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• Djaffar Belharet

Djaffar Belharet

MN2S department

CNRS

E-mail:

djaffar.belharet [at] femto-st.fr

03 81 66 55 83

Address:

TEMIS

15B avenue des Montboucons
25030 BESANCON cedex

Djaffar Belharet's publications

View all publications (21)2024 (1)2023 (2)2022 (1)2021 (5)2019 (3)2018 (3)2017 (3)2016 (1)2015 (2)

2024 (1)

• article - Microfabrication of piezoelectric MEMS based on thick LiNbO3 single-crystal films
  Nanotechnology (Volume 35, Issue (187), apr 2024, Pages :185504 (8))
  Ouhabaz, Merieme | Belharet, Djaffar | Costanza, Mario | Giuffrida, Giada | Bartasyte, Ausrine | Trigona, Carlo | Margueron, Samuel
  
  pdf | doi

2023 (2)

• article - Acousto-electric measurements at 2.5 GHz on graphene transferred onto YX128°-LiNbO3
  Nanotechnology (Volume 34, Issue (32), aug 2023, Pages :325202 (8))
  Costanza, Mario | La Spina, Léa | De Sousa Lopes Moreira, Arthur | Belharet, Djaffar | Bartasyte, Ausrine | Margueron, Samuel
  
  pdf | doi
• article - Collective fabrication of guided longitudinal SAW resonator without Bragg grating mirror
  Electronics Letters (Volume 59, Issue (11), may 2023, Pages :12713 (3))
  Baron, Thomas | Oliveri, Stefania | Richard, Thomas | Soumann, Valérie | Belharet, Djaffar | Robert, Laurent | Raschetti, Marina | Salut, Roland | Courjon, Emilie | Laroche, Thierry | Bernard, Florent | Clairet, Alexandre | Ballandras, Sylvain
  
  doi

2022 (1)

• article - Lead-Free LiNbO3 Thick Film MEMS Kinetic Cantilever Beam Sensor/Energy Harvester
  Sensors (Volume 22, Issue (2), jan 2022, Pages :559 (12))
  Barrientos, Gabriel | Clementi, Giacomo | Trigona, Carlo | Ouhabaz, Merieme | Gauthier-Manuel, Ludovic | Belharet, Djaffar | Margueron, Samuel | Bartasyte, Ausrine | Malandrino, Graziella | Baglio, Salvatore
  
  doi

2021 (5)

• inproceedings - Stabilized Pt Interdigitated Electrodes for High- Temperature SAW Sensors
  2021 IEEE IEEE International Ultrasonics Symposium (IUS 2021) / Xi'An, China (2021, Pages pages 4)
  De Sousa Lopes Moreira, Arthur | Bartasyte, Ausrine | Belharet, Djaffar | Soumann, Valérie | Margueron, Samuel | Broenner, Andreas
  
  pdf | doi | bibtex@inproceedings{8cca4684-fa1e-4315-be5b-1388efe51555, title = {Stabilized Pt Interdigitated Electrodes for High- Temperature SAW Sensors}, author = {De Sousa Lopes Moreira, Arthur and Bartasyte, Ausrine and Belharet, Djaffar and Soumann, Val\'erie and Margueron, Samuel and Broenner, Andreas}, year = {2021}, address = {Xi'An, China}, booktitle = {2021 IEEE IEEE International Ultrasonics Symposium (IUS 2021)}, month = {sep}, pages = {4}, url = {https://publiweb.femto-st.fr/tntnet/entries/18711/documents/author/data}, doi = {10.1109/IUS52206.2021.9593767} }
• article - Highly Coupled and Low Frequency Vibrational Energy Harvester Using Lithium Niobate on Silicon
  Applied Physics Letters (Volume 119, jul 2021, Pages :013904 (12))
  Clementi, Giacomo | Ouhabaz, Merieme | Margueron, Samuel | Suarez, Miguel Angel | Bassignot, Florent | Gauthier-Manuel, Ludovic | Belharet, Djaffar | Dulmet, Bernard | Bartasyte, Ausrine
  
