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• Sylwester Bargiel

Sylwester Bargiel

Département MN2S

UFC - UFR ST

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sylwester.bargiel [at] femto-st.fr

03 81 66 63 02

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15B avenue des Montboucons
25030 BESANCON cedex

Publications de Sylwester Bargiel

Voir toutes les publications (76)2023 (3)2022 (1)2021 (4)2020 (5)2019 (4)2018 (4)2017 (6)2016 (7)2015 (10)2014 (9)2013 (2)2012 (7)2011 (5)2010 (9)

2023 (3)

• article - Comparison of Anodic and Au-Au Thermocompression Si-Wafer Bonding Methods for High-Pressure Microcooling Devices
  Micromachines (Volume 14, Issue (7), jul 2023, Pages :1297 (18))
  Bargiel, Sylwester | Cogan, Julien | Queste, Samuel | Oliveri, Stefania | Gauthier-Manuel, Ludovic | Raschetti, Marina | Beurthey, Stephan | Perrin-Terrin, Mathieu
  
  pdf | doi
• article - Reduction of helium permeation in microfabricated cells using aluminosilicate glass substrates and Al2O3 coatings
  Journal of Applied Physics (Volume 133, jun 2023, Pages :214501 (7))
  Carlé, Clément | Keshavarzi, Shervin | Mursa, Andrei | Karvinen, Petri | Chutani, Ravinder Kumar | Bargiel, Sylwester | Queste, Samuel | Vicarini, Rémy | Abbé, Philippe | Abdel Hafiz, Moustafa | Maurice, Vincent | Boudot, Rodolphe | Passilly, Nicolas
  
  pdf | doi
• inproceedings - Mitigation of He permeation in microfabricated vapor cells with alumino-silicate glass and Al2O3 coatings
  2023 International Frequency Control Symposium-European Frequency (IFCS-EFTF 2023) / Toyama, Japan (2023, Pages pages 2)
  Carlé, Clément | Keshavarzi, Shervin | Mursa, Andrei | Karvinen, Petri | Chutani, Ravinder Kumar | Bargiel, Sylwester | Vicarini, Rémy | Abbé, Philippe | Abdel Hafiz, Moustafa | Maurice, Vincent | Boudot, Rodolphe | Passilly, Nicolas
  
  pdf | bibtex@inproceedings{4ab88a11-0dbf-4957-9fa7-0a88243da144, title = {Mitigation of He permeation in microfabricated vapor cells with alumino-silicate glass and Al2O3 coatings}, author = {Carl\'e, Cl\'ement and Keshavarzi, Shervin and Mursa, Andrei and Karvinen, Petri and Chutani, Ravinder Kumar and Bargiel, Sylwester and Vicarini, R\'emy and Abb\'e, Philippe and Abdel Hafiz, Moustafa and Maurice, Vincent and Boudot, Rodolphe and Passilly, Nicolas}, year = {2023}, address = {Toyama, Japan}, booktitle = {2023 International Frequency Control Symposium-European Frequency (IFCS-EFTF 2023)}, editor = {}, month = {may}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/19702/documents/author/data} }

2022 (1)

• article - High-fidelity glass micro-axicons fabricated by laser-assisted wet etching
  Optics Express (Volume 30, Issue (3), jan 2022, Pages :3749-3759)
  Skora, Jean-Loup | Gaiffe, Olivier | Bargiel, Sylwester | Cote, Jean-Marc | Tavernier, Laurent | De Labachelerie, Michel | Passilly, Nicolas
  
  pdf | doi

2021 (4)

• inproceedings - Micro-Optical Components Manufactured in Glass by Femtosecond Laser Irradiation Followed by Chemical Etching
  2021 International Symposium on Optomechatronic Technology (ISOT 2021) / Besançon, France (2021)
  Skora, Jean-Loup | Gaiffe, Olivier | Bargiel, Sylwester | Tavernier, Laurent | De Labachelerie, Michel | Passilly, Nicolas
  
  pdf | bibtex@inproceedings{618fcdfb-a833-4b60-a0bc-45a6f6247e16, title = {Micro-Optical Components Manufactured in Glass by Femtosecond Laser Irradiation Followed by Chemical Etching}, author = {Skora, Jean-Loup and Gaiffe, Olivier and Bargiel, Sylwester and Tavernier, Laurent and De Labachelerie, Michel and Passilly, Nicolas}, year = {2021}, address = {Besan\c{c}on, France}, booktitle = {2021 International Symposium on Optomechatronic Technology (ISOT 2021)}, month = {nov}, url = {https://publiweb.femto-st.fr/tntnet/entries/18550/documents/author/data} }
• inproceedings - 3-D micro-assembly approach to fabrication of a scanning MOEMS-based endoscopic probe for Optical Coherence Tomography imaging
  2021 International Symposium on Optomechatronic Technology (ISOT 2021) / Besançon, France (2021)
  Bargiel, Sylwester | Garcia Ramirez, Fernando Eleazar | Skora, Jean-Loup | Tanguy, Quentin | Gaiffe, Olivier | Lutz, Philippe | Cote, Jean-Marc | Gorecki, Christophe
  
  bibtex@inproceedings{fc946885-02f4-4f8b-ac12-f407880770e7, title = {3-D micro-assembly approach to fabrication of a scanning MOEMS-based endoscopic probe for Optical Coherence Tomography imaging}, author = {Bargiel, Sylwester and Garcia Ramirez, Fernando Eleazar and Skora, Jean-Loup and Tanguy, Quentin and Gaiffe, Olivier and Lutz, Philippe and Cote, Jean-Marc and Gorecki, Christophe}, year = {2021}, address = {Besan\c{c}on, France}, booktitle = {2021 International Symposium on Optomechatronic Technology (ISOT 2021)}, month = {nov} }
• article - Galenic Lab-on-a-Chip concept for lipid nanocapsules production
  Nanoscale (Volume 13, Issue (27), jun 2021, Pages :11899 - 11912)
  Rolley, Nicolas | Bonnin, Marie | Lefebvre, Guillaume | Verron, Sylvain | Bargiel, Sylwester | Robert, Laurent | Riou, Jérémie | Simonsson, Carl | Bizien, Thomas | Gimel, Jean-Christophe | Benoit, Jean-Pierre | Brotons, Guillaume | Calvignac, Brice
  
  pdf | doi
• article - MEMS Scanning Mirrors for Optical Coherence Tomography
  Photonics (Volume 8, Issue (6), jan 2021, Pages :8010006 (25))
  Gorecki, Christophe | Bargiel, Sylwester
  
  pdf | doi

2020 (5)

