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Scanning confocal microscope (Nanojura)

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Scanning confocal microscope (Nanojura)

Scanning confocal microscope (Nanojura)

Contact :

TEMIS Sciences Building – Office N3-05
03 63 08 26 22 (Office)

Location :

TEMIS cleanroom
Characterization area

Principle :

The Nanojura confocal microscope is used for high resolution surface profile measurement and can operate with opaque or transparent surfaces. It even has the property to measure the profiles of interfaces within the devices. It allows to measure the roughness and the topography and to measure the thickness if the material is transparent.

The Nanojura tool is based on the chromatic confocal microscopy (or spectral) which uses a white light source and a dispersive lens in order to create a series of focal planes, each corresponding to a particular wavelength. This series of focal planes extends to a more or less important depth depending on the used lens and giving the measurement range of the sensor. The light reflected by the object is returned to an opaque plane with a hole (pinhole). The focused wavelength (here the green ray) will then present a higher intensity than that from planes above or below. The spectrometer provided an intensity curve depending on the wavelength and allows to identify the focused wavelength and then to deduce the corresponding rise in the measuring range of the sensor thanks to a calibration of the detector.

The principle of measurement is essentially a point by point method. The system is supplemented by an X and Y shiftable stage controlled by computer which allows to scan the entire surface of the sample and finally to form the 3D-profile. This system is relatively slow as the number of points can grow fast, but achieves high resolution in Z (below 1nm within a range of 600μm) and in the XY plane (0.1μm) over a full 100x100mm2 area.

Technical characteristics :

o Confocal sensors : Nobis 400 and Nobis 1000
o Axial resolution (Z) : several nm
o 2 sensor heads : sensor range 400µm/7µm-spot size or sensor range 1mm/11µm-spot size
o Maximum slope of smooth surfaces : 30°
o Maximum sample size (X,Y) : 100mm x 100mm
o Minimum stage displacement X, Y and Z : 0.1µm

Example of measurement :