Sylwester Bargiel

@inproceedings{db07e4b7-4e40-4bc3-bba0-52917ed7a4b5, title = {Complex 3D glass structrues by laser-assisted flice method}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Amiot, Fabien}, year = {2025}, address = {ChiangMai, Thailand}, booktitle = {30th Annual of the International Conference on Optical MEMS and Nanophotonics ((OMN) 2025)}, editor = {}, month = {jul}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/21696/documents/author/data} }

@inproceedings{3962df79-a3ee-472d-9f58-3ac3bf071d57, title = {Action concert\'ee transverse 2 \`emes Journ\'ees nationales du Packaging -20-21 mai 2025 -FEMTO-ST -Besan\c{c}on}, author = {Granier, Hugues and Charlot, Samuel and Baron, Thomas and Bargiel, Sylwester and Henry, David}, year = {2025}, address = {Besan\c{c}on, France}, booktitle = {2\`eme Journ\'ees Nationales du Packaging (JNPAC 2025)}, editor = {}, month = {may}, url = {https://publiweb.femto-st.fr/tntnet/entries/21459/documents/author/data} }

@inproceedings{faa8f7db-53cb-4a6d-8b36-02ce15c7a93d, title = {Layer transfer technique of epitaxial rutile TiO2 thin films for photonic applications}, author = {Kuprenaite, Sabina and Bargiel, Sylwester and Boulet, Pascal and Margueron, Samuel and Bartasyte, Ausrine}, year = {2024}, address = {San Francisco, United States}, booktitle = {XV Oxide-based Materials and Devices (2024)}, editor = {}, month = {jan}, pages = {128870 (9)}, url = {https://publiweb.femto-st.fr/tntnet/entries/20488/documents/author/data}, volume = {12887}, doi = {10.1117/12.3013506}, journal = {Proceedings of SPIE}, publisher = {SPIE} }

@inproceedings{4ab88a11-0dbf-4957-9fa7-0a88243da144, title = {Mitigation of He permeation in microfabricated vapor cells with alumino-silicate glass and Al2O3 coatings}, author = {Carl\'e, Cl\'ement and Keshavarzi, Shervin and Mursa, Andrei and Karvinen, Petri and Chutani, Ravinder Kumar and Bargiel, Sylwester and Vicarini, R\'emy and Abb\'e, Philippe and Abdel Hafiz, Moustafa and Maurice, Vincent and Boudot, Rodolphe and Passilly, Nicolas}, year = {2023}, address = {Toyama, Japan}, booktitle = {2023 International Frequency Control Symposium-European Frequency (IFCS-EFTF 2023)}, editor = {}, month = {may}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/19702/documents/author/data} }

@inproceedings{618fcdfb-a833-4b60-a0bc-45a6f6247e16, title = {Micro-Optical Components Manufactured in Glass by Femtosecond Laser Irradiation Followed by Chemical Etching}, author = {Skora, Jean-Loup and Gaiffe, Olivier and Bargiel, Sylwester and Tavernier, Laurent and De Labachelerie, Michel and Passilly, Nicolas}, year = {2021}, address = {Besan\c{c}on, France}, booktitle = {2021 International Symposium on Optomechatronic Technology (ISOT 2021)}, month = {nov}, url = {https://publiweb.femto-st.fr/tntnet/entries/18550/documents/author/data} }

@inproceedings{fc946885-02f4-4f8b-ac12-f407880770e7, title = {3-D micro-assembly approach to fabrication of a scanning MOEMS-based endoscopic probe for Optical Coherence Tomography imaging}, author = {Bargiel, Sylwester and Garcia Ramirez, Fernando Eleazar and Skora, Jean-Loup and Tanguy, Quentin and Gaiffe, Olivier and Lutz, Philippe and Cote, Jean-Marc and Gorecki, Christophe}, year = {2021}, address = {Besan\c{c}on, France}, booktitle = {2021 International Symposium on Optomechatronic Technology (ISOT 2021)}, month = {nov} }

@inproceedings{ee670e63-741e-475b-83e3-0ff4e51e4cab, title = {Design and Simulation of XZ MEMS Micropositioning with 3D-Complex Structure}, author = {Suthisomboon, Tachadol and Bargiel, Sylwester and Rabenorosoa, Kanty and Eakkachai, Pengwang}, year = {2020}, address = {Lyon, France}, booktitle = {2020 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2020)}, editor = {ee670e63-741e-475b-83e3-0ff4e51e4cab-editor.pdf}, month = {jun}, pages = {5}, url = {https://publiweb.femto-st.fr/tntnet/entries/16844/documents/author/data}, doi = {10.1109/DTIP51112.2020.9139150} }