  pdf | doi
• inproceedings - Etude des propriétés du graphene transféré sur LiNbO3
  2021 Journées Nationales d'Optique Guidée (JNOG 2021) / Dijon, France (2021, Pages pages 2)
  Costanza, Mario | Margueron, Samuel | Belharet, Djaffar | Robert, Laurent | De Sousa Lopes Moreira, Arthur | Bartasyte, Ausrine
  
  pdf | bibtex@inproceedings{ab6354f6-7e86-4600-a4d3-53cb946d881e, title = {Etude des propri\'et\'es du graphene transf\'er\'e sur LiNbO3}, author = {Costanza, Mario and Margueron, Samuel and Belharet, Djaffar and Robert, Laurent and De Sousa Lopes Moreira, Arthur and Bartasyte, Ausrine}, year = {2021}, address = {Dijon, France}, booktitle = {2021 Journ\'ees Nationales d'Optique Guid\'ee (JNOG 2021)}, month = {jul}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/18760/documents/author/data} }
• inproceedings - High Performance Lithium Niobate Energy Harvesters
  Online 10èmes Journées Nationales sur la Récupération et le Stockage de l'Energie (JNRSE 2021) / Grenoble, France (2021, Pages pages 2)
  Clementi, Giacomo | Ouhabaz, Merieme | Margueron, Samuel | Suarez, Miguel Angel | Bassignot, Florent | Gauthier-Manuel, Ludovic | Belharet, Djaffar | Dulmet, Bernard | Bartasyte, Ausrine
  
  pdf | bibtex@inproceedings{313a21cd-515f-49b3-b93c-b42453b1831e, title = {High Performance Lithium Niobate Energy Harvesters}, author = {Clementi, Giacomo and Ouhabaz, Merieme and Margueron, Samuel and Suarez, Miguel Angel and Bassignot, Florent and Gauthier-Manuel, Ludovic and Belharet, Djaffar and Dulmet, Bernard and Bartasyte, Ausrine}, year = {2021}, address = {Grenoble, France}, booktitle = {Online 10\`emes Journ\'ees Nationales sur la R\'ecup\'eration et le Stockage de l'Energie (JNRSE 2021)}, month = {jun}, pages = {2}, url = {https://publiweb.femto-st.fr/tntnet/entries/18628/documents/author/data} }
• article - Screening of spherical moulds manufactured isotropically in plasma etching conditions
  Contributions to Plasma Physics (Volume 61, Issue (7), apr 2021, Pages :e202100023 (8))
  Herth, Etienne | Belharet, Djaffar | Edmond, Samson | Bouville, David | Robert, Laurent | Lardet-Vieudrin, Franck
  
  doi

2019 (3)

• inproceedings - New method of monitoring the intrinsic strain during electrochemical deposition process using rosette gauge
  45th International Conference on Micro and Nano Engineering (MNE 2019) / Rhodes, Greece (2019)
  Belharet, Djaffar | Gabrion, Xavier | Courtot, Anthony | Robert, Laurent | Queste, Samuel | Ulliac, Gwenn
  
  bibtex@inproceedings{3457192f-65c6-4191-8eb1-186bbbb6e408, title = {New method of monitoring the intrinsic strain during electrochemical deposition process using rosette gauge }, author = {Belharet, Djaffar and Gabrion, Xavier and Courtot, Anthony and Robert, Laurent and Queste, Samuel and Ulliac, Gwenn}, year = {2019}, address = {Rhodes, Greece}, booktitle = {45th International Conference on Micro and Nano Engineering (MNE 2019)}, month = {sep} }
• article - Bloch surface waves at the telecommunication wavelength with lithium niobate as the top layer for integrated optics
  Applied Optics (Volume 58, Issue (7), mar 2019, Pages :1757 - 1762)
  Kovalevich, Tatiana | Belharet, Djaffar | Robert, Laurent | Ulliac, Gwenn | Kim, Myun-Sik | Herzig, Hans Peter | Grosjean, Thierry | Bernal-Artajona, Maria-Pilar
  
