert, Laurent | Gauthier-Manuel, Bernard | Khan Malek, Chantal
  
  doi | bibtex@inproceedings{9f8e47cf-68c4-43ce-80ba-6709aef30f18, title = {Micro-injection Moulding using an Exchangeable Microstructured Si Mould Insert}, author = {Singh, Akanksha and Michel, G\'erard and Queste, Samuel and Robert, Laurent and Gauthier-Manuel, Bernard and Khan-Malek, Chantal}, year = {2010}, address = {Bourg en Bresse and Oyonnax, France}, booktitle = {Proceedings of the 7th International Conference on Multi-Material Micro Manufacture (4M 2010)}, editor = {Bertrand Fillon, Chantal Khan-Malek, Stefan Dimov}, month = {nov}, pages = {doi:10.3850/978-981-08-6555-9_171}, doi = {10.3850/978-981-08-6555-9_171}, organization = {4M Association}, publisher = {Research Publishing} }
• inproceedings - Temperature compensated radio-frequency harmonic bulk acoustic resonators pressure sensors
  Ultrasonics Symposium (IUS), 2010 IEEE / San Diego, CA (2010, Pages pages 2040 - 2043 )
  Baron, Thomas | Lebrasseur, Eric | Romand, Jean-Pierre | Alzuaga, Sébastien | Queste, Samuel | Martin, Gilles | Gachon, Dorian | Laroche, Thierry | Ballandras, Sylvain | Masson, Jérémy
  
  pdf | doi | bibtex@inproceedings{baron:hal-00578213, title = {Temperature compensated radio-frequency harmonic bulk acoustic resonators pressure sensors }, author = {Baron, Thomas and Lebrasseur, \'Eric and Romand, Jean-Pierre and Alzuaga, S\'ebastien and Queste, Samuel and Martin, Gilles and Gachon, Dorian and Laroche, Thierry and Ballandras, Sylvain and Masson, J\'er\'emy}, year = {2010}, address = {San Diego, CA}, booktitle = {Ultrasonics Symposium (IUS), 2010 IEEE }, month = {oct}, pages = {2040 - 2043 }, url = {http://hal.archives-ouvertes.fr/hal-00578213}, doi = {10.1109/ULTSYM.2010.5935869} }
• inproceedings - Nouvelles techniques de micro et nano fabrication sur niobate de lithium pour des applications photoniques
  29ème Journées Nationales d'Optique Guidée (JNOG 2010) / Besançon, France (2010, Pages pages 61-63)
  Ulliac, Gwenn | Edouard Guichardaz, Blandine | Rauch, Jean-Yves | Queste, Samuel | Courjal, Nadège
  
  bibtex@inproceedings{eaf6a88a-af8a-4851-a6b8-848a1319508a, title = {Nouvelles techniques de micro et nano fabrication sur niobate de lithium pour des applications photoniques}, author = {Ulliac, Gwenn and Edouard Guichardaz, Blandine and Rauch, Jean-Yves and Queste, Samuel and Courjal, Nad\`ege}, year = {2010}, address = {Besan\c{c}on, France}, booktitle = {29\`eme Journ\'ees Nationales d'Optique Guid\'ee (JNOG 2010)}, month = {oct}, pages = {61-63} }
• inproceedings - Ultra-smooth LiNbO3 micro and nano structures for photonic applications
  Proceedings of the 36th International Conference on Micro- and Nano-Engineering (MNE) 2010 / Gênes, Italie. (Volume 88, Issue 8, 2010, Pages pages 2417 - 2419)
  Ulliac, Gwenn | Edouard Guichardaz, Blandine | Rauch, Jean-Yves | Queste, Samuel | Benchabane-Gaiffe, Sarah | Courjal, Nadège
  
  pdf | doi | bibtex@inproceedings{15a62b4d-43a1-48c8-82eb-ef9f2c086735, title = {Ultra-smooth LiNbO3 micro and nano structures for photonic applications}, author = {Ulliac, Gwenn and Guichardaz, Blandine and Rauch, Jean-Yves and Queste, Samuel and Benchabane, Sarah and Courjal, Nad\`ege}, year = {2010}, address = {G\^enes, Italie.}, booktitle = {Proceedings of the 36th International Conference on Micro- and Nano-Engineering (MNE) 2010}, month = {sep}, number = {8}, pages = {2417 - 2419}, url = {https://publiweb.femto-st.fr/tntnet/entries/6327/documents/author/data}, volume = {88}, doi = {10.1016/j.mee.2011.02.024} }
• article - Manufacture of microfluidic glass chips by deep plasma etching, femtosecond laser ablation, and anodic bonding
  Microsystem Technologies (Volume 16, Issue (8 - 9), aug 2010, Pages :1485 - 1493)
  Queste, Samuel | Salut, Roland | Clatot, Stanislas | Rauch, Jean-Yves | Khan Malek, Chantal
  
