Probe station (BF HF)

Probe station (BF/HF)

Contact :

Thomas BARON
ENSMM Building - Time Frequency Department
03 81 40 28 96 (Office)
thomas.baron@femto-st.fr

Location :

Furnace Area, ENSMM

Presentation :


FEMTO-ST owns 2 probe stations coming from Süss Microtec to test the devices fabricated in clean room. One station is dedicated to low-frequency components (PM8) and the other one is used for high-frequency devices (PM5).

Technical characteristics :

- Sample size : up to 6"
- Chuck diameter: 150 mm
- Temperature range : 20°C to 200°C
- X-Y moving : stroke of 150 mm
- Resolution : 5 µm
- Repeatability : 1 µm
- Z adjustment : 10 mm
- Angle moving : 360 °
- Vacuum attraction mechanism

Achieved resultst :