Applied Mechanics department
Materials, Surfaces, Processes & Structure

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Team leader



One of the thematic aspects of “MEMS Acoustics and Energy�? is the development of modeling and the optimization of energy conversion mechanisms in MEMS interfaces. Another of the theme’s challenges is the analysis of MEMS periodic networks exhibiting nonlinearities, especially electrical and mechanical, and the identification of these nonlinearities.

Yet another aspect of this theme is the development, implementation and reliability of the processes of microfabrication for the production of prototypes (basic propositions for the validation of modeling efforts and/or demonstrators of feasibility).

One final aspect is the electromechanical characterization of MEMS fabricated internally via the specific experimental platform developed by the team (MEMS control, the means to visualize movements both within and outside of the plane, electrical characterization).

Goals and Research Areas

These theoretical and experimental aspects rest principally upon two fields of research whose point in common is electrostatic actuation: CMUTs-type vibrating membranes and high power density actuators.

The principal locks identified relate to:

› The modeling of geometric nonlinearities, come mainly from wide displacements of elementary CMUTs membranes and electromechanical nonlinearities from the electrostatic forces involved (nonlinearities worsened in applications requiring a high level of dynamic stress).

› The modeling of acoustic/mechanical/electrical couplings of a MEMS network, integrating nonlinearities (a relatively linear-looking opportunity to increase performances or to create new functionalities).

Control of residual constraints from microfabrication processes of CMUTs membranes (membranes obtained in conformity with sizing from behavior models).

› Study and optimization of electromechanical efficiency of high-power density actuators (Identification of mechanical architectures and feeding strategies to optimize both mechanical performances and also actuator power consumption).


The production, design and mechanical modeling of CMUTs comprises one of the MEMS team’s strong points. Another specialty is the production of high-power density actuators.

Implementing our work

Collaborative projects are planned with the MN2S Department on the use of CMUTs to determine nanoparticle mass. On the national level, ties are currently being established with the research laboratory GREMAN (at the Université de Tours) through the organization of congresses or conventions on CMUTs, participation in thesis juries and the hosting of guest professors).

The team has industrial contacts via a RAPID project with the company AER of the ALCEN Group on determining aircraft speed using CMUTs transmitters and receivers.