  pdf | doi
• inproceedings - LiNbO3 Film Bulk Acoustic Resonator
  IEEE International Frequency Control Symposium / New Port Beach, USA (2010, Pages pages 661 - 664)
  Pijolat, M. | Loubriat, S. | Mercier, David | Reinhardt, Alexandre | Defay, Emmanuel | Deguet, C. | Aïd, M. | Queste, Samuel | Ballandras, Sylvain
  
  pdf | doi | bibtex@inproceedings{pijolat:hal-00589215, title = {LiNbO3 Film Bulk Acoustic Resonator}, author = {Pijolat, M. and Loubriat, S. and Mercier, David and Reinhardt, Alexandre and Defay, Emmanuel and Deguet, C. and Aid, M. and Queste, Samuel and Ballandras, Sylvain}, year = {2010}, address = {New Port Beach, USA}, booktitle = {IEEE International Frequency Control Symposium}, month = {jun}, pages = {661 - 664}, url = {http://hal.archives-ouvertes.fr/hal-00589215}, doi = {10.1109/FREQ.2010.5556245} }
• inproceedings - SAW pressure sensor on quartz membrane lapping
  10ème Congrès Français d'Acoustique (CFA 2010) / Lyon, France (2010)
  Baron, Thomas | Hermelin, Damien | Romand, Jean-Pierre | Alzuaga, Sébastien | Queste, Samuel | Rauch, Jean-Yves | Leguen, Jean-François | Belgacem, Brahim | Ballandras, Sylvain
  
  bibtex@inproceedings{9e210333-91ce-4629-9dd6-61b0bd8f1776, title = {SAW pressure sensor on quartz membrane lapping }, author = {Baron, Thomas and Hermelin, Damien and Romand, Jean-Pierre and Alzuaga, S\'ebastien and Queste, Samuel and Rauch, Jean-Yves and Leguen, Jean-Fran\c{c}ois and Belgacem, Brahim and Ballandras, Sylvain}, year = {2010}, address = {Lyon, France}, booktitle = {10\`eme Congr\`es Fran\c{c}ais d'Acoustique (CFA 2010)}, month = {apr} }
• inproceedings - Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators
  JNTE 2010 / Palaiseau, France (2010)
  Baron, Thomas | Lebrasseur, Eric | Hermelin, Damien | Gachon, Dorian | Alzuaga, Sébastien | Martin, Gilles | Rabus, David | Edouard Guichardaz, Blandine | Soumann, Valérie | Queste, Samuel | Salut, Roland | Ballandras, Sylvain
  
  pdf | bibtex@inproceedings{baron:hal-00534061, title = {Development of Composite Single Crystal Wafers for Sources and Sensor applications exploiting High-overtone Bulk Acoustic Resonators}, author = {Baron, Thomas and Lebrasseur, \'Eric and Hermelin, Damien and Gachon, Dorian and Alzuaga, S\'ebastien and Martin, Gilles and Rabus, David and Guichardaz, Blandine and P\'etrini, Val\'erie and Queste, Samuel and Salut, Roland and Ballandras, Sylvain}, year = {2010}, address = {Palaiseau, France}, booktitle = {JNTE 2010}, month = {Nov}, url = {http://hal.archives-ouvertes.fr/hal-00534061} }

2009 (1)

• inproceedings - An acoustic waveguide using doubly-bonded silicon/thinned PPT/silicon structures for RF applications
  Ultrasonics Symposium (IUS), 2009 IEEE International / Rome, Italie (2009, Pages pages 923 - 926)
  Bassignot, Florent | Courjon, Emilie | Ulliac, Gwenn | Laroche, Thierry | Garcia, Julien | Queste, Samuel | Romand, Jean-Pierre | Ballandras, Sylvain | Petit, R.
  
  pdf | doi | bibtex@inproceedings{bassignot:hal-00485700, title = {An acoustic waveguide using doubly-bonded silicon/thinned PPT/silicon structures for RF applications}, author = {Bassignot, Florent and Courjon, Emilie and Ulliac, Gwenn and Laroche, Thierry and Garcia, Julien and Queste, Samuel and Romand, Jean-Pierre and Ballandras, Sylvain and Petit, R.}, year = {2009}, address = {Rome, Italie}, booktitle = {Ultrasonics Symposium (IUS), 2009 IEEE International}, month = {sep}, pages = {923 - 926}, url = {http://hal.archives-ouvertes.fr/hal-00485700}, doi = {10.1109/ULTSYM.2009.5441895} }