• article - Phononic Coupled-Resonator Waveguide Micro-Cavities
  Applied Sciences-Basel (Volume 10, Issue (19), sep 2020, Pages :6751 (9))
  Wang, Tingting | Bargiel, Sylwester | Lardet-Vieudrin, Franck | Wang, Yan-Feng | Wang, Yue - Sheng | Laude, Vincent
  
  pdf | doi
• inproceedings - Design and Simulation of XZ MEMS Micropositioning with 3D-Complex Structure
  2020 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2020) / Lyon, France (2020, Pages pages 5)
  Suthisomboon, Tachadol | Bargiel, Sylwester | Rabenorosoa, Kanty | Eakkachai, Pengwang
  
  pdf | doi | bibtex@inproceedings{ee670e63-741e-475b-83e3-0ff4e51e4cab, title = {Design and Simulation of XZ MEMS Micropositioning with 3D-Complex Structure}, author = {Suthisomboon, Tachadol and Bargiel, Sylwester and Rabenorosoa, Kanty and Eakkachai, Pengwang}, year = {2020}, address = {Lyon, France}, booktitle = {2020 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2020)}, editor = {ee670e63-741e-475b-83e3-0ff4e51e4cab-editor.pdf}, month = {jun}, pages = {5}, url = {https://publiweb.femto-st.fr/tntnet/entries/16844/documents/author/data}, doi = {10.1109/DTIP51112.2020.9139150} }
• inproceedings - Characterization of an integrated MOEMS scanning probe towards real-time Lissajous-based SS-OCT imaging for endoscopic applications
  2020 OSA Biophotonics Congress: Biomedical Optics (2020) / Online (Electronic Conference), Online (Electronic Conference) (2020, Pages pages OTu4E.5 (2))
  Garcia Ramirez, Fernando Eleazar | Bargiel, Sylwester | Gaiffe, Olivier | Tanguy, Quentin | Struk, Przemyslaw | Cote, Jean-Marc | Passilly, Nicolas | Lutz, Philippe | Gorecki, Christophe | Xie, Huikai
  
  doi | bibtex@inproceedings{2a40f2dd-6d62-4c0e-b5ed-c8bf62fecec3, title = {Characterization of an integrated MOEMS scanning probe towards real-time Lissajous-based SS-OCT imaging for endoscopic applications}, author = {Garcia Ramirez, Fernando Eleazar and Bargiel, Sylwester and Gaiffe, Olivier and Tanguy, Quentin and Struk, Przemyslaw and Cote, Jean-Marc and Passilly, Nicolas and Lutz, Philippe and Gorecki, Christophe and Xie, Huikai}, year = {2020}, address = {Online (Electronic Conference), Online (Electronic Conference)}, booktitle = {2020 OSA Biophotonics Congress: Biomedical Optics (2020)}, month = {apr}, pages = {OTu4E.5 (2)}, doi = {10.1364/OCT.2020.OTu4E.5} }
• article - Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation
  Optics Express (Volume 28, Issue (6), mar 2020, Pages :8512 - 8527)
  Tanguy, Quentin | Gaiffe, Olivier | Passilly, Nicolas | Cote, Jean-Marc | Cabodevila, Gonzalo | Bargiel, Sylwester | Lutz, Philippe | Xie, Huikai | Gorecki, Christophe
  
  doi
• article - Collective Resonances of a Chain of Coupled Phononic Microresonators
  Physical Review Applied (Volume 13, Issue (1), jan 2020, Pages :014022 (10))
  Wang, Tingting | Bargiel, Sylwester | Lardet-Vieudrin, Franck | Wang, Yan-Feng | Wang, Yue - Sheng | Laude, Vincent
  
  pdf | doi

2019 (4)

• article - Technological Platform for Vertical Multi-Wafer Integration of Microscanners and Micro-Optical Components
  Micromachines (Volume 10, Issue (3), mar 2019, Pages :185 (22))
  Bargiel, Sylwester | Baranski, Maciej | Wiemer, Maik | Fromel, Jörg | Wang, Wei - Shan | Gorecki, Christophe
  
  pdf | doi
• inproceedings - Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks
  2019 SPIE OPTO (SPIE OPTO 2019) / San Francisco, United States (Volume 10934, 2019, Pages pages 109342F)
  Gorecki, Christophe | Maurice, Vincent | Boudot, Rodolphe | Bargiel, Sylwester | Passilly, Nicolas | Chutani, Ravinder Kumar | Vicarini, Rémy | Galliou, Serge
  
  bibtex@inproceedings{59aa28e0-79d9-43ff-af0e-9eab97c7e04d, title = {Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks}, author = {Gorecki, Christophe and Maurice, Vincent and Boudot, Rodolphe and Bargiel, Sylwester and Passilly, Nicolas and Chutani, Ravinder Kumar and Vicarini, R\'emy and Galliou, Serge}, year = {2019}, address = {San Francisco, United States}, booktitle = {2019 SPIE OPTO (SPIE OPTO 2019)}, month = {mar}, pages = {109342F}, volume = {10934} }
• article - Micromachined phase-shifted array-type Mirau interferometer for swept-source OCT imaging: design, microfabrication and experimental validation
  Biomedical optics express (Volume 10, Issue (3), feb 2019, Pages :1111 - 1125)
  Gorecki, Christophe | Lullin, Justine | Perrin, Stéphane | Bargiel, Sylwester | Albero Silvestre, Jorge | Gaiffe, Olivier | Rutkowski, Jaroslaw | Cote, Jean-Marc | Krauter, Johann | Osten, Wolfgang | Wang, Wei - Shan | Wiemer, Maik | Froemel, Joerg
  
  doi
• article - An Optical Diffuse Reflectance Model for the Characterization of a Si Wafer with an Evaporated SiO2 Layer
  Sensors (Volume 19, Issue (4), feb 2019, Pages :6)
  Bargiel, Sylwester | Andrieux, Aurore | Gorecki, Christophe | Zarzycki, Artur | Galeano Zea, July Andrea
  
  doi

2018 (4)

• article - Swept-source optical coherence tomography microsystem with an integrated Mirau interferometer and electrothermal micro-scanner
  Optics Letters (Volume 43, Issue (19), oct 2018, Pages :4847-4850)
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Tanguy, Quentin | Garcia Ramirez, Fernando Eleazar | Passilly, Nicolas | Lutz, Philippe | Gaiffe, Olivier | Xie, H. | Gorecki, Christophe
  
  pdf | doi
• inproceedings - Design and microfabrication of a Microscale-Stirling Engine (M-SE) for low temperature heat recovery
  8ème Journées Nationales sur la Récupération et le Stockage d'Energie (JNRSE 2018) / Besançon, France (2018, Pages pages 39 - 40)
  Diallo, Alpha Dassimou | Chutani, Ravinder Kumar | Barthes, Magali | Bégot, Sylvie | Bargiel, Sylwester | De Labachelerie, Michel | Lanzetta, François
  
  pdf | bibtex@inproceedings{31a12a47-2ac2-4a6f-94f6-57a79bd360e2, title = {Design and microfabrication of a Microscale-Stirling Engine (M-SE) for low temperature heat recovery}, author = {Diallo, Alpha Dassimou and Chutani, Ravinder Kumar and Barthes, Magali and B\'egot, Sylvie and Bargiel, Sylwester and De Labachelerie, Michel and Lanzetta, Fran\c{c}ois}, year = {2018}, address = {Besan\c{c}on, France}, booktitle = {8\`eme Journ\'ees Nationales sur la R\'ecup\'eration et le Stockage d'Energie (JNRSE 2018)}, month = {may}, pages = {39 - 40}, url = {https://publiweb.femto-st.fr/tntnet/entries/14921/documents/author/data}, organization = {Journ\'ees nationales sur la r\'ecup\'eration et le stockage d'\'energie ( JNRSE )} }
• inproceedings - Miniature Cs vapor cells and atomic clocks in FEMTO-ST
  European Frequency and Time Forum (2018) / Turin, Italy (2018, Pages pages 1)
  Vicarini, Rémy | Maurice, Vincent | Abdel Hafiz, Moustafa | Chutani, Ravinder Kumar | Bargiel, Sylwester | Galliou, Serge | Passilly, Nicolas | Gorecki, Christophe | Boudot, Rodolphe
  
