Tencor Alpha-Step IQ surface profiler

Tencor Alpha-Step IQ surface profiler

Location :

TEMIS cleanroom
Characterization Area

Techical characteristics :

- Accuracy : 0.1 %
- Maximum scanning length: 10 mm from left to right and 2 mm from right to left
- Scanning velocity : 2 to 200 µm/s;
- Lateral resolution : given by the diamond point (cone of 60° and 5 µm terminal radius)
- Sample dimensions : 4 inch
- Sample thickness : up to 17.5 mm
- Contact force : adjustable from 1 to 100 mg
- Gauge block : 6500 Å aluminium Tencor Instruments


- Thickness measurements :

some nm to 1 500 µm in 3 ranges :

o 0 - 20 µm
o 0 - 400 µm
o 0 - 2 000 µm

- Roughness and waviness measurement :

o Display of Ra, Rq, Rt, Wa, Wq and Wt... parameters
o Cut-off filter : adjustable (generally 80 µm)