@inproceedings{2a40f2dd-6d62-4c0e-b5ed-c8bf62fecec3, title = {Characterization of an integrated MOEMS scanning probe towards real-time Lissajous-based SS-OCT imaging for endoscopic applications}, author = {Garcia Ramirez, Fernando Eleazar and Bargiel, Sylwester and Gaiffe, Olivier and Tanguy, Quentin and Struk, Przemyslaw and Cote, Jean-Marc and Passilly, Nicolas and Lutz, Philippe and Gorecki, Christophe and Xie, Huikai}, year = {2020}, address = {Online (Electronic Conference), Online (Electronic Conference)}, booktitle = {2020 OSA Biophotonics Congress: Biomedical Optics (2020)}, month = {apr}, pages = {OTu4E.5 (2)}, doi = {10.1364/OCT.2020.OTu4E.5} }

@inproceedings{59aa28e0-79d9-43ff-af0e-9eab97c7e04d, title = {Advanced microfabrication technologies for miniature caesium vapor cells for atomic clocks}, author = {Gorecki, Christophe and Maurice, Vincent and Boudot, Rodolphe and Bargiel, Sylwester and Passilly, Nicolas and Chutani, Ravinder Kumar and Vicarini, R\'emy and Galliou, Serge}, year = {2019}, address = {San Francisco, United States}, booktitle = {2019 SPIE OPTO (SPIE OPTO 2019)}, month = {mar}, pages = {109342F}, volume = {10934} }

@inproceedings{31a12a47-2ac2-4a6f-94f6-57a79bd360e2, title = {Design and microfabrication of a Microscale-Stirling Engine (M-SE) for low temperature heat recovery}, author = {Diallo, Alpha Dassimou and Chutani, Ravinder Kumar and Barthes, Magali and B\'egot, Sylvie and Bargiel, Sylwester and De Labachelerie, Michel and Lanzetta, Fran\c{c}ois}, year = {2018}, address = {Besan\c{c}on, France}, booktitle = {8\`eme Journ\'ees Nationales sur la R\'ecup\'eration et le Stockage d'Energie (JNRSE 2018)}, month = {may}, pages = {39 - 40}, url = {https://publiweb.femto-st.fr/tntnet/entries/14921/documents/author/data}, organization = {Journ\'ees nationales sur la r\'ecup\'eration et le stockage d'\'energie ( JNRSE )} }

@inproceedings{0565983f-6cb8-4029-bf24-3d8a8758479d, title = {Miniature Cs vapor cells and atomic clocks in FEMTO-ST}, author = {Vicarini, R\'emy and Maurice, Vincent and Abdel Hafiz, Moustafa and Chutani, Ravinder Kumar and Bargiel, Sylwester and Galliou, Serge and Passilly, Nicolas and Gorecki, Christophe and Boudot, Rodolphe}, year = {2018}, address = {Turin, Italy}, booktitle = {European Frequency and Time Forum (2018)}, month = {apr}, pages = {1}, url = {https://publiweb.femto-st.fr/tntnet/entries/15285/documents/author/data} }

@inproceedings{e4f80435-6386-423b-89dd-b430529ecb29, title = {The SS-OCT endomicroscopy probe based on MOEMS Mirau micro-interferometer for early stomach cancer detection}, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Tanguy, Quentin and Gorecki, Christophe}, year = {2018}, address = {Strasbourg, France}, booktitle = {SPIE Photonics Europe (2018)}, month = {apr}, number = {VII}, pages = {5}, volume = {10678}, doi = {10.1117/12.2311298}, journal = {Proceedings of SPIE} }

@inproceedings{7b2aa586-04b9-4636-9bda-83cb859d63d8, title = {Miniature Cs vapor cells and atomic clocks in FEMTO-ST}, author = {Boudot, Rodolphe and Passilly, Nicolas and Maurice, Vincent and Vicarini, R\'emy and Rutkowski, Jaroslaw and Abdel Hafiz, Moustafa and Bargiel, Sylwester and Galliou, Serge and Gorecki, Christophe}, year = {2017}, address = {Strathclyde, United Kingdom}, booktitle = {Workshop Miniature Atomic Clocks ( 2017)}, month = {nov}, pages = {1}, url = {https://publiweb.femto-st.fr/tntnet/entries/14253/documents/author/data} }