  pdf | bibtex@inproceedings{0565983f-6cb8-4029-bf24-3d8a8758479d, title = {Miniature Cs vapor cells and atomic clocks in FEMTO-ST}, author = {Vicarini, R\'emy and Maurice, Vincent and Abdel Hafiz, Moustafa and Chutani, Ravinder Kumar and Bargiel, Sylwester and Galliou, Serge and Passilly, Nicolas and Gorecki, Christophe and Boudot, Rodolphe}, year = {2018}, address = {Turin, Italy}, booktitle = {European Frequency and Time Forum (2018)}, month = {apr}, pages = {1}, url = {https://publiweb.femto-st.fr/tntnet/entries/15285/documents/author/data} }
• inproceedings - The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection
  SPIE Photonics Europe (2018) / Strasbourg, France (Volume 10678, Issue VII, 2018, Pages pages 5)
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Tanguy, Quentin | Gorecki, Christophe
  
  doi | bibtex@inproceedings{e4f80435-6386-423b-89dd-b430529ecb29, title = {The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection}, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Tanguy, Quentin and Gorecki, Christophe}, year = {2018}, address = {Strasbourg, France}, booktitle = {SPIE Photonics Europe (2018)}, month = {apr}, number = {VII}, pages = {5}, volume = {10678}, doi = {10.1117/12.2311298}, journal = {Proceedings of SPIE} }

2017 (6)

• inproceedings - Miniature Cs vapor cells and atomic clocks in FEMTO-ST
  Workshop Miniature Atomic Clocks ( 2017) / Strathclyde, United Kingdom (2017, Pages pages 1)
  Boudot, Rodolphe | Passilly, Nicolas | Maurice, Vincent | Vicarini, Rémy | Rutkowski, Jaroslaw | Abdel Hafiz, Moustafa | Bargiel, Sylwester | Galliou, Serge | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{7b2aa586-04b9-4636-9bda-83cb859d63d8, title = {Miniature Cs vapor cells and atomic clocks in FEMTO-ST}, author = {Boudot, Rodolphe and Passilly, Nicolas and Maurice, Vincent and Vicarini, R\'emy and Rutkowski, Jaroslaw and Abdel Hafiz, Moustafa and Bargiel, Sylwester and Galliou, Serge and Gorecki, Christophe}, year = {2017}, address = {Strathclyde, United Kingdom}, booktitle = {Workshop Miniature Atomic Clocks ( 2017)}, month = {nov}, pages = {1}, url = {https://publiweb.femto-st.fr/tntnet/entries/14253/documents/author/data} }
• inproceedings - Endomicroscope for Gastrointestinal Cancer Detection: Concept and Preliminary Results
  Surgetica (2017) / Strasbourg, France (2017, Pages pages 1 - 3)
  Chikhaoui, Mohamed Taha | Ourak, Mouloud | Tanguy, Quentin | Struk, Przemyslaw Piotr | Rabenorosoa, Kanty | Bargiel, Sylwester | Tamadazte, Brahim | Passilly, Nicolas | Gaiffe, Olivier | Froehly, Luc | Gorecki, Christophe | Lutz, Philippe | Andreff, Nicolas
  
  pdf | bibtex@inproceedings{e24dda5f-4f27-4b2b-adbd-493486093a7f, title = {Endomicroscope for Gastrointestinal Cancer Detection: Concept and Preliminary Results}, author = {Chikhaoui, Mohamed Taha and Ourak, Mouloud and Tanguy, Quentin and Struk, Przemyslaw Piotr and Rabenorosoa, Kanty and Bargiel, Sylwester and Tamadazte, Brahim and Passilly, Nicolas and Gaiffe, Olivier and Froehly, Luc and Gorecki, Christophe and Lutz, Philippe and Andreff, Nicolas}, year = {2017}, address = {Strasbourg, France}, booktitle = {Surgetica (2017)}, month = {nov}, pages = {1 - 3}, url = {https://publiweb.femto-st.fr/tntnet/entries/14294/documents/author/data}, organization = {Surgetica 2017} }
• inproceedings - Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispenser
  European Frequency and Time Forum joint with International Frequency Control Symposium (2017) / Orlando, United States (2017, Pages pages 636 - 637)
  Maurice, Vincent | Rutkowski, Jaroslaw | Kroemer, Eric | Bargiel, Sylwester | Passilly, Nicolas | Boudot, Rodolphe | Chutani, Ravinder Kumar | Galliou, Serge | Gorecki, Christophe | Mauri, Luca | Moraja, Marco
  
  pdf | doi | bibtex@inproceedings{527c1b70-fb4b-4903-9f7f-eb4f5a6be5c6, title = {Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispenser}, author = {Maurice, Vincent and Rutkowski, Jaroslaw and Kroemer, Eric and Bargiel, Sylwester and Passilly, Nicolas and Boudot, Rodolphe and Chutani, Ravinder Kumar and Galliou, Serge and Gorecki, Christophe and Mauri, Luca and Moraja, Marco}, year = {2017}, address = {Orlando, United States}, booktitle = {European Frequency and Time Forum joint with International Frequency Control Symposium (2017)}, month = {jul}, pages = {636 - 637}, url = {https://publiweb.femto-st.fr/tntnet/entries/14150/documents/author/data}, doi = {10.1109/FCS.2017.8088984}, organization = {IEEE International Ultrasonics Symposium (IUS)} }
• inproceedings - Ramsey-CPT spectroscopy in buffer-gas filled Cs vapor micro-fabricated cells
  2017 International Frequency Control Symposium and European Frequency and Time Forum (IFCS-EFTF 2017) / Besançon, France (2017, Pages pages 2)
  Boudot, Rodolphe | Maurice, Vincent | Kroemer, Eric | Rutkowski, Jaroslaw | Abdel Hafiz, Moustafa | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{78f3322a-0784-4739-a58e-b1e92f9503b5, title = {Ramsey-CPT spectroscopy in buffer-gas filled Cs vapor micro-fabricated cells}, author = {Boudot, Rodolphe and Maurice, Vincent and Kroemer, Eric and Rutkowski, Jaroslaw and Abdel Hafiz, Moustafa and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe}, year = {2017}, address = {Besan\c{c}on, France}, booktitle = {2017 International Frequency Control Symposium and European Frequency and Time Forum (IFCS-EFTF 2017)}, month = {jul}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/14248/documents/author/data} }
• article - Design and Fabrication of a 2-Axis Electrothermal MEMS Micro-Scanner for Optical Coherence Tomography
  Micromachines (Volume 8, Issue (5), may 2017, Pages :146 (11))
  Tanguy, Quentin | Bargiel, Sylwester | Xie, Huikai | Passilly, Nicolas | Barthes, Magali | Gaiffe, Olivier | Rutkowski, Jaroslaw | Lutz, Philippe | Gorecki, Christophe
  
  doi
• article - Microfabricated vapor cells filled with a cesium dispensing paste for miniature atomic clocks
  Applied Physics Letters (Volume 110, Issue (16), apr 2017, Pages :164103 (5))
  Maurice, Vincent | Rutkowski, Jaroslaw | Kroemer, Eric | Bargiel, Sylwester | Passilly, Nicolas | Boudot, Rodolphe | Gorecki, Christophe | Mauri, Luca | Moraja, Marco
  
  doi

2016 (7)

