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Laurent Robert

Ingénieur de recherche

Photolithographie UV / Centrale de micro/nano technologies MIMENTO

Département MN2S

CNRS

Courriel :: lrobert [at] femto-st.fr
Adresse :: TEMIS
15B avenue des Montboucons
25030 BESANCON cedex

Publications de Laurent Robert

Voir toutes les publications (36)2023 (1)2021 (4)2019 (2)2018 (3)2017 (2)2016 (1)2015 (3)2013 (3)2012 (6)2011 (8)2010 (3)

2023 (1)

article - Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror
Electronics Letters (Volume 59, Issue (11), may 2023, Pages :12713 (3))
Baron, Thomas | Oliveri, Stefania | Richard, Thomas | Soumann, Valérie | Belharet, Djaffar | Robert, Laurent | Raschetti, Marina | Salut, Roland | Courjon, Emilie | Laroche, Thierry | Bernard, Florent | Clairet, Alexandre | Ballandras, Sylvain
doi

2021 (4)

inproceedings - Etude des propriétés du graphene transféré sur LiNbO3
2021 Journées Nationales d'Optique Guidée (JNOG 2021) / Dijon, France (2021, Pages pages 2)
Costanza, Mario | Margueron, Samuel | Belharet, Djaffar | Robert, Laurent | De Sousa Lopes Moreira, Arthur | Bartasyte, Ausrine
pdf | bibtex@inproceedings{ab6354f6-7e86-4600-a4d3-53cb946d881e, title = {Etude des propri\'et\'es du graphene transf\'er\'e sur LiNbO3}, author = {Costanza, Mario and Margueron, Samuel and Belharet, Djaffar and Robert, Laurent and De Sousa Lopes Moreira, Arthur and Bartasyte, Ausrine}, year = {2021}, address = {Dijon, France}, booktitle = {2021 Journ\'ees Nationales d'Optique Guid\'ee (JNOG 2021)}, month = {jul}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/18760/documents/author/data} }
article - Galenic Lab-on-a-Chip concept for lipid nanocapsules production
Nanoscale (Volume 13, Issue (27), jun 2021, Pages :11899 - 11912)
Rolley, Nicolas | Bonnin, Marie | Lefebvre, Guillaume | Verron, Sylvain | Bargiel, Sylwester | Robert, Laurent | Riou, Jérémie | Simonsson, Carl | Bizien, Thomas | Gimel, Jean-Christophe | Benoit, Jean-Pierre | Brotons, Guillaume | Calvignac, Brice
pdf | doi
article - Screening of spherical moulds manufactured isotropically in plasma etching conditions
Contributions to Plasma Physics (Volume 61, Issue (7), apr 2021, Pages :e202100023 (8))
Herth, Etienne | Belharet, Djaffar | Edmond, Samson | Bouville, David | Robert, Laurent | Lardet-Vieudrin, Franck
doi
article - Acoustic-radiation free phononic biosensor for in-liquid low-noise gravimetric detection
Microsystems & Nanoengineering (Volume 7, feb 2021, Pages :8 (10))
Feng, Gao | Bermak, Amine | Benchabane-Gaiffe, Sarah | Robert, Laurent | Khelif, Abdelkrim
pdf | doi

2019 (2)

inproceedings - New method of monitoring the intrinsic strain during electrochemical deposition process using rosette gauge
45th International Conference on Micro and Nano Engineering (MNE 2019) / Rhodes, Greece (2019)
Belharet, Djaffar | Gabrion, Xavier | Courtot, Anthony | Robert, Laurent | Queste, Samuel | Ulliac, Gwenn
bibtex@inproceedings{3457192f-65c6-4191-8eb1-186bbbb6e408, title = {New method of monitoring the intrinsic strain during electrochemical deposition process using rosette gauge }, author = {Belharet, Djaffar and Gabrion, Xavier and Courtot, Anthony and Robert, Laurent and Queste, Samuel and Ulliac, Gwenn}, year = {2019}, address = {Rhodes, Greece}, booktitle = {45th International Conference on Micro and Nano Engineering (MNE 2019)}, month = {sep} }
article - Bloch surface waves at the telecommunication wavelength with lithium niobate as the top layer for integrated optics
Applied Optics (Volume 58, Issue (7), mar 2019, Pages :1757 - 1762)
Kovalevich, Tatiana | Belharet, Djaffar | Robert, Laurent | Ulliac, Gwenn | Kim, Myun-Sik | Herzig, Hans Peter | Grosjean, Thierry | Bernal-Artajona, Maria-Pilar
pdf | doi