@inproceedings{e24dda5f-4f27-4b2b-adbd-493486093a7f, title = {Endomicroscope for Gastrointestinal Cancer Detection: Concept and Preliminary Results}, author = {Chikhaoui, Mohamed Taha and Ourak, Mouloud and Tanguy, Quentin and Struk, Przemyslaw Piotr and Rabenorosoa, Kanty and Bargiel, Sylwester and Tamadazte, Brahim and Passilly, Nicolas and Gaiffe, Olivier and Froehly, Luc and Gorecki, Christophe and Lutz, Philippe and Andreff, Nicolas}, year = {2017}, address = {Strasbourg, France}, booktitle = {Surgetica (2017)}, month = {nov}, pages = {1 - 3}, url = {https://publiweb.femto-st.fr/tntnet/entries/14294/documents/author/data}, organization = {Surgetica 2017} }

@inproceedings{527c1b70-fb4b-4903-9f7f-eb4f5a6be5c6, title = {Microfabricated vapor cells for miniature atomic clocks based on post-sealing activated cesium dispenser}, author = {Maurice, Vincent and Rutkowski, Jaroslaw and Kroemer, Eric and Bargiel, Sylwester and Passilly, Nicolas and Boudot, Rodolphe and Chutani, Ravinder Kumar and Galliou, Serge and Gorecki, Christophe and Mauri, Luca and Moraja, Marco}, year = {2017}, address = {Orlando, United States}, booktitle = {European Frequency and Time Forum joint with International Frequency Control Symposium (2017)}, month = {jul}, pages = {636 - 637}, url = {https://publiweb.femto-st.fr/tntnet/entries/14150/documents/author/data}, doi = {10.1109/FCS.2017.8088984}, organization = {IEEE International Ultrasonics Symposium (IUS)} }

@inproceedings{78f3322a-0784-4739-a58e-b1e92f9503b5, title = {Ramsey-CPT spectroscopy in buffer-gas filled Cs vapor micro-fabricated cells}, author = {Boudot, Rodolphe and Maurice, Vincent and Kroemer, Eric and Rutkowski, Jaroslaw and Abdel Hafiz, Moustafa and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe}, year = {2017}, address = {Besan\c{c}on, France}, booktitle = {2017 International Frequency Control Symposium and European Frequency and Time Forum (IFCS-EFTF 2017)}, month = {jul}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/14248/documents/author/data} }

@inproceedings{0058a09c-ce45-4e33-a7a7-1cc575b98968, title = {Matrice d'interf\'erom\`etres de Mirau micro-fabriqu\'es comme composant d'un dispositif OCT plein-champ multicanaux}, author = {Passilly, Nicolas and Perrin, St\'ephane and Froehly, Luc and Bargiel, Sylwester and Gaiffe, Olivier and Lullin, Justine and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2016}, address = {Bordeaux, France}, booktitle = {36\`eme Journ\'ees Nationales d'Optique Guid\'ee (JNOG 2016)}, month = {jul}, pages = {405 - 406}, volume = {P165} }

@inproceedings{01667c72-9e2b-4bf1-a8d2-232f70a9b532, title = {Wafer-level fabrication of arrays of glass lens doublets}, author = {Passilly, Nicolas and Perrin, St\'ephane and Albero Silvestre, Jorge and Krauter, Johann and Gaiffe, Olivier and Gauthier-Manuel, Ludovic and Froehly, Luc and Lullin, Justine and Bargiel, Sylwester and Osten, Wolfgang and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {SPIE Micro-Optics (2016)}, month = {apr}, pages = {98880T (8)}, volume = {9888}, doi = {10.1117/12.2228833}, organization = {SPIE Photonics Europe Conference} }

@inproceedings{e49c1ddc-692a-4cb1-9b94-b62b1c177b29, title = {Vertical integration of array-type miniature interferometers at wafer level by using multi-stack anodic bonding}, author = {Wang, Wei - Shan and Wiemer, Maik and Froemel, Joerg and Enderlein, Tom and Gessner, Thomas and Lullin, Justine and Bargiel, Sylwester and Passilly, Nicolas and Albero Silvestre, Jorge and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology (2016)}, month = {apr}, doi = {10.1117/12.2229884}, organization = {SPIE Photonics Europe Conference} }