  pdf | doi
• article - Fast ultra-deep silicon cavities: Toward isotropically etched spherical silicon molds using an ICP-DRIE
  Journal of Vacuum Science & Technology B (Volume 37, Issue (2), feb 2019, Pages :021206 (10))
  Herth, Etienne | Baranski, Maciej | Belharet, Djaffar | Edmond, Samson | Bouville, David | Calvet, Laurie E. | Gorecki, Christophe
  
  pdf | doi

2018 (3)

• inproceedings - Instrumented NanoTweezer based on Opto-Mechatronic approach
  2018 The International Symposium on Optomechatronic Technology (2018) / Cancun, Mexico (Issue OW_3.1, 2018, Pages pages )
  Martinez Mozo, Cezar | Clevy, Cédric | Bettahar, Houari | Belharet, Djaffar | Courjal, Nadège | Lutz, Philippe
  
  bibtex@inproceedings{d86e864d-db2f-4e93-83c1-ee4d43bdb04b, title = {Instrumented NanoTweezer based on Opto-Mechatronic approach}, author = {Martinez Mozo, Cezar and Clevy, C\'edric and Bettahar, Houari and Belharet, Djaffar and Courjal, Nad\`ege and Lutz, Philippe}, year = {2018}, address = {Cancun, Mexico}, booktitle = {2018 The International Symposium on Optomechatronic Technology (2018)}, month = {nov}, number = {OW_3.1}, pages = { } }
• inproceedings - Deep reactive Ion Etching of Nb2O5/SiO2 multilayer structures for multispectral imaging devices
  44th International conference on Micro and Nanoengineering (MNE 2018) / Copenhagen, Denmark (2018)
  Belharet, Djaffar | Lumeau, Julien | Robert, Laurent | Moreau, Antonin | Raschetti, Marina
  
  pdf | bibtex@inproceedings{af1dc371-510c-4416-a061-da671a555a4d, title = {Deep reactive Ion Etching of Nb2O5/SiO2 multilayer structures for multispectral imaging devices}, author = {Belharet, Djaffar and Lumeau, Julien and Robert, Laurent and Moreau, Antonin and Raschetti, Marina}, year = {2018}, address = {Copenhagen, Denmark}, booktitle = {44th International conference on Micro and Nanoengineering (MNE 2018)}, month = {sep}, url = {https://publiweb.femto-st.fr/tntnet/entries/15839/documents/author/data} }
• article - Development and Characterization of Thinned PZT Bulk Technology Based Actuators Devoted to a 6-DOF Micropositioning Platform
  Microelectronic Engineering (Volume 97, may 2018, Pages :53 - 60)
  Benouhiba, Amine | Belharet, Djaffar | Bienaime, Alex | Chalvet, Vincent | Rakotondrabe, Micky | Clevy, Cédric
  
  pdf | doi

2017 (3)

• inproceedings - Towards complex structured multilayer optical elements
  2017 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2017) / Orléans, France (2017)
  Moreau, Antonin | Belharet, Djaffar | Robert, Laurent | Lumeau, Julien
  
  pdf | bibtex@inproceedings{57bec90b-78b3-437c-a268-c8e67985dc0c, title = {Towards complex structured multilayer optical elements }, author = {Moreau, Antonin and Belharet, Djaffar and Robert, Laurent and Lumeau, Julien}, year = {2017}, address = {Orl\'eans, France}, booktitle = {2017 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2017)}, month = {nov}, url = {https://publiweb.femto-st.fr/tntnet/entries/14309/documents/author/data}, organization = {Journees Nationales sur les Technologies Emergentes en Micronanofabrication 2017 (JNTE 2017) } }
• article - Experimental evidence of Bloch surface waves on photonic crystals with thin-film LiNbO3 as a top layer
  Photonics Research (Volume 5, Issue (6), oct 2017, Pages :649-653)
  Kovalevich, Tatiana | Belharet, Djaffar | Robert, Laurent | Kim, Myun-Sik | Herzig, Hans Peter | Grosjean, Thierry | Bernal-Artajona, Maria-Pilar
  