2018 (3)

article - Anisotropic conductivity enhancement in inclined W-Cu columnar films
Materials Letters (Volume 232, dec 2018, Pages :126 - 129)
El Beainou, Raya | Salut, Roland | Robert, Laurent | Cote, Jean-Marc | Potin, Valérie | Martin, Nicolas
doi
inproceedings - Deep reactive Ion Etching of Nb2O5/SiO2 multilayer structures for multispectral imaging devices
44th International conference on Micro and Nanoengineering (MNE 2018) / Copenhagen, Denmark (2018)
Belharet, Djaffar | Lumeau, Julien | Robert, Laurent | Moreau, Antonin | Raschetti, Marina
pdf | bibtex@inproceedings{af1dc371-510c-4416-a061-da671a555a4d, title = {Deep reactive Ion Etching of Nb2O5/SiO2 multilayer structures for multispectral imaging devices}, author = {Belharet, Djaffar and Lumeau, Julien and Robert, Laurent and Moreau, Antonin and Raschetti, Marina}, year = {2018}, address = {Copenhagen, Denmark}, booktitle = {44th International conference on Micro and Nanoengineering (MNE 2018)}, month = {sep}, url = {https://publiweb.femto-st.fr/tntnet/entries/15839/documents/author/data} }
article - Towards highly reliable, precise and reproducible fabrication of photonic crystal slabs on lithium niobate
Journal of Lightwave Technology (Volume 37, Issue (3), aug 2018, Pages :698 - 703)
Calero Vila, Venancio | Suarez, Miguel Angel | Salut, Roland | Robert, Laurent | Caspar, Alexis | Baida, Fadi | Courjal, Nadège | Bernal-Artajona, Maria-Pilar
doi

2017 (2)

inproceedings - Towards complex structured multilayer optical elements
2017 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2017) / Orléans, France (2017)
Moreau, Antonin | Belharet, Djaffar | Robert, Laurent | Lumeau, Julien
pdf | bibtex@inproceedings{57bec90b-78b3-437c-a268-c8e67985dc0c, title = {Towards complex structured multilayer optical elements }, author = {Moreau, Antonin and Belharet, Djaffar and Robert, Laurent and Lumeau, Julien}, year = {2017}, address = {Orl\'eans, France}, booktitle = {2017 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2017)}, month = {nov}, url = {https://publiweb.femto-st.fr/tntnet/entries/14309/documents/author/data}, organization = {Journees Nationales sur les Technologies Emergentes en Micronanofabrication 2017 (JNTE 2017) } }
article - A Quantitative Fourier Transform Infrared Study of the Grafting of Aminosilane Layers on Lithium Niobate Surface
Applied Spectroscopy (Volume 71, Issue (7), mar 2017, Pages :1568-1577)
Benmouhoub, Chafia | Gauthier-Manuel, Bernard | Zegadi, Ameur | Robert, Laurent
doi

2016 (1)

article - Microfluidic separation of magnetic nanoparticles on an ordered array of magnetized micropillars
Physical Review E (Volume 93, Issue (6), jun 2016, Pages :062604 (8))
Orlandi, G. | Kuzhir, P. | Izmaylov, Y. | Alves Marins, J. | Ezzaier, H. | Robert, Laurent | Doutre, F. | Noblin, X. | Lomenech, C. | Bossis, G. | Meunier, Alexandre | Sandoz, G. | Zubarev, A.
doi

2015 (3)