• inproceedings - Matrice d'interféromètres de Mirau micro-fabriqués comme composant d'un dispositif OCT plein-champ multicanaux
  36ème Journées Nationales d'Optique Guidée (JNOG 2016) / Bordeaux, France (Volume P165, 2016, Pages pages 405 - 406)
  Passilly, Nicolas | Perrin, Stéphane | Froehly, Luc | Bargiel, Sylwester | Gaiffe, Olivier | Lullin, Justine | Albero Silvestre, Jorge | Gorecki, Christophe
  
  bibtex@inproceedings{0058a09c-ce45-4e33-a7a7-1cc575b98968, title = {Matrice d'interf\'erom\`etres de Mirau micro-fabriqu\'es comme composant d'un dispositif OCT plein-champ multicanaux}, author = {Passilly, Nicolas and Perrin, St\'ephane and Froehly, Luc and Bargiel, Sylwester and Gaiffe, Olivier and Lullin, Justine and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2016}, address = {Bordeaux, France}, booktitle = {36\`eme Journ\'ees Nationales d'Optique Guid\'ee (JNOG 2016)}, month = {jul}, pages = {405 - 406}, volume = {P165} }
• inproceedings - Wafer-level fabrication of arrays of glass lens doublets
  SPIE Micro-Optics (2016) / Brussels, Belgium (Volume 9888, 2016, Pages pages 98880T (8))
  Passilly, Nicolas | Perrin, Stéphane | Albero Silvestre, Jorge | Krauter, Johann | Gaiffe, Olivier | Gauthier-Manuel, Ludovic | Froehly, Luc | Lullin, Justine | Bargiel, Sylwester | Osten, Wolfgang | Gorecki, Christophe
  
  doi | bibtex@inproceedings{01667c72-9e2b-4bf1-a8d2-232f70a9b532, title = {Wafer-level fabrication of arrays of glass lens doublets}, author = {Passilly, Nicolas and Perrin, St\'ephane and Albero Silvestre, Jorge and Krauter, Johann and Gaiffe, Olivier and Gauthier-Manuel, Ludovic and Froehly, Luc and Lullin, Justine and Bargiel, Sylwester and Osten, Wolfgang and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {SPIE Micro-Optics (2016)}, month = {apr}, pages = {98880T (8)}, volume = {9888}, doi = {10.1117/12.2228833}, organization = {SPIE Photonics Europe Conference} }
• inproceedings - Vertical integration of array-type miniature interferometers at wafer level by using multi-stack anodic bonding
  VI SPIE Optical Micro- and Nanometrology (2016) / Brussels, Belgium (2016)
  Wang, Wei - Shan | Wiemer, Maik | Froemel, Joerg | Enderlein, Tom | Gessner, Thomas | Lullin, Justine | Bargiel, Sylwester | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  doi | bibtex@inproceedings{e49c1ddc-692a-4cb1-9b94-b62b1c177b29, title = {Vertical integration of array-type miniature interferometers at wafer level by using multi-stack anodic bonding}, author = {Wang, Wei - Shan and Wiemer, Maik and Froemel, Joerg and Enderlein, Tom and Gessner, Thomas and Lullin, Justine and Bargiel, Sylwester and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology (2016)}, month = {apr}, doi = {10.1117/12.2229884}, organization = {SPIE Photonics Europe Conference} }
• inproceedings - Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry
  VI SPIE Optical Micro- and Nanometrology ( 2016) / Brussels, Belgium (2016)
  Bargiel, Sylwester | Lullin, Justine | Le Moal, Patrice | Perrin, Stéphane | Passilly, Nicolas | Albero Silvestre, Jorge | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
  
  doi | bibtex@inproceedings{759e01ed-b084-49d5-beff-df30133e9eb2, title = {Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry}, author = {Bargiel, Sylwester and Lullin, Justine and Le Moal, Patrice and Perrin, St\'ephane and Passilly, Nicolas and Albero Silvestre, Jorge and Froehly, Luc and Lardet-Vieudrin, Franck and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology ( 2016)}, month = {apr}, doi = {10.1117/12.2230487}, organization = {SPIE Photonics Europe Conference} }
• inproceedings - Array-type miniature interferometer as the core optical microsystem of an Optical Coherence Tomography device for tissue inspection
  VI SPIE Optical Micro- and Nanometrology (2016) / Brussels, Belgium (Volume 9890, 2016, Pages pages 98900C-6)
  Passilly, Nicolas | Perrin, Stéphane | Lullin, Justine | Albero Silvestre, Jorge | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe | Krauter, Johann | Osten, Wolfgang | Wang, Wei - Shan | Wiemer, Maik
  
  doi | bibtex@inproceedings{d5e1daaa-7f2c-422c-88fa-c336f81cd909, title = {Array-type miniature interferometer as the core optical microsystem of an Optical Coherence Tomography device for tissue inspection}, author = {Passilly, Nicolas and Perrin, St\'ephane and Lullin, Justine and Albero Silvestre, Jorge and Bargiel, Sylwester and Froehly, Luc and Gorecki, Christophe and Krauter, Johann and Osten, Wolfgang and Wang, Wei - Shan and Wiemer, Maik }, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology (2016)}, month = {apr}, pages = {98900C-6}, volume = {9890}, doi = {10.1117/12.2229477}, organization = {SPIE Photonics Europe Conference} }
• article - Miniature Schwarzschild objective as a micro-optical component free of main aberrations: Concept, design and first realization with silicon-glass micro-machining
  Applied Optics (Volume 55, Issue (10), mar 2016, Pages :2771 - 2779)
  Baranski, Maciej | Passilly, Nicolas | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe
  
  doi
• article - Wafer-level fabrication of multi-element glass lenses: lens doublet with improved optical performances
  Optics Letters (Volume 41, Issue (1), jan 2016, Pages :96-99)
  Albero Silvestre, Jorge | Perrin, Stéphane | Passilly, Nicolas | Krauter, Johann | Gauthier-Manuel, Ludovic | Froehly, Luc | Lullin, Justine | Bargiel, Sylwester | Osten, Wolfgang | Gorecki, Christophe
  
  doi

2015 (10)

