Technology Centre
MIicrofabrication for MEchanics, Nanosciences, Thermics and Optics

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Main technological resources

From a technical point of view, all the facilities are divided into different technological resources in the clean-room. To manufacture a component, several technological steps can be linked up :

  •  Lithography (reproduction of a design by using photosensitive or electron polymer)
  • Deposition (of materials with differents properties)
  • Etching (dry or wet etching)
  • Characterization (validation of the devices all along the different steps of fabrication)
  • Bonding-Packaging (packaging of the final component)
  • Photolithograpy
  • Thermal Deposits and Treatments
  • Plasma / Chemical Engraving
  • Nanotechnologies
  • Characterization
  • Connectivity and Packaging
  • Microfabrication off cleanroom
  • Industrial line of micro-manufacturing