inproceedings - Capacitive micro-acoustic resonators based on silicon wafer scale packaging structures
2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015) / Lyon, France (2015)
Belkadi, Nesrine | Baron, Thomas | Herth, Etienne | Soumann, Valérie | Martin, Gilles | Robert, Laurent | Dulmet, Bernard
bibtex@inproceedings{436ca25b-e765-4a8a-ad02-7bfe57458e70, title = {Capacitive micro-acoustic resonators based on silicon wafer scale packaging structures}, author = {Belkadi, Nesrine and Baron, Thomas and Herth, Etienne and Soumann, Val\'erie and Martin, Gilles and Robert, Laurent and Dulmet, Bernard}, year = {2015}, address = {Lyon, France}, booktitle = {2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015)}, month = {nov} }
inproceedings - Deep reactive ion etching process for PZT actuators
2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015) / Lyon, France (2015)
Belharet, Djaffar | Chalvet, Vincent | Clevy, Cédric | Rakotondrabe, Micky | Robert, Laurent
pdf | bibtex@inproceedings{146125a7-c804-44f9-b74a-93c8251ca684, title = {Deep reactive ion etching process for PZT actuators}, author = {Belharet, Djaffar and Chalvet, Vincent and Clevy, C\'edric and Rakotondrabe, Micky and Robert, Laurent}, year = {2015}, address = {Lyon, France}, booktitle = {2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015)}, month = {nov}, url = {https://publiweb.femto-st.fr/tntnet/entries/13983/documents/author/data}, organization = {Journees Nationales sur les Technologies Emergentes en Micronanofabrication 2015 (JNTE 2015)} }
inproceedings - New Capacitive Micro-Acoustic Resonators Machined in Single-Crystal Silicon Stacked Structures
International Frequency Control Symposium and European Frequency and Time Forum (IFCS-EFTF 2015) / Denver, United States (2015, Pages pages 6)
Belkadi, Nesrine | Baron, Thomas | Robert, Laurent | Bernard, Florent | Herth, Etienne | Dulmet, Bernard
doi | bibtex@inproceedings{adb97d4e-36dc-44bc-a5fb-87974b031933, title = {New Capacitive Micro-Acoustic Resonators Machined in Single-Crystal Silicon Stacked Structures }, author = {Belkadi, Nesrine and Baron, Thomas and Robert, Laurent and Bernard, Florent and Herth, Etienne and Dulmet, Bernard}, year = {2015}, address = {Denver, United States}, booktitle = {International Frequency Control Symposium and European Frequency and Time Forum (IFCS-EFTF 2015)}, month = {apr}, pages = {6}, doi = {10.1109/FCS.2015.7138959} }

2013 (3)

article - Assessment of Digital Image Correlation Measurement Accuracy in the Ultimate Error Regime: Main Results of a Collaborative Benchmark
Strain (Volume 49, Issue (6), dec 2013, Pages :483 - 496)
Amiot, Fabien | Bornert, M. | Doumalin, P. | Dupré, J.C. | Fazzini, M. | Orteu, J.J. | Poilâne, Christophe | Robert, Laurent | Rotinat, R. | Toussaint, E. | Wattrisse, B. | Wienin, J.S.
pdf | doi
article - Electroplated Ni mask for plasma etching of submicron-sized features in LiNbO3
Microelectronic Engineering (Volume 105, may 2013, Pages :95 - 98)
Lecestre, Aurélie | Benchabane-Gaiffe, Sarah | Robert, Laurent | Salut, Roland | Ulliac, Gwenn
pdf | doi
article - Surface acoustic wave guiding in a diffractionless high aspect ratio transducer
Applied Physics Letters (Volume 102, Issue (11), mar 2013, Pages :113508)
Socie, Ludovic | Benchabane-Gaiffe, Sarah | Robert, Laurent | Khelif, Abdelkrim | Laude, Vincent
pdf | doi

2012 (6)

