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Smart Specialisation Projects

 During the 2007-2013 period, the FEMTO-ST institute benefited from ERDF funding for around 20 projects for an overall amount of around € 5 million.

Over the period 2014-2020, several projects in which FEMTO-ST is a partner or coordinator are also the subject of ERDF funding and are briefly presented below:

Project SMART INN -

The need for passive components operating at frequencies covering the VHF (30 to 300 MHz) and UHF (300 MHz - 3 GHz) bands is part of the development of systems for professional and consumer mobile telecommunications as well as on-board sensor detection, high resolution (Radar applications). Given the state of the art, the dimensional specifications and constraints typically imposed for this type of application, only a passive component guided elastic waves allows to consider a viable solution.

In this context, industrial companies in Franche-Comté have pooled their skills and pooled their development tools to innovate in the field of acousto-electric radio frequency components, expand their commercial proposal and make their products grow in a coordinated manner. For these different objectives, they rely on the FEMTO-ST institute and the Cristal-Innov platform (Rhône-Alpes) and develop the long-term SMART-INN research project which is organized on well-defined actions through specific sub-projects.

Contact : Thomas BARON

Duration : 2015 – 2019


Logos : AR Electronics ; Cristal Innov ; Digital Surf ; frecInIsys ; my-OCCS ; SnowRay

Project 3S MEMS

The project receives financial support from the European Union under the ERDF / ESF Operational Program Franche-Comté and Jura Massif 2014-2020 (specific objective 1.1).

This project aims at the emergence of a new MEMS silicon production line for innovative sensors.

The benefit of a global budget of around € 9 million and the four regional partners: SilMach (project coordinator), Percipio Robotics, Frec | n | sys and the "MIMENTO" technology center of the FEMTO-ST institute, via the University of Franche-Comté (SAIC).

The budget for FEMTO-ST is approximately € 4 million for an estimated aid of € 3.4 million. (75%), with a share of self-financing matching to the valuation of hours dedicated to the implementation of the project by the permanent staff (CNRS and UFC) of the plant.

The 3S MEMS project works according to a "fabless" model. Thus, the 3 industrial partners, adapted production tools, will subcontract the manufacture of the chips themselves to the MIMENTO power plant which will play the role of "foundry" microsystem.
Future prospects, training actions for students and young researchers to work in this field and stay in the region, thus helping to develop and anchor this future axis of specialization on our territory.

The 54-month project began on 1 June 2015 and will end on 30 November 2019. It requires the involvement of all current clean room staff and the recruitment of project-specific engineers. . It allows the acquisition of new state-of-the-art equipment adapted to this new sector, thus contributing to the improvement of the clean room infrastructure.
Additional training actions for staff are also planned.

At the end of the first phase of the project (duration 18 months) which ended in January 2017, the modernization of the clean room MIMENTO was completed thanks to the installation of the new equipment envisaged in the project (DRIE silicon etching machine 6 inches, SRD 6 and 4 inch rinsing system, 6 inch CD-SEM microscope, mask and wafer cleaner, 6 inch aligner, alignment control system) but also thanks to the revaluation of existing equipment (coating track 6-inch automatic, Trikon 6-inch sprayer, purchase of spare parts for the implementation of preventive maintenance), the strengthening of dedicated human resources (recruitment of two research engineers and an engineer assistant for maintenance) and improvement of clean room infrastructure (fluid networks, infrastructure work to install new equipment).

In December 2016 an engraving equipment SPTS-RAPIER, dedicated to the plasma etching of silicon was received. It notably allows the realization of microsystems on silicon substrate or SOI (Silicon On Insulator) of 6 inches
For the MIMEMTO power plant, this burner provides extensive research and development capabilities and enables the sustainability of the clean room infrastructure through the establishment of a real industrial platform, conducive to the support of innovative SMEs. For SilMach, this engraver offers the opportunity to make custom prototypes and series of parts using the "process" know-how developed by this company. This equipment allows it to establish the deployment of ChronoMEMS technology by modern and reliable manufacturing means.

Since February 2017, the project is in its second phase (24 months) and aims at the development of industrial manufacturing processes of ChronoMEMS sensors on dedicated equipment.
Since September 2017 a research engineer specialized in clean room processes has been hired to complete the technical team of the project. Several visits to the clean room were also organized, aimed at both the unit's staff, institutional staff (UFC, Region, Microtechnology Cluster), and industrial partners. In addition, a presentation of the 3S-MEMS project was made at the annual RENATECH network professionals meeting (28-29 March 2017).

For more information on Europe's involvement in the region please activate the link

Contact  : Christophe Gorecki, FEMTO-ST -

Tel: 33 (0) 3 81 66 66 07


Project S3-4AlpClusters

A Project of Smart Specialisation in the Alpine Space

The S3-4AlpClusters is supported by the European Union through the Interreg V B Alpine Space programme.
The objective of this project is to enhance the framework conditions for innovation in the Alpine Space clusters. To achieve this goal, the fourteen partners will work to:

- Initiate information and knowledge exchanges between decision-makers in the various regions of the Alpine Space in involving companies, academics and the civil society;
- Facilitate innovation through cluster initiatives across regions with a strong technological orientation and with a high complementarity among the involved clusters;
- Launch a cluster-to-cluster cooperation in involving all the related partners: local decision-makers, academics, companies and the civil society.

The project will last 30 months, from 11/01/2016 to 04/30/2019, with a global budget of €2.521.964, including 1.929.500 from the ERDF programme.

For more information, please visit the project website