Rim ETTOURI, Seminar on metallic MEMS manufacturing

We are pleased to welcome Rim Ettouri from GREMI/Orléans (Groupe de Recherches sur l'Énergétique des Milieux Ionisés), UMR 7344 CNRS/Université d'Orléans | Polytech Orléans who is working on the fabrication of metallic MEMS, on 09/02/2023 at 2:00 pm at the Jules Haag amphitheatre - SUPMICROTECH - ENSMM

Abstract : Bulk-Titanium-Based MEMS for Biomedical Applications: Materials, Process Flow, Mechanisms and Extensive Characterization

Titanium (Ti) and its alloys have gained widespread popularity as biomedical materials because of their exceptional strength-to-weight ratio, superior resistance to corrosion, and excellent biocompatibility. This presentation focuses on the study of high-aspect-ratio (HAR) bulk titanium etching with the aim of creating innovative breakthrough systems for applications in the development of next-generation biomedical implants. The overall objective, scientifically and technologically unprecedented, is to have optimal control of the HAR etching (up to 1:10, with depths of several hundred micrometers) and reproducible microfabrication processes. The characterization of the plasma and the etched structures, by the combined use of different techniques (e.g. SEM+EDS, XPS and optical microscopy (OM)) is a key step for the understanding of the etching mechanisms and to ensure the repeatability of the processes. Finally, the effect of thermal aging on the microstructure, mechanical properties, and corrosion resistance of the fabricated titanium is presented. Together, these results demonstrate the potential of using Ti MEMS technology to fabricate new biomedical microsystems with increased robustness, safety and performance.