inproceedings - Structuring Lithium Niobate: Collective Etching and FIB Milling for Photonics and Phononics
5th International Photonics and OptoElectronics Meetings (POEM 2012) / Wuhan, China (Publisher : Osa Publishing, Volume ITh3A, 2012, Pages pages ITh3A.1)
Benchabane-Gaiffe, Sarah | Robert, Laurent | Lecestre, Aurélie | Ulliac, Gwenn | Salut, Roland | Laude, Vincent
pdf | doi | bibtex@inproceedings{cb59cd38-fc12-4c9d-a113-a513dcb9b5a9, title = {Structuring Lithium Niobate: Collective Etching and FIB Milling for Photonics and Phononics}, author = {Benchabane, Sarah and Robert, Laurent and Lecestre, Aur\'elie and Ulliac, Gwenn and Salut, Roland and Laude, Vincent}, year = {2012}, address = {Wuhan, China}, booktitle = {5th International Photonics and OptoElectronics Meetings (POEM 2012)}, month = {nov}, pages = {ITh3A.1}, url = {https://publiweb.femto-st.fr/tntnet/entries/10653/documents/author/data}, volume = {ITh3A}, doi = {10.1364/IONT.2012.ITh3A.1}, publisher = {Osa Publishing} }
inproceedings - SAW waveguiding in high aspect ratio interdigital transducers
IEEE Ultrasonics Symposium 2012 / Dresden, Germany (2012, Pages pages 1794 - 1797 )
Socie, Ludovic | Benchabane-Gaiffe, Sarah | Robert, Laurent | Laude, Vincent
doi | bibtex@inproceedings{dde99202-7a16-473d-a3f7-1a5b115d310f, title = {SAW waveguiding in high aspect ratio interdigital transducers}, author = {SOCIE, Ludovic and Benchabane, Sarah and Robert, Laurent and Laude, Vincent}, year = {2012}, address = {Dresden, Germany}, booktitle = {IEEE Ultrasonics Symposium 2012}, month = {oct}, pages = {1794 - 1797 }, doi = {10.1109/ULTSYM.2012.0450}, organization = {IEEE}, publisher = {IEEE} }
article - Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes
Microelectronic Engineering (Volume 88, Issue (8), aug 2012, Pages :2679 – 2682)
Metwally, Khaled Hussein | Queste, Samuel | Robert, Laurent | Salut, Roland | Khan Malek, Chantal
doi
inproceedings - A new electrostatically-excited silicon structure for CMUT and TE-mode resonators and sensing applications
Frequency Control Symposium (FCS), 2012 IEEE International / Baltimore, MD (2012, Pages pages 10.1109/FCS.2012.6243724)
Ivan, Mihaela Eugenia | Dulmet, Bernard | Martin, Gilles | Abbé, Philippe | Robert, Laurent | Ballandras, Sylvain
doi | bibtex@inproceedings{80cff687-43f8-4ffe-8ca5-230fd0a49fd6, title = {A new electrostatically-excited silicon structure for CMUT and TE-mode resonators and sensing applications }, author = {Ivan, Michaela and Dulmet, Bernard and Martin, Gilles and Abb\'e, Philippe and Robert, Laurent and Ballandras, Sylvain}, year = {2012}, address = {Baltimore, MD}, booktitle = {Frequency Control Symposium (FCS), 2012 IEEE International }, month = {may}, pages = {10.1109/FCS.2012.6243724}, doi = {10.1109/FCS.2012.6243724} }
article - Roll manufacturing of flexible microfluidic devices in thin PMMA and COC foils by embossing and lamination
Microsystem Technologies (Volume 18, Issue (2), feb 2012, Pages :199 - 207 )
Metwally, Khaled Hussein | Robert, Laurent | Queste, Samuel | Gauthier-Manuel, Bernard | Khan Malek, Chantal
doi
article - SU-8-based rapid tooling for thermal roll embossing
Microsystem Technologies (Volume 18, 2012, Pages :1863 - 1869)
Metwally, Khaled Hussein | Robert, Laurent | Salut, Roland | Khan Malek, Chantal

2011 (8)

article - Accordion structured porous silicon membranes: Application to contamination detection of organic volatile by FTIR spectroscopy
Journal of Membrane Science (Volume 383, Issue (1-2), nov 2011, Pages :250 - 253)
Cavalaglio, Sébastien | Robert, Laurent | Gauthier-Manuel, Bernard
doi
article - High resolution thermoplastic rapid manufacturing using injection moulding with SU-8 based silicon tools
CIRP Journal of Manufacturing Science and Technology (Volume 4, Issue (4), oct 2011, Pages :382 - 390)
Khan Malek, Chantal | Robert, Laurent | Michel, Gérard | Singh, Akanksha | Sahli, Mohamed Lakdhar | Gauthier-Manuel, Bernard
pdf | doi
article - Hot roll embossing in thermoplastic foils using dry-etched silicon stamp and multiple passes
Microelectronic Engineering (Volume 88, Issue (8), aug 2011, Pages :2679 - 2682)
Metwally, Khaled Hussein | Queste, Samuel | Robert, Laurent | Salut, Roland | Khan Malek, Chantal
doi
article - Injection Moulding Using an Exchangeable Si Mould Insert
Micro and Nanosystems (Volume 3, Issue (3), aug 2011, Pages :230 - 235)
Singh, Akanksha | Metwally, Khaled Hussein | Michel, Gérard | Queste, Samuel | Robert, Laurent | Khan Malek, Chantal
article - Microfluidic biochip injection moulded using a patterned SU-8/Si mould insert
Journal of Polymer Engineering (Volume 31, Issue (2-3), jul 2011, Pages :293 - 298)
Singh, Akanksha | Robert, Laurent | Michel, Gérard | Khan Malek, Chantal
doi
article - Position-referenced microscopy for live cell culture monitoring
Biomedical optics express (Volume 2, Issue (5), may 2011, Pages :1307 - 1318)
Galeano Zea, July Andrea | Sandoz, Patrick | Gaiffe, Emilie | Launay, Sophie | Robert, Laurent | Jacquot, Maxime | Hirchaud, Fabienne | Prétet, Jean-Luc | Mougin, Christiane
pdf | doi
inproceedings - Locally resonant and Bragg band gaps for surface acoustic waves
Phononics 2011: First International Conference on Phononic Crystals, Metamaterials and Optomechanics / Santa Fe, USA (2011, Pages pages 86-87)
Achaoui, Younes | Khelif, Abdelkrim | Benchabane-Gaiffe, Sarah | Robert, Laurent | Laude, Vincent
bibtex@inproceedings{c6ac4d44-bece-4fe3-845d-ecc615c5a06d, title = {Locally resonant and Bragg band gaps for surface acoustic waves}, author = {Achaoui, Younes and Khelif, Abdelkrim and Benchabane, Sarah and Robert, Laurent and Laude, Vincent}, year = {2011}, address = {Santa Fe, USA}, booktitle = {Phononics 2011: First International Conference on Phononic Crystals, Metamaterials and Optomechanics}, month = {may}, pages = {86-87} }
article - Experimental observation of locally-resonant and Bragg band gaps for surface guided waves in a phononic crystal of pillars
Physical Review B (Volume 83, mar 2011, Pages :104201 (5))
Achaoui, Younes | Khelif, Abdelkrim | Benchabane-Gaiffe, Sarah | Robert, Laurent | Laude, Vincent
doi