@inproceedings{759e01ed-b084-49d5-beff-df30133e9eb2, title = {Vertical comb-drive microscanner with 4x4 array of reference micromirrors for phase-shifting Mirau microinterferometry}, author = {Bargiel, Sylwester and Lullin, Justine and Le Moal, Patrice and Perrin, St\'ephane and Passilly, Nicolas and Albero Silvestre, Jorge and Froehly, Luc and Lardet-Vieudrin, Franck and Gorecki, Christophe}, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology ( 2016)}, month = {apr}, doi = {10.1117/12.2230487}, organization = {SPIE Photonics Europe Conference} }

@inproceedings{d5e1daaa-7f2c-422c-88fa-c336f81cd909, title = {Array-type miniature interferometer as the core optical microsystem of an Optical Coherence Tomography device for tissue inspection}, author = {Passilly, Nicolas and Perrin, St\'ephane and Lullin, Justine and Albero Silvestre, Jorge and Bargiel, Sylwester and Froehly, Luc and Gorecki, Christophe and Krauter, Johann and Osten, Wolfgang and Wang, Wei - Shan and Wiemer, Maik }, year = {2016}, address = {Brussels, Belgium}, booktitle = {VI SPIE Optical Micro- and Nanometrology (2016)}, month = {apr}, pages = {98900C-6}, volume = {9890}, doi = {10.1117/12.2229477}, organization = {SPIE Photonics Europe Conference} }

@inproceedings{2bc56dd6-0d3e-4d59-b6dd-12b2efd13b05, title = {Mirau micro-interferometer for swept-source optical coherence tomography endomicroscopy}, author = {Struk, Przemyslaw Piotr and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe}, year = {2015}, address = {Jerusalem, Israel}, booktitle = {IEEE International Conference on Optical MEMS and Nanophotonics (OMN 2015)}, month = {aug}, url = {https://publiweb.femto-st.fr/tntnet/entries/12160/documents/author/data}, organization = {International Conference on Optical MEMS and Nanophotonics (OMN 2015)} }

@inproceedings{94aefeab-55f7-47ce-9d4b-00a8f853bb79, title = {Microsyst\`eme OCT plein-champ multi-canaux \`a base de composants MOEMS int\'egr\'es verticalement}, author = {Passilly, Nicolas and Lullin, Justine and Perrin, St\'ephane and Albero Silvestre, Jorge and Bargiel, Sylwester and Froehly, Luc and Gorecki, Christophe}, year = {2015}, address = {Rennes, France}, booktitle = {35\`eme Journ\'ees Nationales d'Optique Guid\'ee (JNOG 2015)}, month = {jul}, pages = {128-129}, url = {https://publiweb.femto-st.fr/tntnet/entries/11884/documents/author/data} }

@inproceedings{d3ccd283-a217-4d63-b5c9-a1c25af4e528, title = {Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer}, author = {Wang, Wei - Shan and Lullin, Justine and Wiemer, Maik and Fromel, J. and Bargiel, Sylwester and Passilly, Nicolas and Gorecki, Christophe and Gessner, Thomas}, year = {2015}, address = {San Fransico, CA, United States}, booktitle = {XIV SPIE MOEMS and Miniaturized Systems}, month = {feb}, pages = {93750P (7)}, volume = {9375}, doi = {10.1117/12.2077641}, organization = {SPIE}, publisher = {SPIE} }

@inproceedings{747812a1-b9a7-4525-81f9-04759782c318, title = {Technological platform for vertical multi-wafer integration of miniature imaging instruments}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik and Fromel, J. and Wuensh, D. and Wang, Wei - Shan}, year = {2015}, address = {San Fransico, CA, United States}, booktitle = {XIV SPIE MOEMS and Miniaturized Systems}, month = {feb}, pages = {93750L (8)}, volume = {9375}, doi = {10.1117/12.2078007}, organization = {SPIE}, publisher = {SPIE} }

@inproceedings{b7f0ca52-bbea-43d8-8cd0-0a8e1fc1b98a, title = {Monolithic integration of a glass membrane on silicon micro-actuator for micro-interferometry}, author = {LULLIN, Justine and Bargiel, Sylwester and Courjon, Emilie and PERRIN, St\'ephane and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, address = {Glasgow, United Kingdom}, booktitle = {2014 International Conference on Optical MEMS and Nanophotonics (OMN2014)}, month = {aug}, number = {14682765 }, pages = {87 - 88}, volume = { }, organization = {IEEE}, publisher = {IEEE} }