  doi
• inproceedings - Direct Process flow fabrication for piezoelectric actuators based on thinned PZT technology
  43th international conference on micro and nanoengineering (MNE 2017) / Braga, Portugal (2017)
  Belharet, Djaffar | Benouhiba, Amine | Rakotondrabe, Micky | Clevy, Cédric
  
  bibtex@inproceedings{f7617b7c-faa1-4f11-8f17-a1f79079be0b, title = {Direct Process flow fabrication for piezoelectric actuators based on thinned PZT technology}, author = {Belharet, Djaffar and Benouhiba, Amine and Rakotondrabe, Micky and Clevy, C\'edric}, year = {2017}, address = {Braga, Portugal}, booktitle = {43th international conference on micro and nanoengineering (MNE 2017)}, month = {sep}, organization = {43rd International conference on Micro and NanoEngineering, 2017 } }

2016 (1)

• inproceedings - Biodevice Optimization based on Piezoresistive Sensor Dedicated to Monitoring the Culture of Fibroblast Collagen Lattices
  Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2016) / Budapest, Hungary (2016, Pages pages 4)
  Yusifli, Elmar | Gharbi, Tijani | Yahiaoui, Reda | Herth, Etienne | Belharet, Djaffar | Addouche, Mahmoud
  
  doi | bibtex@inproceedings{a0ee96b8-1f98-4dcd-bae7-b687f2d6d61c, title = {Biodevice Optimization based on Piezoresistive Sensor Dedicated to Monitoring the Culture of Fibroblast Collagen Lattices}, author = {Yusifli, Elmar and Gharbi, Tijani and Yahiaoui, Reda and Herth, Etienne and Belharet, Djaffar and Addouche, Mahmoud}, year = {2016}, address = {Budapest, Hungary}, booktitle = {Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP 2016)}, month = {may}, pages = {4}, doi = {10.1109/DTIP.2016.7514874} }

2015 (2)

• inproceedings - Bio-device of cultured fibroblast collagen lattices
  2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015) / Lyon, France (2015)
  Yusifli, Elmar | Herth, Etienne | Yahiaoui, Reda | Belharet, Djaffar | Gharbi, Tijani
  
  bibtex@inproceedings{ba2e1a07-a9ba-42ed-9739-57e25822d8a6, title = {Bio-device of cultured fibroblast collagen lattices}, author = {Yusifli, Elmar and Herth, Etienne and Yahiaoui, Reda and Belharet, Djaffar and Gharbi, Tijani}, year = {2015}, address = {Lyon, France}, booktitle = {2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015)}, month = {nov} }
• inproceedings - Deep reactive ion etching process for PZT actuators
  2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015) / Lyon, France (2015)
  Belharet, Djaffar | Chalvet, Vincent | Clevy, Cédric | Rakotondrabe, Micky | Robert, Laurent
  
  pdf | bibtex@inproceedings{146125a7-c804-44f9-b74a-93c8251ca684, title = {Deep reactive ion etching process for PZT actuators}, author = {Belharet, Djaffar and Chalvet, Vincent and Clevy, C\'edric and Rakotondrabe, Micky and Robert, Laurent}, year = {2015}, address = {Lyon, France}, booktitle = {2015 Journees Nationales sur les Technologies Emergentes en Micronanofabrication (JNTE 2015)}, month = {nov}, url = {https://publiweb.femto-st.fr/tntnet/entries/13983/documents/author/data}, organization = {Journees Nationales sur les Technologies Emergentes en Micronanofabrication 2015 (JNTE 2015)} }