2010 (3)

inproceedings - Micro-injection Moulding using an Exchangeable Microstructured Si Mould Insert
Proceedings of the 7th International Conference on Multi-Material Micro Manufacture (4M 2010) / Bourg en Bresse and Oyonnax, France (2010, Pages pages doi:10.3850/978-981-08-6555-9_171)
Singh, Akanksha | Michel, Gérard | Queste, Samuel | Robert, Laurent | Gauthier-Manuel, Bernard | Khan Malek, Chantal
doi | bibtex@inproceedings{9f8e47cf-68c4-43ce-80ba-6709aef30f18, title = {Micro-injection Moulding using an Exchangeable Microstructured Si Mould Insert}, author = {Singh, Akanksha and Michel, G\'erard and Queste, Samuel and Robert, Laurent and Gauthier-Manuel, Bernard and Khan-Malek, Chantal}, year = {2010}, address = {Bourg en Bresse and Oyonnax, France}, booktitle = {Proceedings of the 7th International Conference on Multi-Material Micro Manufacture (4M 2010)}, editor = {Bertrand Fillon, Chantal Khan-Malek, Stefan Dimov}, month = {nov}, pages = {doi:10.3850/978-981-08-6555-9_171}, doi = {10.3850/978-981-08-6555-9_171}, organization = {4M Association}, publisher = {Research Publishing} }
inproceedings - Phononic crystal of pillars on a surface
2010 IEEE Ultrasonics Symposium (IUS) / San Diego, United States (2010, Pages pages 6D-2)
Achaoui, Younes | Khelif, Abdelkrim | Robert, Laurent | Benchabane-Gaiffe, Sarah | Laude, Vincent
bibtex@inproceedings{5a8e1107-afef-4776-9ec9-9e31c00e45f5, title = {Phononic crystal of pillars on a surface}, author = {Achaoui, Younes and Khelif, Abdelkrim and Robert, Laurent and Benchabane, Sarah and Laude, Vincent}, year = {2010}, address = {San Diego, United States}, booktitle = {2010 IEEE Ultrasonics Symposium (IUS)}, month = {oct}, pages = {6D-2}, organization = {IEEE}, publisher = {IEEE} }
inproceedings - Cristal phononique constitué de piliers sur une surface
Journées Nationales de la matière condensée 2010 / Troyes (2010)
Achaoui, Younes | Khelif, Abdelkrim | Robert, Laurent | Benchabane-Gaiffe, Sarah | Laude, Vincent
bibtex@inproceedings{36f51dcb-2c0d-4103-bb34-f122f8bdc897, title = {Cristal phononique constitu\'e de piliers sur une surface}, author = {Achaoui, Younes and Khelif, Abdelkrim and Robert, Laurent and Benchabane, Sarah and Laude, Vincent}, year = {2010}, address = {Troyes}, booktitle = {Journ\'ees Nationales de la mati\`ere condens\'ee 2010}, month = {aug} }

Vous êtes ici

Laurent Robert

Publications de Laurent Robert

2023 (1)

2021 (4)

2019 (2)

2018 (3)

2017 (2)

2016 (1)

2015 (3)

2013 (3)

2012 (6)

2011 (8)

2010 (3)

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