• article - Swept source optical coherence tomography endomicroscope based on vertically integrated Mirau micro interferometer: concept and technology
  IEEE Sensors Journal (Volume 15, Issue (12), dec 2015, Pages :7061 - 7070 )
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Froehly, Luc | Baranski, Maciej | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  pdf | doi
• article - An electrostatic vertical microscanner for phase modulating array-type Mirau microinterferometry
  Journal of Micromechanics and Microengineering (Volume 25, Issue (11), oct 2015, Pages :115013)
  Lullin, Justine | Bargiel, Sylwester | Le Moal, Patrice | Perrin, Stéphane | Albero Silvestre, Jorge | Passilly, Nicolas | Froehly, Luc | Lardet-Vieudrin, Franck | Gorecki, Christophe
  
  pdf | doi
• article - Micro-optical design of a three-dimensional microlens scanner for vertically integrated micro-opto-electro-mechanical systems
  Applied Optics (Volume 54, Issue (22), aug 2015, Pages :6924 - 6934)
  Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe | Chenping, Jia | Fromel, Jörg | Wiemer, Maik
  
  pdf | doi
• inproceedings - Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy
  IEEE International Conference on Optical MEMS and Nanophotonics (OMN 2015) / Jerusalem, Israel (2015)
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{2bc56dd6-0d3e-4d59-b6dd-12b2efd13b05, title = {Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy}, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe}, year = {2015}, address = {Jerusalem, Israel}, booktitle = {IEEE International Conference on Optical MEMS and Nanophotonics (OMN 2015)}, month = {aug}, url = {https://publiweb.femto-st.fr/tntnet/entries/12160/documents/author/data}, organization = {International Conference on Optical MEMS and Nanophotonics (OMN 2015)} }
• proceedings - Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy
  International Conference on Optical MEMS and Nanophotonics (OMN 2015), IEEE / Jerusalem, Israel (Editor : d93ce048-2a0f-4351-b685-e1927ef610e2-editor.pdf, aug 2015)
  Struk, Przemyslaw Piotr | Bargiel, Sylwester | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  pdf | doi | bibtex@proceedings{d93ce048-2a0f-4351-b685-e1927ef610e2, title = {Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy}, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2015}, address = {Jerusalem, Israel}, booktitle = {IEEE International Conference on Optical MEMS and Nanophotonics (OMN 2015)}, editor = {d93ce048-2a0f-4351-b685-e1927ef610e2-editor.pdf}, month = {aug}, pages = {We3.2 (2)}, url = {https://publiweb.femto-st.fr/tntnet/entries/12460/documents/author/data}, doi = {10.1109/OMN.2015.7288897}, organization = {International Conference on Optical MEMS and Nanophotonics (OMN 2015)}, publisher = {IEEE} }
• inproceedings - Microsystème OCT plein-champ multi-canaux à base de composants MOEMS intégrés verticalement
  35ème Journées Nationales d'Optique Guidée (JNOG 2015) / Rennes, France (2015, Pages pages 128-129)
  Passilly, Nicolas | Lullin, Justine | Perrin, Stéphane | Albero Silvestre, Jorge | Bargiel, Sylwester | Froehly, Luc | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{94aefeab-55f7-47ce-9d4b-00a8f853bb79, title = {Microsyst\`eme OCT plein-champ multi-canaux \`a base de composants MOEMS int\'egr\'es verticalement}, author = {Passilly, Nicolas and Lullin, Justine and Perrin, St\'ephane and Albero Silvestre, Jorge and Bargiel, Sylwester and Froehly, Luc and Gorecki, Christophe}, year = {2015}, address = {Rennes, France}, booktitle = {35\`eme Journ\'ees Nationales d'Optique Guid\'ee (JNOG 2015)}, month = {jul}, pages = {128-129}, url = {https://publiweb.femto-st.fr/tntnet/entries/11884/documents/author/data} }
• article - Dense arrays of millimeter-sized glass lenses fabricated at wafer-level
  Optics Express (Volume 23, Issue (9), may 2015, Pages :11702 - 11712)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gauthier-Manuel, Ludovic | Bernard, Florent | Froehly, Luc | Krauter, Johann | Osten, Wolfgang | Gorecki, Christophe
  
  pdf | doi
• article - Impact of mirror spider legs on imaging quality in Mirau micro-interferometry
  Optics Letters (Volume 40, Issue (10), may 2015, Pages :2209 - 2212)
  Lullin, Justine | Perrin, Stéphane | Baranski, Maciej | Bargiel, Sylwester | Froehly, Luc | Passilly, Nicolas | Albero Silvestre, Jorge | Gorecki, Christophe
  
  doi
• inproceedings - Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer
  XIV SPIE MOEMS and Miniaturized Systems / San Fransico, CA, United States (Volume 9375, 2015, Pages pages 93750P (7))
  Wang, Wei - Shan | Lullin, Justine | Wiemer, Maik | Fromel, Jörg | Bargiel, Sylwester | Passilly, Nicolas | Gorecki, Christophe | Gessner, Thomas
  
  doi | bibtex@inproceedings{d3ccd283-a217-4d63-b5c9-a1c25af4e528, title = {Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer}, author = {Wang, Wei - Shan and Lullin, Justine and Wiemer, Maik and Fromel, J. and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe and Gessner, Thomas}, year = {2015}, address = {San Fransico, CA, United States}, booktitle = {XIV SPIE MOEMS and Miniaturized Systems}, month = {feb}, pages = {93750P (7)}, volume = {9375}, doi = {10.1117/12.2077641}, organization = {SPIE}, publisher = {SPIE} }
• inproceedings - Technological platform for vertical multi-wafer integration of miniature imaging instruments
  XIV SPIE MOEMS and Miniaturized Systems / San Fransico, CA, United States (Volume 9375, 2015, Pages pages 93750L (8))
  Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik | Fromel, Jörg | Wuensh, D. | Wang, Wei - Shan
  
  doi | bibtex@inproceedings{747812a1-b9a7-4525-81f9-04759782c318, title = {Technological platform for vertical multi-wafer integration of miniature imaging instruments}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik and Fromel, J. and Wuensh, D. and Wang, Wei - Shan}, year = {2015}, address = {San Fransico, CA, United States}, booktitle = {XIV SPIE MOEMS and Miniaturized Systems}, month = {feb}, pages = {93750L (8)}, volume = {9375}, doi = {10.1117/12.2078007}, organization = {SPIE}, publisher = {SPIE} }

2014 (9)

• inproceedings - Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry
  2014 International Conference on Optical MEMS and Nanophotonics (OMN2014) / Glasgow, United Kingdom (Volume , Issue 14682765 , 2014, Pages pages 87 - 88)
  Lullin, Justine | Bargiel, Sylwester | Courjon, Emilie | Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{b7f0ca52-bbea-43d8-8cd0-0a8e1fc1b98a, title = {Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry}, author = {LULLIN, Justine and Bargiel, Sylwester and Courjon, Emilie and PERRIN, St\'ephane and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, address = {Glasgow, United Kingdom}, booktitle = {2014 International Conference on Optical MEMS and Nanophotonics (OMN2014)}, month = {aug}, number = {14682765 }, pages = {87 - 88}, volume = { }, organization = {IEEE}, publisher = {IEEE} }
• inproceedings - Simple setup for optical characterization of microlenses
  Proc. SPIE, Interferometry XVII: Advanced Applications. / San Diego, California, United States. (Volume 9204, 2014, Pages pages 92040D)
  Perrin, Stéphane | Baranski, Maciej | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@inproceedings{9fd85794-795a-458d-a2e8-035b62a490f7, title = {Simple setup for optical characterization of microlenses }, author = {Perrin, St\'ephane and Baranski, Maciej and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {San Diego, California, United States.}, booktitle = {Proc. SPIE, Interferometry XVII: Advanced Applications.}, month = {aug}, pages = {92040D}, volume = {9204}, doi = {10.1117/12.2061299} }
• article - A simple method for quality evaluation of micro-optical components based on 3D IPSF measurement
  Optics Express (Volume 22, Issue (11), may 2014, Pages :13202 - 132012)
  Baranski, Maciej | Perrin, Stéphane | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi
• inproceedings - Optical Design of a Vertically Integrated Array-type Mirau-based OCT system
  SPIE Photonics Europe 2014 / Brussels, Belgique (Volume 9132, 2014, Pages pages 91320L)
  Krauter, Johann | Boettcher, T. | Osten, Wolfgang | Lyda, W. | Passilly, Nicolas | Froehly, Luc | Bargiel, Sylwester | Albero Silvestre, Jorge | Perrin, Stéphane | Lullin, Justine | Gorecki, Christophe
  