@inproceedings{9fd85794-795a-458d-a2e8-035b62a490f7, title = {Simple setup for optical characterization of microlenses }, author = {Perrin, St\'ephane and Baranski, Maciej and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {San Diego, California, United States.}, booktitle = {Proc. SPIE, Interferometry XVII: Advanced Applications.}, month = {aug}, pages = {92040D}, volume = {9204}, doi = {10.1117/12.2061299} }

@inproceedings{fa70f7d1-a76b-4c25-9114-50ba45653855, title = {Optical Design of a Vertically Integrated Array-type Mirau-based OCT system}, author = {Krauter, Johann and Boettcher, T. and Osten, Wolfgang and Lyda, W. and Passilly, Nicolas and Froehly, Luc and Bargiel, Sylwester and Albero Silvestre, Jorge and Perrin, St\'ephane and Lullin, Justine and Gorecki, Christophe}, year = {2014}, address = {Brussels, Belgique}, booktitle = {SPIE Photonics Europe 2014}, month = {apr}, pages = {91320L}, volume = {9132} }

@inproceedings{d0f9a0d8-9d21-48aa-b266-ced52d563b76, title = {Metrology of micro-optical components quality using direct measurement of 3D Intensity Point Spread Function }, author = {Perrin, St\'ephane and Baranski, Maciej and Passilly, Nicolas and Froehly, Luc and Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe}, year = {2014}, address = {Bruxelles, Belgique}, booktitle = {SPIE Photonics Europe 2014}, month = {apr}, pages = {913216 (1-8) }, volume = {9132}, doi = {10.1117/12.2051122} }

@inproceedings{9f5d4945-f972-40e3-bbab-1e1e96e47c41, title = {Arrays of millimeter-sized glass lenses for miniature inspection system}, author = {Albero Silvestre, Jorge and Perrin, St\'ephane and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gauthier-Manuel, Ludovic and Gorecki, Christophe}, year = {2014}, address = {Brussels, Belgium}, booktitle = {SPIE Photonics Europe 2014, Micro-optics Conference. Published in SPIE Proceedings Vol. 9130 : Micro-Optics 2014}, month = {apr}, pages = {91300U}, volume = {9130}, doi = {10.1117/12.2051043} }

@inproceedings{6aff2851-b97b-4782-b529-7f1449e11526, title = {Multi-wafer Bonding, Stacking and Interconnecting of Integrated 3-D MEMS Micro Scanners}, author = {Wiemer, Maik and Wuensh, D. and Fromel, J. and Gessner, Thomas and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2014}, editor = {6aff2851-b97b-4782-b529-7f1449e11526-editor.pdf}, month = {jan}, number = {1}, pages = {128 - 133}, volume = {9}, journal = {International Journal of Microwave and Optical Technology}, publisher = {Fraunhofer} }

@inproceedings{fbb7b968-f208-465a-b961-9429254f096f, title = {Wafer-level fabricated micro beamsplitter based on 45-degree saw dicing of glass substrate}, author = {Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Guichardaz, Blandine and Herth, Etienne and Gorecki, Christophe and Jia, C. and Fromel, J. and Wiemer, Maik }, year = {2013}, address = {Barcelona, Spain}, booktitle = {17th International Conference on Solid-State Sensors, Actuators and Microsystems}, month = {jun}, pages = {534 - 537}, doi = {10.1109/Transducers.2013.6626821} }

@inproceedings{e0353c75-a7ca-445e-bb0c-aaadca9f54d3, title = {3D micro-optical lens scanner made by multi-wafer bonding technology}, author = {Bargiel, Sylwester and Gorecki, Christophe and Baranski, Maciej and Passilly, Nicolas and Wiemer, Maik and Jia, C. and Fromel, J.}, year = {2013}, address = {San Francisco, California, USA}, month = {feb}, pages = {861605 (10)}, volume = {8616}, doi = {10.1117/12.2002422}, organization = {Conference on MOEMS and Miniaturized Systems XII}, journal = {Proceedings of SPIE} }

