Anthony ALMIRALL : "Thin Film Integration in Silicon Technologies for High Frequency RF and Ultra Wideband RF Filtering Applications LiNbO3"

 PhD works of Anthony ALMIRALL : "Thin Film Integration in Silicon Technologies for High Frequency RF and Ultra Wideband RF Filtering Applications LiNbO3""

Abstract  :

This thesis deals with the design and realization of bulk elastic wave (BAW) components for filtering applications for 5G applications. We study different structures of resonators and filters with impedance elements centered at 5.89 GHz, corresponding to the center frequency of the 802.11p band for V2X, with a relative bandwidth greater than 10% made on silicon substrates. In order to be compatible with LiNbO₃ deposition constraints, the SMR structure was studied using an oxide/oxide mirror. A whole work of deposition optimization was then undertaken in order to obtain the most reliable manufacturing process as possible. In order to characterize the deposited layers, several steps have been performed. The first was the polarization measurement of the layers deposited on silicon wafers which shows a ferroelectric and non-leaky behavior proving the efficiency of the deposition method. The second is the production of SMR and HBAR resonators. They have shown responses that are difficult to use, but viable designs were proposed to improve the responses obtained. Finally, a proposal for making a SAW resonators for high frequencies was made in this thesis. The latter consisting in the production of a SAW resonator by depositing LiNbO₃ on sapphire substrates. These structures have been shown to achieve frequencies of the order of 5 GHz while having coupling up to 8%.

Composition of jury :

• Mme Marta CLEMENT LORENZO Professeur des Universités, Universidad Politécnica de Madrid Reporter
• Mr Matthieu CHATRAS Professeur des Universités, Université de Limoges Reporter
• Mme Thérèse LEBLOIS Professeur des Universités, Université de Franche-Comté Reviewer
• Mr Denis REMIENS Professeur des Universités, UPHF Reviewer
• Mr Frédéric LEROY Professeur des Universités, Université de Marseille Reviewer
  
• Mme Ausrine BARTASYTE Professeur des Universités, Université de Franche-Comté PhD Director
  
• Mr Stéphane CHAMALY Directeur senior, Qualcomm France RFFE SARL PhD Co-director
• Mr Thomas BARON Ingénieur de recherche HDR, FEMTO-ST PhD Co-director

Localization : Auditorium JJ Gagnepain - Bâtiment TEMIS - 15B, Avenue des Montboucons - Besançon