  bibtex@inproceedings{fa70f7d1-a76b-4c25-9114-50ba45653855, title = {Optical Design of a Vertically Integrated Array-type Mirau-based OCT system}, author = {Krauter, Johann and Boettcher, T. and Osten, Wolfgang and Lyda, W. and Passilly, Nicolas and Froehly, Luc and Bargiel, Sylwester and Albero Silvestre, Jorge and Perrin, St\'ephane and Lullin, Justine and Gorecki, Christophe}, year = {2014}, address = {Brussels, Belgique}, booktitle = {SPIE Photonics Europe 2014}, month = {apr}, pages = {91320L}, volume = {9132} }
• inproceedings - Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function
  SPIE Photonics Europe 2014 / Bruxelles, Belgique (Volume 9132, 2014, Pages pages 913216 (1-8) )
  Perrin, Stéphane | Baranski, Maciej | Passilly, Nicolas | Froehly, Luc | Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe
  
  doi | bibtex@inproceedings{d0f9a0d8-9d21-48aa-b266-ced52d563b76, title = {Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function }, author = {Perrin, St\'ephane and Baranski, Maciej and Passilly, Nicolas and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {Bruxelles, Belgique}, booktitle = {SPIE Photonics Europe 2014}, month = {apr}, pages = {913216 (1-8) }, volume = {9132}, doi = {10.1117/12.2051122} }
• inproceedings - Arrays of millimeter-sized glass lenses for miniature inspection system
  SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014 / Brussels, Belgium (Volume 9130, 2014, Pages pages 91300U)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
  
  doi | bibtex@inproceedings{9f5d4945-f972-40e3-bbab-1e1e96e47c41, title = {Arrays of millimeter-sized glass lenses for miniature inspection system}, author = {Albero Silvestre, Jorge and Perrin, St\'ephane and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gauthier-Manuel, Ludovic and Gorecki, Christophe}, year = {2014}, address = {Brussels, Belgium}, booktitle = {SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014}, month = {apr}, pages = {91300U}, volume = {9130}, doi = {10.1117/12.2051043} }
• misc - Arrays of millimeter-sized glass lenses for miniature inspection systems
  (apr 2014)
  Albero Silvestre, Jorge | Perrin, Stéphane | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gauthier-Manuel, Ludovic | Gorecki, Christophe
  
  bibtex@misc{87403dab-a526-4686-952c-19f823dd2a36, title = {Arrays of millimeter-sized glass lenses for miniature inspection systems}, author = {Albero Silvestre, Jorge and Perrin, St\'ephane and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gauthier-Manuel, Ludovic and Gorecki, Christophe}, year = {2014}, month = {apr} }
• article - Wafer-level fabrication of micro Cube-typed beam-splitters by saw-dicing of glass substrates
  IEEE Photonics Technology Letters (Volume 26, Issue (1), jan 2014, Pages :100 - 103)
  Baranski, Maciej | Bargiel, Sylwester | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Chenping, Jia | Frömel, Jörg | Wiemer, Maik
  
  doi
• inproceedings - Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners
  (Publisher : Fraunhofer, Volume 9, Issue 1, 2014, Pages pages 128 - 133)
  Wiemer, Maik | Wuensh, D. | Fromel, Jörg | Gessner, Thomas | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{6aff2851-b97b-4782-b529-7f1449e11526, title = {Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners}, author = {Wiemer, Maik and Wuensh, D. and Fromel, J. and Gessner, Thomas and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, editor = {6aff2851-b97b-4782-b529-7f1449e11526-editor.pdf}, month = {jan}, number = {1}, pages = {128 - 133}, volume = {9}, journal = {International Journal of Microwave and Optical Technology}, publisher = {Fraunhofer} }

2013 (2)

• inproceedings - Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate
  17th International Conference on Solid-State Sensors, Actuators and Microsystems / Barcelona, Spain (2013, Pages pages 534 - 537)
  Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Edouard Guichardaz, Blandine | Herth, Etienne | Gorecki, Christophe | Jia, C. | Fromel, Jörg | Wiemer, Maik
  
  doi | bibtex@inproceedings{fbb7b968-f208-465a-b961-9429254f096f, title = {Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Guichardaz, Blandine and Herth, Etienne and Gorecki, Christophe and Jia, C. and Fromel, J. and Wiemer, Maik }, year = {2013}, address = {Barcelona, Spain}, booktitle = {17th International Conference on Solid-State Sensors, Actuators and Microsystems}, month = {jun}, pages = {534 - 537}, doi = {10.1109/Transducers.2013.6626821} }
• inproceedings - 3D micro-optical lens scanner made by multi-wafer bonding technology
  / San Francisco, California, USA (Volume 8616, 2013, Pages pages 861605 (10))
  Bargiel, Sylwester | Gorecki, Christophe | Baranski, Maciej | Passilly, Nicolas | Wiemer, Maik | Jia, C. | Fromel, Jörg
  
  doi | bibtex@inproceedings{e0353c75-a7ca-445e-bb0c-aaadca9f54d3, title = {3D micro-optical lens scanner made by multi-wafer bonding technology}, author = {Bargiel, Sylwester and Gorecki, Christophe and Baranski, Maciej and Passilly, Nicolas and Wiemer, Maik and Jia, C. and Fromel, J.}, year = {2013}, address = {San Francisco, California, USA}, month = {feb}, pages = {861605 (10)}, volume = {8616}, doi = {10.1117/12.2002422}, organization = {Conference on MOEMS and Miniaturized Systems XII}, journal = {Proceedings of SPIE} }

2012 (7)

• inproceedings - Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses
  26th European Conference on Solid-State Transducers, EUROSENSOR 2012 / Krakow, Poland (Volume 47, 2012, Pages pages 1133 - 1136)
  Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  doi | bibtex@inproceedings{fe461fd2-36d5-4ace-b54c-50812fe2907c, title = {Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses}, author = {Bargiel, Sylwester and Jia, C. and Baranski, Maciej and Fr\"omel, J\"org and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, address = {Krakow, Poland}, booktitle = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, month = {nov}, pages = {1133 - 1136}, volume = {47}, doi = {10.1016/j.proeng.2012.09.351}, organization = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• article - Vertical Integration Technologies for Optical Transmissive 3-D Microscanner based on Glass Microlenses
  Procedia Engineering (Volume 47, sep 2012, Pages :1133 – 1136)
  Bargiel, Sylwester | Jia, Minping | Baranski, Maciej | Frömel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  doi
• inproceedings - Micromachined array-type Mirau interferometer for MEMS metrology
  SPIE 8494, Interferometry XVI: Applications / San Diego, CA, United States (Volume 8494, 2012, Pages pages 849403)
  Gorecki, Christophe | Bargiel, Sylwester | Albero Silvestre, Jorge | Passilly, Nicolas | Kujawińska, Malgorzata | Zeitner, U.D.
  