@inproceedings{fe461fd2-36d5-4ace-b54c-50812fe2907c, title = {Vertical integration technologies for optical transmissive 3-D microscanner based on glass microlenses}, author = {Bargiel, Sylwester and Jia, C. and Baranski, Maciej and Fr\"omel, J\"org and Passilly, Nicolas and Gorecki, Christophe and Wiemer, Maik }, year = {2012}, address = {Krakow, Poland}, booktitle = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, month = {nov}, pages = {1133 - 1136}, volume = {47}, doi = {10.1016/j.proeng.2012.09.351}, organization = {26th European Conference on Solid-State Transducers, EUROSENSOR 2012}, journal = {Procedia Engineering}, publisher = {Elsevier} }

@inproceedings{9adb7594-ddb9-47ed-af1b-79d031182901, title = {Micromachined array-type Mirau interferometer for MEMS metrology}, author = {Gorecki, Christophe and Bargiel, Sylwester and Albero Silvestre, Jorge and Passilly, Nicolas and Kujawi\'nska, Malgorzata and Zeitner, U.D.}, year = {2012}, address = {San Diego, CA, United States}, booktitle = {SPIE 8494, Interferometry XVI: Applications}, editor = {Cosme Furlong; Christophe Gorecki; Erik L. Novak}, month = {sep}, pages = {849403}, volume = {8494}, doi = {10.1117/12.932226 }, organization = {SPIE Interferometry XVI: Applications}, journal = {Proceedings of SPIE} }

@inproceedings{8d6980da-82ca-4b2e-9a2a-883a04c84f52, title = {Bonding and contacting of vertically integrated 3-D microscanners}, author = {Wiemer, Maik and Fromel, J. and Jia, C. and Bargiel, Sylwester and Baranski, Maciej and Passilly, Nicolas and Gorecki, Christophe}, year = {2012}, address = {San Jose, CA}, booktitle = {IWLPC - 9th Annual International Wafer-Level Packaging Conference and Tabletop Exhibition}, month = {may} }

@inproceedings{5c047de9-6811-488a-b290-8edaa3e8b816, title = {A hierarchic bonding procedure for the assembly of micro confocal microscope}, author = {Jia, C. and Fromel, J. and Gessner, T. and Bargiel, Sylwester and Passilly, Nicolas and Baranski, Maciej and Gorecki, Christophe}, year = {2012}, address = {Tokyo, Japan}, month = {may}, pages = {187 - 189}, doi = {10.1109/LTB-3D.2012.6238087}, organization = {Low Temperature Bonding for 3D Integration (LTB-3D), 2012 - 3rd IEEE International Workshop on}, publisher = {IEEE} }

@inproceedings{1b88929f-8526-4792-943a-9a0339245ac0, title = {Micromachined array-type Mirau interferometer for MEMS metrology}, author = {Gorecki, Christophe and Bargiel, Sylwester and Albero Silvestre, Jorge and Passilly, Nicolas and Rousselot, Christophe and Zeitner, U.D. and Gastinger, Kay}, year = {2011}, address = {Beijing, China}, month = {jun}, pages = {546 - 549}, doi = {10.1109/TRANSDUCERS.2011.5969709}, organization = {Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), 2011 16th International }, publisher = {IEEE} }

@inproceedings{78f94135-7320-430e-aea6-1bb0472e8c7c, title = {Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Cl\'evy, C\'edric and Gorecki, Christophe and Lutz, Philippe and Mascaro, Jean-Philippe}, year = {2011}, address = {Linz, Austria}, booktitle = {Proc. of Eurosensor XXIV Conference}, month = {jan}, pages = {428 - 431}, url = {https://publiweb.femto-st.fr/tntnet/entries/10972/documents/author/data}, volume = {5}, doi = {10.1016/j.proeng.2010.09.138}, journal = {Procedia Engineering}, publisher = {Elsevier} }

@inproceedings{dacba12a-aca2-4de7-a0c1-c88566f047d8, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens }, author = {Bargiel, Sylwester and Gorecki, Christophe and Verdot, T. and Laszczyk, Karolina Urszula and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2011}, address = {Linz, Austria}, month = {jan}, pages = {762 - 765}, volume = {5}, doi = {10.1016/j.proeng.2010.09.220}, journal = {Procedia Engineering}, publisher = {Elsevier} }

@inproceedings{rabenorosoa:hal-00612659, title = {Modular and Reconfigurable 3D Micro-Optical Benches : Concept, Validation and Characterization}, author = {Rabenorosoa, Kanty and Clevy, C\'edric and Bargiel, Sylwester and Mascaro, Jean-Philippe and Lutz, Philippe and Gorecki, Christophe}, year = {2011}, address = {Corvallis, Oregon, United States}, booktitle = {International Manufacturing Science and Engineering Conference, MSEC'11.}, pages = {1-7}, url = {https://publiweb.femto-st.fr/tntnet/entries/1443/documents/author/data}, volume = {sur CD ROM}, organization = {American Society of Mechanical Engineers (ASME)} }