  doi | bibtex@inproceedings{9adb7594-ddb9-47ed-af1b-79d031182901, title = {Micromachined array-type Mirau interferometer for MEMS metrology}, author = {Gorecki, Christophe and Bargiel, Sylwester and Albero Silvestre, Jorge and Passilly, Nicolas and Kujawi\'nska, Malgorzata and Zeitner, U.D.}, year = {2012}, address = {San Diego, CA, United States}, booktitle = {SPIE 8494, Interferometry XVI: Applications}, editor = {Cosme Furlong; Christophe Gorecki; Erik L. Novak}, month = {sep}, pages = {849403}, volume = {8494}, doi = {10.1117/12.932226 }, organization = {SPIE Interferometry XVI: Applications}, journal = {Proceedings of SPIE} }
• article - Microsystèmes et microcomposants pour l’instrumentation optique sur puce
  Photoniques (Volume 60, aug 2012, Pages :33 - 37)
  Passilly, Nicolas | Bargiel, Sylwester | Gorecki, Christophe
  
  doi
• inproceedings - Bonding and contacting of vertically integrated 3-D microscanners
  IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition / San Jose, CA (2012)
  Wiemer, Maik | Fromel, Jörg | Jia, C. | Bargiel, Sylwester | Baranski, Maciej | Passilly, Nicolas | Gorecki, Christophe
  
  bibtex@inproceedings{8d6980da-82ca-4b2e-9a2a-883a04c84f52, title = {Bonding and contacting of vertically integrated 3-D microscanners}, author = {Wiemer, Maik and Fromel, J. and Jia, C. and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2012}, address = {San Jose, CA}, booktitle = {IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition}, month = {may} }
• inproceedings - A hierarchic bonding procedure for the assembly of micro confocal microscope
  / Tokyo, Japan (2012, Pages pages 187 - 189)
  Jia, C. | Fromel, Jörg | Gessner, Thomas | Bargiel, Sylwester | Passilly, Nicolas | Baranski, Maciej | Gorecki, Christophe
  
  doi | bibtex@inproceedings{5c047de9-6811-488a-b290-8edaa3e8b816, title = {A hierarchic bonding procedure for the assembly of micro confocal microscope}, author = {Jia, C. and Fromel, J. and Gessner, T. and Bargiel, Sylwester and Passilly, Nicolas and Baranski, Maciej and Gorecki, Christophe}, year = {2012}, address = {Tokyo, Japan}, month = {may}, pages = {187 - 189}, doi = {10.1109/LTB-3D.2012.6238087}, organization = {Low Temperature Bonding for 3D Integration (LTB-3D), 2012 - 3rd IEEE International Workshop on}, publisher = {IEEE} }
• unpublished - Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses ( 2012)
  Bargiel, Sylwester | Jia, C. | Baranski, Maciej | Fromel, Jörg | Passilly, Nicolas | Gorecki, Christophe | Wiemer, Maik
  
  bibtex@unpublished{1450ecbd-824d-4afc-8785-788dec75538c, title = {Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses}, author = {Bargiel, Sylwester and Jia, C. and Baranski, Maciej and Fromel, J. and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, editor = {Eurosensors XXVI} }

2011 (5)

• article - Micromachined array-type Mirau interferometer for parallel inspection of MEMS
  Journal of Micromechanics and Microengineering (Volume 21, Issue (6), jun 2011, Pages :065005 (10))
  Albero Silvestre, Jorge | Bargiel, Sylwester | Passilly, Nicolas | Dannberg, P. | Stumpf, M. | Zeitner, U.D. | Rousselot, Christophe | Gastinger, Kay | Gorecki, Christophe
  
  pdf | doi
• inproceedings - Micromachined array-type Mirau interferometer for MEMS metrology
  / Beijing, China (2011, Pages pages 546 - 549)
  Gorecki, Christophe | Bargiel, Sylwester | Albero Silvestre, Jorge | Passilly, Nicolas | Rousselot, Christophe | Zeitner, U.D. | Gastinger, Kay
  
  doi | bibtex@inproceedings{1b88929f-8526-4792-943a-9a0339245ac0, title = {Micromachined array-type Mirau interferometer for MEMS metrology}, author = {Gorecki, Christophe and Bargiel, Sylwester and Albero Silvestre, Jorge and Passilly, Nicolas and Rousselot, Christophe and Zeitner, U.D. and Gastinger, Kay}, year = {2011}, address = {Beijing, China}, month = {jun}, pages = {546 - 549}, doi = {10.1109/TRANSDUCERS.2011.5969709}, organization = {Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International }, publisher = {IEEE} }
• inproceedings - Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table
  Proc. of Eurosensor XXIV Conference / Linz, Austria (Publisher : Elsevier, Volume 5, 2011, Pages pages 428 - 431)
  Bargiel, Sylwester | Rabenorosoa, Kanty | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe | Mascaro, Jean-Philippe
  
  pdf | doi | bibtex@inproceedings{78f94135-7320-430e-aea6-1bb0472e8c7c, title = {Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Cl\'evy, C\'edric and Gorecki, Christophe and Lutz, Philippe and Mascaro, Jean-Philippe}, year = {2011}, address = {Linz, Austria}, booktitle = {Proc. of Eurosensor XXIV Conference}, month = {jan}, pages = {428 - 431}, url = {https://publiweb.femto-st.fr/tntnet/entries/10972/documents/author/data}, volume = {5}, doi = {10.1016/j.proeng.2010.09.138}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• inproceedings - Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens
  / Linz, Austria (Publisher : Elsevier, Volume 5, 2011, Pages pages 762 - 765)
  Bargiel, Sylwester | Gorecki, Christophe | Verdot, Thierry | Laszczyk, Karolina Urszula | Albero Silvestre, Jorge | El Fissi, Lamia
  
  doi | bibtex@inproceedings{dacba12a-aca2-4de7-a0c1-c88566f047d8, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens }, author = {Bargiel, Sylwester and Gorecki, Christophe and Verdot, T. and Laszczyk, Karolina Urszula and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2011}, address = {Linz, Austria}, month = {jan}, pages = {762 - 765}, volume = {5}, doi = {10.1016/j.proeng.2010.09.220}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• inproceedings - Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization
  International Manufacturing Science and Engineering Conference, MSEC'11. / Corvallis, Oregon, United States (Volume sur CD ROM, 2011, Pages pages 1-7)
  Rabenorosoa, Kanty | Clevy, Cédric | Bargiel, Sylwester | Mascaro, Jean-Philippe | Lutz, Philippe | Gorecki, Christophe
  
  pdf | bibtex@inproceedings{rabenorosoa:hal-00612659, title = {Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization}, author = {Rabenorosoa, Kanty and Clevy, C\'edric and Bargiel, Sylwester and Mascaro, Jean-Philippe and Lutz, Philippe and Gorecki, Christophe}, year = {2011}, address = {Corvallis, Oregon, United States}, booktitle = {International Manufacturing Science and Engineering Conference, MSEC'11.}, pages = {1-7}, url = {https://publiweb.femto-st.fr/tntnet/entries/1443/documents/author/data}, volume = {sur CD ROM}, organization = {American Society of Mechanical Engineers (ASME)} }

2010 (9)

• article - A two directional electrostatic comb-drive X–Y micro-stage for MOEMS applications
  Sensors and Actuators A: Physical (Volume 163, Issue (1), sep 2010, Pages :255 - 265)
  Laszczyk, Karolina Urszula | Bargiel, Sylwester | Gorecki, Christophe | Krezel, Jerzy | Dziuban, Piotr | Kujawińska, Malgorzata | Callet, Damien | Frank, Sven
  
  doi
• inproceedings - Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table
  Eurosensor XXIV Conference / Linz, Autriche (Publisher : Elsevier, Volume 5, 2010, Pages pages 428-431)
  Bargiel, Sylwester | Rabenorosoa, Kanty | Mascaro, Jean-Philippe | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe
  
  pdf | doi | bibtex@inproceedings{bargiel:hal-00545451, title = {Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Mascaro, Jean-Philippe and Cl\'evy, C\'edric and Gorecki, Christophe and Lutz, Philippe}, year = {2010}, address = {Linz, Autriche}, booktitle = {Eurosensor XXIV Conference}, month = {sep}, pages = {428-431}, url = {https://publiweb.femto-st.fr/tntnet/entries/1332/documents/author/data}, volume = {5}, doi = {10.1016/proeng.2010.09.138}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• inproceedings - Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens
  Eurosensor XXIV Conference / Linz, Austria (Publisher : Elsevier, Volume 5, 2010, Pages pages 762 – 765)
  Bargiel, Sylwester | Gorecki, Christophe | Verdot, Thierry | Laszczyk, Karolina Urszula | Albero Silvestre, Jorge | El Fissi, Lamia
  
  doi | bibtex@inproceedings{dcf96f2e-3efc-42b0-b325-de1414be5b2f, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens}, author = {Bargiel, Sylwester and Gorecki, Christophe and Verdot, T. and Laszczyk, Karolina Urszula and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2010}, address = {Linz, Austria}, booktitle = {Eurosensor XXIV Conference}, editor = {B. Jakoby and M.J. Vellekoop}, month = {sep}, pages = {762 -- 765}, volume = {5}, doi = {10.1016/j.proeng.2010.09.220}, journal = {Procedia Engineering}, publisher = {Elsevier} }
• unpublished - Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens (sep 2010)
  Bargiel, Sylwester | Gorecki, Christophe | Laszczyk, Karolina Urszula | Verdot, Thierry | Albero Silvestre, Jorge | El Fissi, Lamia
  
  bibtex@unpublished{f5216dc0-48ce-4b89-974e-cd75bb284773, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens}, author = {Bargiel, Sylwester and Gorecki, Christophe and Laszczyk, Karolina Urszula and Verdot, T. and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2010}, month = {sep} }
• article - Towards micro-assembly of hybrid MOEMS components on reconfigurable silicon free-space micro-optical bench
  Journal of Micromechanics and Microengineering (Volume 20, Issue (4), apr 2010, Pages :045012 (12pages))
  Bargiel, Sylwester | Rabenorosoa, Kanty | Clevy, Cédric | Gorecki, Christophe | Lutz, Philippe
  
  pdf | doi
• inproceedings - Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS
  Micro-Optics 2010 / Brussels, Belgium (Publisher : SPIE, Volume 7716, 2010, Pages pages 771621)
  Albero Silvestre, Jorge | Bargiel, Sylwester | Gorecki, Christophe | Gastinger, Kay
  
  doi | bibtex@inproceedings{7362ad69-c528-44ee-925a-961f20cddea5, title = {Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS}, author = {Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe and Gastinger, Kay}, year = {2010}, address = {Brussels, Belgium}, booktitle = {Micro-Optics 2010}, month = {apr}, pages = {771621}, volume = {7716}, doi = {10.1117/12.853907}, journal = {Proceedings of SPIE}, publisher = {SPIE} }
• inproceedings - Simulation and in-plane movement characterization of 2D MEMS platform
  Optical Micro- and Nanometrology III / Brussels, Belgium (Publisher : SPIE, Volume 7718, 2010, Pages pages 77180H)
  Krezel, Jerzy | Laszczyk, Karolina Urszula | Bargiel, Sylwester | Gorecki, Christophe | Kujawińska, Malgorzata | Parriaux, Olivier | Tonchev, Svetlen
  
  doi | bibtex@inproceedings{e9a84487-bdc8-429e-8a18-de665dfc38f4, title = {Simulation and in-plane movement characterization of 2D MEMS platform}, author = {Kr\k{e}\.{z}el, Jerzy and Laszczyk, Karolina Urszula and Bargiel, Sylwester and Gorecki, Christophe and Kujawi\'nska, Malgorzata and Parriaux, Olivier and Tonchev, Svetlen}, year = {2010}, address = {Brussels, Belgium}, booktitle = {Optical Micro- and Nanometrology III}, month = {apr}, pages = {77180H}, volume = {7718}, doi = {10.1117/12.855747}, journal = {Proceedings of SPIE}, publisher = {SPIE} }
• inproceedings - Next-generation test equipment for micro-production
  Optical Micro- and Nanometrology III (Publisher : SPIE, Volume 7718, 2010, Pages pages 77180F)
  Gastinger, Kay | Johnsen, Lars | Kujawińska, Malgorzata | Jozwik, Michal | Zeitner, U.D. | Dannberg, P. | Bargiel, Sylwester | Schaeffel, Christoph | Beer, Stephan | Moosburger, Rudolf | Lambelet, Patick
  
  doi | bibtex@inproceedings{fff37d4c-eb61-4368-9809-5e5399abd540, title = {Next-generation test equipment for micro-production}, author = {Gastinger, Kay and Johnsen, Lars and Kujawi\'nska, Malgorzata and Jozwik, Michal and Zeitner, U.D. and Dannberg, P. and Bargiel, Sylwester and Schaeffel, Christoph and Beer, Stephan and Moosburger, Rudolf and Lambelet, Patick}, year = {2010}, booktitle = {Optical Micro- and Nanometrology III}, month = {apr}, pages = {77180F}, volume = {7718}, doi = {10.1117/12.855087}, journal = {Proceedings of SPIE}, publisher = {SPIE} }
• inproceedings - Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.
  Frontiers of Assembly and Manufacturing - Selected papers from ISAM 2009 / Seoul, Korea (Publisher : Springer, 2010, Pages pages 99 - 112)
  Rabenorosoa, Kanty | Bargiel, Sylwester | Clevy, Cédric | Lutz, Philippe | Gorecki, Christophe
  
  pdf | doi | bibtex@inproceedings{rabenorosoa:hal-00544900, title = {Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.}, author = {Rabenorosoa, Kanty and Bargiel, Sylwester and Clevy, C\'edric and Lutz, Philippe and Gorecki, Christophe}, year = {2010}, address = {Seoul, Korea}, booktitle = {Frontiers of Assembly and Manufacturing - Selected papers from ISAM 2009}, edition = {1st}, editor = { Sukhan Lee, Ra\'ul Su\'arez, Byung-Wook Choi }, month = {jan}, pages = {99 - 112}, url = {https://publiweb.femto-st.fr/tntnet/entries/1308/documents/author/data}, doi = {10.1007/978-3-642-14116-4_9}, publisher = {Springer} }