@inproceedings{bargiel:hal-00545451, title = {Technology platform for hybrid integration of MOEMS on reconfigurable silicon micro-optical table}, author = {Bargiel, Sylwester and Rabenorosoa, Kanty and Mascaro, Jean-Philippe and Cl\'evy, C\'edric and Gorecki, Christophe and Lutz, Philippe}, year = {2010}, address = {Linz, Autriche}, booktitle = {Eurosensor XXIV Conference}, month = {sep}, pages = {428-431}, url = {https://publiweb.femto-st.fr/tntnet/entries/1332/documents/author/data}, volume = {5}, doi = {10.1016/proeng.2010.09.138}, journal = {Procedia Engineering}, publisher = {Elsevier} }

@inproceedings{dcf96f2e-3efc-42b0-b325-de1414be5b2f, title = {Electrostatically driven optical Z-axis scanner with thermally bonded glass microlens}, author = {Bargiel, Sylwester and Gorecki, Christophe and Verdot, T. and Laszczyk, Karolina Urszula and Albero Silvestre, Jorge and El Fissi, Lamia}, year = {2010}, address = {Linz, Austria}, booktitle = {Eurosensor XXIV Conference}, editor = {B. Jakoby and M.J. Vellekoop}, month = {sep}, pages = {762 -- 765}, volume = {5}, doi = {10.1016/j.proeng.2010.09.220}, journal = {Procedia Engineering}, publisher = {Elsevier} }

@inproceedings{7362ad69-c528-44ee-925a-961f20cddea5, title = {Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS}, author = {Albero Silvestre, Jorge and Bargiel, Sylwester and Gorecki, Christophe and Gastinger, Kay}, year = {2010}, address = {Brussels, Belgium}, booktitle = {Micro-Optics 2010}, month = {apr}, pages = {771621}, volume = {7716}, doi = {10.1117/12.853907}, journal = {Proceedings of SPIE}, publisher = {SPIE} }

@inproceedings{e9a84487-bdc8-429e-8a18-de665dfc38f4, title = {Simulation and in-plane movement characterization of 2D MEMS platform}, author = {Kr\k{e}\.{z}el, Jerzy and Laszczyk, Karolina Urszula and Bargiel, Sylwester and Gorecki, Christophe and Kujawi\'nska, Malgorzata and Parriaux, Olivier and Tonchev, Svetlen}, year = {2010}, address = {Brussels, Belgium}, booktitle = {Optical Micro- and Nanometrology III}, month = {apr}, pages = {77180H}, volume = {7718}, doi = {10.1117/12.855747}, journal = {Proceedings of SPIE}, publisher = {SPIE} }

@inproceedings{fff37d4c-eb61-4368-9809-5e5399abd540, title = {Next-generation test equipment for micro-production}, author = {Gastinger, Kay and Johnsen, Lars and Kujawi\'nska, Malgorzata and Jozwik, Michal and Zeitner, U.D. and Dannberg, P. and Bargiel, Sylwester and Schaeffel, Christoph and Beer, Stephan and Moosburger, Rudolf and Lambelet, Patick}, year = {2010}, booktitle = {Optical Micro- and Nanometrology III}, month = {apr}, pages = {77180F}, volume = {7718}, doi = {10.1117/12.855087}, journal = {Proceedings of SPIE}, publisher = {SPIE} }

@inproceedings{rabenorosoa:hal-00544900, title = {Assembly of 3D reconfigurable hybrid MOEMS through microrobotic approach.}, author = {Rabenorosoa, Kanty and Bargiel, Sylwester and Clevy, C\'edric and Lutz, Philippe and Gorecki, Christophe}, year = {2010}, address = {Seoul, Korea}, booktitle = {Frontiers of Assembly and Manufacturing - Selected papers from ISAM 2009}, edition = {1st}, editor = { Sukhan Lee, Ra\'ul Su\'arez, Byung-Wook Choi }, month = {jan}, pages = {99 - 112}, url = {https://publiweb.femto-st.fr/tntnet/entries/1308/documents/author/data}, doi = {10.1007/978-3-642-14116-4_9}, publisher = {Springer} }